本研究發展繆勒矩陣與史托克參數偏光儀來量測光學等向性與非等向性薄膜之光學參數；此量測技術為應用史托克參數成功解出等向性橢偏參數(Ψpp 與Δpp)與非等向性橢偏參數(Ψpp,Ψps,Ψsp,Δpp,Δps與Δsp)。橢偏參數Ψ與Δ之量測範圍為0~90°與0~360°。再應用非等向性橢偏理論於扭轉相列型液晶之量測。最後，利用基因演算法成功分析出等向性材料之折射率(n)與厚度，非等向性材料之快軸折射率(ne)，慢軸折射率(no)與厚度及扭轉相列型液晶之預傾角(θ)，扭轉角(φ)與厚度。
由文獻回顧得知，此研究為第一個發展出利用史托克參數橢偏演算法去求解光學參數。本研究亦成功模擬出等向性，非等向性薄膜與扭轉向列型液晶之橢偏參數與光學參數，並經實驗驗證。綜觀，此研究成果將會對於等向性與非等向性薄膜以及扭轉相列型液晶之光學參數之量測研究，踏出重要一步。

A new technique to measure ellipsometric constants for the isotropic and anisotropic thin film by Stokes polarimeter is proposed. The measuring technique is using the Stokes parameters to determine ellipsometric parameters (Ψpp and Δpp) in the isotropic thin film and ellipsometric parameters (Ψpp,Ψps,Ψsp,Δpp,Δps, and Δsp) in the anisotropic thin film. The range of Ψand Δ are 0~90°and 0~360°, respectively. Then, the proposed scheme for the anisotropic thin film is applied to study the optical properties of the vertical-alignment liquid crystal device. Finally, all the optical parameters as the refraction index (n) and thickness of the isotropic thin film; the extraordinary refraction index (ne) and ordinary refraction index (no) and thickness of the anisotropic thin film; and the pretilt angle(θ), twist angle(φ) and cell gap of TNLC cell are successfully extracted by using genetic algorithm in curve fitting for demonstrations.
From author’s knowledge, this is the first finding that the optical parameters could be decoupled in the ellipsometric model with the Stokes parameters. The optical parameters of the isotropic and anisotropic thin films and TNLC cells are extracted simultaneously and successfully. In conclusion, this could be an important step for researches on optical measurements in isotropic and anisotropic thin films and TNLC cells. As compared to the other existing techniques, this new method supplies an easier and cheaper way to extract the ellipsometric parameters from isotropic and anisotropic materials.

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