氣壓配重系統是以氣壓缸支撐工具機主軸的重量，以降低重力對主軸驅動馬達的負載、節省能源的損耗並降低重力對主軸運動的影響。因此氣壓配重系統相較於其他配重系統而言，更適合使用於高速加工機。傳統氣壓配重系統迴路的設計，是以氣壓缸連接一大的儲氣桶，以降低主軸移動時造成的壓力變化，並以機械式調壓閥調整儲氣桶的壓力。現今工具機的進給速度朝高速化發展，使用傳統氣壓配重系統在主軸高速運行時會造成較大的壓力變化。本文改良傳統氣壓配重系統迴路的設計，直接以機械式調壓閥調節氣壓缸的壓力並輔以開關閥作壓力補償，以提升主軸高速移動時氣壓缸壓力的穩定性。為提升氣壓配重系統的性能以及縮小配重系統的體積，本文設計比例壓力閥控制迴路以及伺服閥控制迴路應用於氣壓配重系統。用比例壓力閥取代傳統機械式調壓閥作開路控制，雖然可以有效提升配重系統的性能，但仍需連接儲氣桶方能有效降低主軸移動時所造成的壓力變化。因此本文設計一自調式模糊控制器應用於比例壓力閥控制迴路，在沒有連接儲氣桶的狀況下，依然可有效的降低氣壓缸的壓力變化。由於比例壓力閥控氣壓配重系統會因為主軸移動速度與加速度的提升，而導致配重系統的性能的下降。因此本文設計一改良型模糊滑動模式控制器應用於伺服閥控制迴路，以提升氣壓配重系統的穩定性。其次根據氣壓缸摩擦力的特性，適當的調節氣壓缸的平衡壓力，以補償摩擦力對氣壓缸出力的影響。伺服閥控力量控制系統亦可提供一額外的出力，可用於降低馬達在移動上或是加工上的負載。實驗結果顯示，本論文所提出的氣壓迴路架構以及控制法則，可有效提升氣壓配重系統的性能以及穩定性，並具有可行性與實用性。

The pneumatic counterweight system enables machine tools to support the weight of the spindle of the machine tool by using air cylinders. The pneumatic counterweight system is a suitable method of counterweight method because of its high speed and force capacity, combined with its low price and clean operations. The pneumatic pressure compensation method applied for the conventional pneumatic counterweight system is designed to connect a large air tank with a pneumatic cylinder. The air tank is connected to the compressed air source, the compressor, and the pressure regulator or the pressure switch is added to achieve the constant pressure. Therefore the pressure change in the pneumatic cylinder can be reduced due to the spindle motion. However, if the spindle of the machine tool travels at a faster rate, a constant pressure cannot be hold using the conventional method. Therefore this study reformed the pneumatic circuit of the conventional pneumatic counterweight system, the pressure regulator and pressure switch was connected to the cylinder directly. The variation of the pressure in the cylinder can be held by using the new pneumatic circuit. In order to increase the performance of the counterweight system and make the volume of the system smaller, the proportional pressure valve controlled circuit and servo valve controlled circuit are designed and developed as an alternative to the pneumatic counterweight system. The self tuning fuzzy controller was designed and implemented for regulating the pressure in the cylinder using the proportional valve. Through the control method, the fluctuation of the pressure can be decreased efficiently without connecting a large air tank if the machine tool travels at a faster rate. The performance of the proportional valve control system can be decreased at the higher speed and acceleration, so that a modified fuzzy sliding mode controller is developed to increase the stability of the pressure in the cylinder. Besides, the pressure of the cylinder can be also adjusted to eliminate the effect of the friction force by using servo valve controlled system. This control method can be reduced the load during machining and moving. The experimental results show that the proposed pneumatic control circuits and control methods have the ability, in practice, to improve the performance and stability of pneumatic counterweight system.

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