本文目標為使氣壓伺服三軸微操作系統可達成定位控制與軌跡追循控制。由於氣體的可壓縮性、系統的摩擦力、閥體中位點的非線性特性及系統黏滯滑動等現象，使氣壓伺服系統為高度非線性系統，因此使用不須精確數學模式的自調式模糊控制器並搭配灰色預測器與模糊死區補償作為定位控制器。在追蹤軌跡方面，則利用模糊交叉耦合控制器作補償，減少各軸同動時的路徑誤差。由實驗結果可知，在不同的定位情況下，定位精度均可達0.04 m以內，而模糊交叉耦合控制器可以有效的改善軌跡追尋的路徑誤差。

The object of this paper is achieved the positioning control and path tracking control for the 3-axes pneumatic micro- manipulation system to achieve. Servo pneumatic system have the highly nolinear characteristics that are associated with high air compressibility,the friction force of the system,nonlinear behavior of the air flow rate through the valve at the null position of the valve,and the stick-slip effect. For positioning control, the hybrid self-tuning fuzzy controller with the gray predictior and fuzzy dead-zone compensators are proposed in this paper. For path tracking control, the cross-coupled fuzzy controller is designed to reduce the difference response of every axis. From the experimental results, in case of different position, the positioning accuracy can reach the 0.04 m. Moreover, the cross-coupled fuzzy controller can improve the accuracy of the path tracking control.

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