本研究使用準分子雷射微加工技術在PVDF壓電薄膜上，設計及製造感測直徑為0.7mm的陣列式壓力感測器。PVDF壓電薄膜具有高壓電應力係數、高響應頻率及高耐衝擊力等特性，極適合用於動態量測。而準分子雷射微細加工機則具有精密度高及高能量密度等特點，因此適合於本實驗中微感測器之加工。

　　為了提高加工精度，本研究以石英鍍鉻光罩進行雷射加工。而製成之感測器則以鉛筆心壓斷法進行動態之校正，最後並用於量測空蝕汽泡流對鄰近物體表面所造成的脈衝壓力。結果顯示，以PVDF壓電薄膜所製成之感測器，非常適合用於強度高、作用時間短之壓力脈衝訊號。

　　為了架構一個完整的多頻道壓力量測系統，我們設計了一組由運算放大器構成的訊號處理電路，接於所製造的感測器陣列上。使得各個獨立的感測點所量測到的訊號，能讓個人電腦控制的訊號擷取卡同步抓取訊號。

　　An excimer laser micro-machining technique was used to fabricate a micro pressure sensor, 0.7 mm in diameter, on a piezoelectric polyvinylidene fluoride (PVDF) film. The PVDF film is known for its large piezoelectric stress coefficient, high frequency response, and the capability to sustain large impact pressure. These properties make it a good candidate for dynamic measurement. Meanwhile, the excimer laser micro-machining technique is characterized by its high precision and high working energy density and is particularly fit in our fabrication purpose.

　　In order to increase the efficiency of the laser machining, a chrome plated optical mask was employed to fabricate the sensor. The sensor was then dynamically calibrated using a pencil breaking method and was applied to measure the impulse pressure associated with the collapse of a cavitation bubble near a solid boundary. It is demonstrated that the PVDF piezoelectric sensor is very suitable for measuring the impulse pressure of high amplitude and short duration.

　　To construct a complete system for multi-channel pressure measurement, we also carefully designed a signal processing circuit consisting of operational amplifiers connected to the sensor array. Signal from all the independent sensing units were then sampled simultaneously to a personal computer using fast-sampling A/D cards.

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