本研究是以金屬蒸氣真空弧技術在鈦六鋁四釩基材上產生氮化鈦結構，此方法可將純鈦金屬離子化，透過電場加速使其通過充滿氮氣分子的環境中，藉由兩者互相碰撞進而轟擊鈦六鋁四釩基材，產生氮化鈦的擴散層。實驗中改變不同的加速電壓(25、50 kV)以及鈦離子植入劑量(5×1016、1×1017、2×1017 鈦離子/平方公分)在2×10-3 Pa的艙體壓力下進行離子佈植，以期達成抗腐蝕性、抗磨耗性以及表面硬度的提升。離子佈植完成後利用小角度X光繞射分析儀進行結晶結構分析，利用X光光電子能譜儀鑑定表面化學組成，利用歐傑電子能譜儀進行縱深分析，利用接觸角量測獲得表面的親疏水性，透過電化學分析評估其抗腐蝕性，透過奈米薄膜材料試驗機評估其表面硬度，透過微振磨耗測試評估其抗磨耗性質。由結果中顯示：(1)金屬蒸氣真空弧技術能夠在具有氮氣的反應槽中之基材表面生成αTiN0.3 and TiN結晶結構；(2)其中當加速電壓為25 kV，植入劑量到達2×1017(鈦離子/平方公分)時，由表面元素分析推測其生成鈍化膜，而在抗腐蝕測試中能有效提升其抗腐蝕性；(3)鈦六鋁四釩經過鈦離子佈植2×1017(鈦離子/平方公分)後能有效提升其表面硬度，同時，其抗磨耗的特性也因此獲得強化。

This study utilized metal vapor vacuum arc source (MeVVA) technique to prepare the Ti-N phase on the surface of Ti-6Al-4V. By this method, non-excited gaseous molecules can be saturated in the processing chamber, leading to collision with the processing ions. The extracted and accelerated metal ions are thereafter bombarded into the target substrate and formed a diffused layer. In the experiment, ion implantation was performed under a pressure of 2×10-3 Pa, then supplied with different acceleration voltages (25 and 50 kV) and titanium ion doses (5×1016, 1×1017 and 2×1017 ions/cm2) in order to improve the corrosion resistance, wear resistance and surface hardness. After ion implantation, the GIXRD was employed for determining the crystalline structure on the modified surface. The XPS was utilized for identifying the new binding species. The AES was used for profiling the treatment depth. Water droplet angle was measured to evaluate surface wetting properties. Corrosion resistance was measured by an electrochemical instrument. Surface hardness was measured by nanoindenter. Wear resistance was measured by micro-motion instrument. Experimental results demonstrated that (1) MeVVA treatment created a novel αTiN0.3 and TiN crystalline structure on the surface of Ti-6Al-4V in N2 atmosphere. (2) When the dose reached to 2×1017 Ti-ions/cm2 with acceleration voltage of 25 kV, corrosion resistance significantly improved by forming a passive film, which could be characterized by EDS detection. (3) After titanium ion implantation with the dose of 2×1017 Ti-ions/cm2, surface-hardness significantly improved; meanwhile, wear-resistance was significantly improved.

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