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研究生：	陳岱璋 Chen, Dai-Jang
論文名稱：	利用化學氣相沈積技術成長氧化鋅奈米柱結構及其特性分析 Investigation of Properties of ZnO Nanorad Structures by Chemical Vapor Deposition
指導教授：	李清庭 Lee, Ching-Ting 許進恭 Sheu, Jinn-Kong
學位類別：	碩士 Master
系所名稱：	理學院 - 光電科學與工程研究所 Institute of Electro-Optical Science and Engineering
論文出版年：	2007
畢業學年度：	95
語文別：	英文
論文頁數：	67
中文關鍵詞：	氧化鋅、自我催化氣液固
外文關鍵詞：	self-catalyst VLS, ZnO
相關次數：	點閱：55 下載：1
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氧化鋅(ZnO)為一個直接能隙半導體，其具有與氮化鎵(GaN)相似的寬能隙(室溫下約3.37 eV)，因此具備有藍光發光元件所需之特質，且在室溫下60 meV之激子束縛能，相較於氮化鎵(25 meV)來的更穩定，非常有利於在室溫下或是高溫中做為激子雷射之發展。此外，因為其特殊的晶格與能帶結構造成獨特的物理化學性質，使氧化鋅成為重要的奈米材料。
本篇論文採用管式高溫爐並利用化學氣相沈積方式成長氧化鋅奈米柱。氧化鋅奈米柱經由自我催化氣液固(vapor-liquid-solid, VLS)之成長機制，並藉由控制壓力、溫度、氣體流量…等條件，成長出較具方向性之奈米柱結構。
首先，以磁控濺鍍系統(RF-sputter)，於p型矽基板上成長氧化鋅薄膜，作為成長之晶種。之後透過管式高溫爐將鋅粉以氣相沈積方式，經由氬氣的載流及與氧氣結合沈積於基板上，進而形成氧化鋅奈米結構。
由實驗結果可發現不同的溫度梯度影響奈米柱的形貌與尺寸，在適當的條件下，用場發射掃描式電子顯微鏡(FE-SEM)，觀測以化學氣相沈積方式成長的氧化鋅奈米柱結構，其呈現六角柱形狀，直徑約50 ~ 500 nm，長度約略1 ~ 3 μm。並藉由高解析穿透式電子顯微鏡(HR-TEM)與X射線繞射儀(XRD)，觀察到成長之奈米柱具有良好的單晶結構與c軸方向。且藉由光激發光譜(Photoluminescence, PL)發現紫外光波段比綠光波段強度強，同時比較時析光激發光譜(Time-Resolved Photo- luminescence, TR-PL)，顯示成長出之奈米結構具有良好的發光性質，及較少的缺陷。
最後，將氧化鋅奈米柱結構運用在場發射元件上作為陰極電極，利用奈米柱結構達到良好的場發射特性。

Zinc oxide (ZnO) is a wide direct band gap semiconductor (3.37 eV, RT) which is similar to gallium nitride (GaN), so possesses the characteristics of blue light emitting devices. Furthermore, its exciton binding energy is 60 meV better than GaN (25 meV), and that is advantageous to development of excitonic emitting laser at room temperature or higher. ZnO possesses individual characteristics of physics and chemistry due to its individual structures of crystal and energy bandgap. Therefore, ZnO is an important nano-material.
In this study, by using self-catalyst vapor-liquid-solid (VLS) growth mechanism and chemical vapor deposition (CVD) method, we controlled pressure, temperature, gas flow to grow the ZnO nanorods in the tube furnace.
First, using RF magnetron sputtering system (RF-sputter) deposited ZnO thin film on p-type silicon substrate with provided a seed layer before nanorods growth. The zinc powders were heated to become vapor type and transported with argon carrier gas, and then deposited on the substrate in the tube furnace by CVD method.
According to the results, we found out that the various temperature gradients would influence the shape and size of nanorods. Under the suitable temperature gradient, the length and diameter of the ZnO nanorods were about 50 ~ 500 nm and 1 ~ 3 μm measured by field-emission scanning electron microscopy (FE-SEM). Using high-resolution transmission electron microscopy (HR-TEM) and X-ray diffraction (XRD), we realized that the ZnO nanostructure growth by CVD is single crystal and has good c-axis orientation. According to the photoluminescence (PL) spectra, the intensity at the ultraviolet region is stronger than the green emission range. Besides, combining with the results of time-resolved photoluminescence (TR-PL), ZnO nanorods had better characteristics of light emitting due to its fewer defects.
Finally, ZnO nanorod structures were applied on field emission devices as cathode. Using nanorod structures carried out the good characteristics of field emission.

Abstract (in Chinese)                                                            I
Abstract (in English)                                                          III
Acknowledgements                                                                 V
Table of Contents                                                               VI
List of Tables                                                                  IX
List of Figures                                                                  X


Chapter 1  Introduction / 1
1.1 Preface                                                                      1
1.2 Nanotechnology                                                               1
1.3 Motivation                                                                   2
Reference                                                                        3
Chapter 2  Background Theory / 6
2.1 Characteristics of Zinc Oxide                                                6
2.2 Material Properties of Nanostructure                                         6
2.2.1 Quantum Confinement Effect                                                 7
2.2.2 Surface and Interface Effect                                               8
2.3 Overview of The Nanostructure Growth Mechanism                               9
    2.3.1 Vapor-Liquid-Solid (VLS) Growth Mechanism                             10
2.3.2 Vapor-Solid (VS) Growth Mechanism                                         11
2.3.3 Solution-Liquid-Solid (SLS) Growth Mechanism                              12
    2.3.4 Template-Based Synthetic Approaches                                   13
  Reference                                                                     15
Chapter 3  Experiment Processes and Analysis Systems / 26
3.1 Experiment Processes                                                        26
3.1.1 Substrate Prepare                                                         26
3.1.2 ZnO Seed Layer                                                            26
3.1.3 CVD Growth ZnO Nanorods                                                   27
3.2 Analysis System                                                             27
3.2.1 X-ray Diffraction (XRD)                                                   27
3.2.2 Field-Emission Scanning Electron Microscopy (FE-SEM)                      28
    3.2.3 High-Resolution Transmission Electron Microscopy (HR-TEM)             29
    3.2.4 Photoluminescence (PL)                                                30
    3.2.5 Time-Resolved Photoluminescence (TR-PL)                               31
    3.2.6 Field Emission                                                        32
  Reference                                                                     34
Chapter 4  Experiment Results and Discussions / 43
  4.1 Structural Analysis                                                       43
    4.1.1 Temperature Gradient of Furnace                                       43
    4.1.2 Growth Mechanism                                                      43
      4.1.2.1 Nucleation                                                        43
      4.1.2.2 Anisotropic Growth                                                44
4.1.3 FE-SEM Analysis                                                           45
      4.1.3.1 Different Temperature Gradient Influence                          45
4.1.3.2 The Influence of The Distance Between The Source Material and Substrate 46
  4.2 Crystallinity and Growth Orientation                                      47
  4.3 Optical Properties                                                        48
    4.3.1 PL Analysis                                                           48
    4.3.2 TR-PL Analysis                                                        49
  4.4 Different Morphologies and Field Emission                                 50
  Reference                                                                     52
Chapter 5  Conclusion / 66
Conclusion                                                                      66
                                    

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校內：2009-09-04公開
校外：2012-09-04公開

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