微機電系統所強調的就是整合的功能，因此設計一平板波(flexural plate wave)與介電泳場流分離法(DEP Field-Flow Fractionation, FFF)整合的粒子分類晶片。由於平板波和介電泳力場流分離法的驅動皆利用指叉型電極(IDT)來當作一個功、能轉換的媒介，因此構想設計在壓電基材上製造出表面聲波(surface acoustic wave)推進流體並且結合介電泳場流分離法的微分類晶片，傳統之介電泳場流分離法晶片，在其作動時勢必須要微量幫浦(syringe pump)推動微管道內之流體，但本晶片在管道內部設計以平板波驅動流體之機制，所以只需供給相符合之電源供應，即可以在所設計之微晶片上完成粒子的推進與分離。本研究主要在模擬微管道內流體受表面波的影響作動幫浦之效果，其中探討不同微管道進出口邊界條件所造成的影響，也討論在微管道內關鍵性的參數，如振幅、波長、頻率、管深、管長等。在介電泳場流分離法方面，主要探討在有介電層影響時，透過介電層衰退後介電泳力對於粒子在管道內的漂浮情形。
本研究成功地模擬在微管道內以平板波驅動流體的重要相關參數，以及介電層對於粒子漂浮高度的影響，以此做為依據給予之後實驗時重要的設計參考依據。

Mems emphasizes integration and multi-function. This study designs a chip for pumping and separating particles by means of flexural plate wave and DEP-FFF. FPW and DEP-FFF are actuated by interdigital transducer (IDT) to transform work and energy, so this study produces surface acoustic waves on piezoelectric substrate and combines it with DEP-FFF. Traditional DEP-FFF use syringe pump to driving liquid in micro channels; however, with flexural plate waves pumping water, this study applies driving voltage of pumping and particle separating.
This study investigates micro pumping system and flow field generated by an traveling wave boundary layer, which is developed for flexural plate wave device numerically. In this study, different parameters including frequency, channel height, channel length, wave length, amplitude, and boundary condition are investigated. This study explores the particle levitation8 with dielectric layer on the device.
This study with great success simulates pumping fluid in micro channel by using flexural plate waves, and based on the simulation results, proposes suggestion for the future experiment.

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