本研究係關於一光學晶體折射率及厚度高精度量測系統之研發，本量測系統係由一精密測距雷射干涉儀系統、電動旋轉馬達搭配數學解析計算所組成。本研究利用雷射干涉儀可測量隅角反射鏡線性移動的特性，在極化分光鏡和隅角反射鏡中間架設一組單軸電動旋轉馬達，並且固定隅角反射鏡不動，再將電動旋轉馬達上夾持住光學待測試片，利用馬達帶動試片轉動，造成光路上的改變。由於此改變而造成之光程差會使干涉儀測得不同於實際距離之數值，藉由本研究所推導之光程差與試片折射率的關係，便可量得試片之折射率。本論文所建構之量測系統具有簡便易操作、易校正及少雜訊干擾之優點，且有溫度、壓力、溼度等環境補償之功能，經實驗結果證實，本量測系統可快速且穩定的獲得高量測精度。
另外，在厚度高精度量測方面，本研究提出一非破壞性檢測技術，除可量測大厚度之試材(公分等級)外，亦可使精度保持在奈米等級，對精密測厚技術之應用有很大的助益。

In this study, a new highly accuracy measurement system for birefringence index and the thickness of an optic waveplate is proposed. This measurement system is composed of a laser interferometer for accurate length measuring, a precise rotatory stepping motor, and a computer for data calculation. Using the characteristic of the laser interferometer for measuring the linear translation, a tested waveplate is holding on a rotatory stepping motor. It placed between the polarization beam splitter and the cube reflector, which is fixed on the optic table. The optical path difference is obtained by the rotational angles control of stepping motor. Based on the optical path length difference, a different measured value compared with real length is shown by the laser interferometer. By means of the relations of optical path length difference and refractive index of the tested waveplates, the refractive index of waveplate can be fast and accurately obtained. It has some advantages of this measurement method, such as, easier operation and calibration, fewer signal noise, and environment compensation is considered, etc. The experiments show fast and stable measuring results can be obtained by the measurement method.
Besides, a new nondestructive measurement system for crystal thickness is also proposed. This measurement method not only can measure large thickness (cm degree), but also can keep the measurement accuracy within nano-degree. It is very helpful for the application of accurately thickness measurement technique.

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