本研究主題是利用射頻磁控濺鍍系統將SrTiO3、BaTiO3兩種具鈣鈦礦結構的單層薄膜分別以不同鍍膜時間沉積在矽基板上，藉此比較不同膜厚對光降解亞甲基藍(M.B.)的影響及探討兩種薄膜材料應用在光觸媒領域之可行性。此外，本實驗也選擇Fe2O3具有可見光能隙之光觸媒半導體材料，分別與SrTiO3及BaTiO3製作成複合薄膜，藉此提升光觸媒分解污染物之效益。
從XRD圖譜中，我們可以看到單層的SrTiO3與BaTiO3薄膜隨著沉積時間增加，其繞射峰會逐漸出現。由FE-SEM影像上，我們可以看到在薄膜沉積時間愈久的情況下，薄膜厚度會愈厚且晶粒愈大；AFM影像可與FE-SEM表面形貌相互比較，其結果顯示在薄膜厚度愈厚的趨勢下，具有比較大的表面粗糙度(當SrTiO3厚度為220nm時，其Rq=3.896nm；BaTiO3厚度為386nm時，其Rq=5.630nm)。從UV-Vis量測中可知︰單層的SrTiO3及BaTiO3之薄膜在厚度愈薄的情形具有比較大的能隙(當SrTiO3厚度為32nm時，其能隙為4.12eV；BaTiO3厚度為59nm時，其能隙為4.37eV)，且本實驗所有的單層薄膜其能隙都屬於紫外光範疇。單層薄膜的光催化結果顯示︰膜厚愈厚的樣品(SrTiO3厚220nm、BaTiO3厚386nm)有比較好的光催化效率。
另外，Fe2O3的單層薄膜，從XRD的圖譜中，我們可以知道是屬於赤鐵礦相；FE-SEM、AFM影像中可以了解此薄膜其表面晶粒非常微小(<15nm)且表面平整度很高(Rq=0.721nm)；本實驗赤鐵礦薄膜之能隙約為1.9eV。
在雙層複合薄膜SrTiO3/BaTiO3、SrTiO3/Fe2O3及BaTiO3/Fe2O3的實驗部分，由XRD圖可知︰我們可以成功地製備出這些複合薄膜。從FE-SEM及AFM的影像中，得知SrTiO3/BaTiO3複合薄膜具有最大的表面粗糙度(Rq=5.561nm)；且SrTiO3/BaTiO3複合薄膜只具有一個～3.65eV的紫外光能隙；SrTiO3/Fe2O3及BaTiO3/Fe2O3複合薄膜分別各擁有紫外光與可見光兩種能隙。紫外光降解有機染劑亞甲基藍(M.B.)之實驗結果顯示︰SrTiO3/BaTiO3 > SrTiO3 > BaTiO3 > BaTiO3/Fe2O3 > SrTiO3/Fe2O3；可見光降解M.B.實驗結果則顯示︰SrTiO3/Fe2O3 > BaTiO3/Fe2O3 > SrTiO3/BaTiO3 > SrTiO3 > BaTiO3。

In this study, the SrTiO3 and BaTiO3 perovskite thin films are deposited on Si substrates with different deposition time using RF magnetron sputtering system. We want to investigate the influence of film thickness on the photodegradation of Methylene blue (M.B.) and the photocatalytic properties of this kind of materials. Furthermore, we also select Fe2O3 thin film, whose band gap is within the range of visible-light, to couple with SrTiO3 and BaTiO3 film to promote the photocatalytic activity of the films.
From the XRD pattern, it is observed that the diffraction peaks gradually appear with the increasing deposition time. The FE-SEM image also shows the grain size and film thickness increase with an increase of deposition time. The AFM result exhibits a more rough surface in a thicker thin film. It is also found that the band gap increases with the decreasing film thickness and it belongs to the range of UV-light. This reveals a higher photodegradation for a thicker perovskite thin film.
As for the Fe2O3 thin film, it has the hematite structure. Its grain size is very small and the surface roughness is very low, observed by the FE-SEM and AFM images. The band gap of Fe2O3 film is 1.9 eV, which is in the range of visible light. For the composite of SrTiO3/BaTiO3, SrTiO3/Fe2O3 and BaTiO3/Fe2O3, the FE-SEM and AFM results show that SrTiO3/BaTiO3 film has the highest surface roughness and its band gap is 3.65 eV while the band gap of SrTiO3/Fe2O3 and BaTiO3/Fe2O3 films is within the range of UV-light and Vis-light. The ability of photodegradation on M.B. under ultraviolet light irradiation shows SrTiO3/BaTiO3 > SrTiO3 > BaTiO3 > BaTiO3/Fe2O3 > SrTiO3/Fe2O3. However, the photocatalytic activity under visible light irradiation shows SrTiO3/Fe2O3 > BaTiO3/Fe2O3 > SrTiO3/BaTiO3 > SrTiO3 > BaTiO3.

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