微機電系統（MEMS）是20世紀末、21世紀初興起的工程科學前沿，是當前十分活躍的研究領域，涉及多學科的交叉，有著廣泛的應用前景，在全球範圍內市場成指數上升的趨勢，被認為是本世紀最具有發展潛力的技術，主要因為其製作出的產品輕薄短小、功能強大且成本低廉。
微機電系統發展的觀念是由積體電路的研究開始，如應用沉積技術，在矽板上覆蓋所需材料，利用微影技術將設計之圖案形狀先成形於矽基板，再利用蝕刻技術將所成形圖案顯現出來。在微機電系統的設計製程過程中，運用電腦輔助設計可大量減少重新設計與試製的過程，加速成品的開發週期。本文主要是採用幾何模擬的建構方法，克服現在微機電製程模擬軟體無法達成之模擬。
幾何模擬法是一種薄板成形分析的預測技術，這種方法的出發點為以物質模型，此模型定義了需要得到的表面。電腦幾何的技術所需要的主要是數學的內插及逼近法，再輔以電腦圖學及電腦視覺的相關功能，改善了現有微機電製程軟體的不足，可以有效地完成微機電製程模擬。

MEMS is the arisen engineering science frontiers at the beginning of the 20th century and the 21st century. It is a very active researching area at present which includes many crossovers of disciplines. It has wide application prospect. In the worldwide, the market’s index has a rising trend which is regarded as the most development potential technology this century mainly because its productions are frivolous and short, strong function and low cost.
The developing concept of MEMS is started by the research of integrated circuits like application deposition techniques, covering materials on the silicon plate, using photolithography to form designs into silicon plate firstly, then using etching technology to make the patterns clear. During the micro-fabrication of MEMS, applying computer aided design can reduce largely redesign and trial-production and increase the developing cycle of productions. This article mainly uses construction method of geometric simulation to overcome MEMS simulation software that can not reach the simulation.
Geometric simulation method is a prediction technology of sheet forming analysis. The starting point of this method is material model. This model definites surfaces which are needed. Computer geometry’s technology needs mainly mathematical interpolation and approximation method. And then attaching the related functions of computer graphics and computer vision, this improves MEMS made software’s shortage and finishes effectively MEMS simulation.

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