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研究生： 徐昱群
Hsu, Yu-Chun
論文名稱： 積層式鐵氧磁體-鐵矽鉻合金複合電感元件之製程研究
Process for the multilayer FeSiCr alloy-NiCuZn ferrite composite inductive devices
指導教授： 向性一
Hsiang, Hsing-I
學位類別： 碩士
Master
系所名稱： 工學院 - 資源工程學系
Department of Resources Engineering
論文出版年： 2021
畢業學年度： 109
語文別： 中文
論文頁數： 71
中文關鍵詞： 鎳銅鋅鐵氧磁體 、鐵矽鉻合金 、低壓輔助燒結 、束縛燒結 、銀遷移 、晶片電感
外文關鍵詞： silver migration, low pressure-assisted, constrained sintering, NiCuZn ferrites, FeSiCr alloy, power inductors
相關次數： 點閱：126  下載：0 
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    • 隨著目前穿戴型裝置的普及及其功能越趨多元，使得電子產品內部的電感需求量大增，且須往微型化發展。由於積層式FeSiCr合金粉末功率晶片電感之厚度遠較繞線式及一體成型式(molding power choke)為薄，符合目前穿戴型電子裝置薄型化之發展趨勢，但FeSiCr合金粉末功率晶片電感仍具有低絕緣電阻及低崩潰電壓等缺點。
    因此本研究透過以上下兩層FeSiCr合金生胚與中間已印製銀內電極之NiCuZn鐵氧磁體生胚疊合之三明治結構製作積層式功率晶片電感。探討在氮氣氣氛下之束縛燒結及低壓輔助燒結對電感元件內部微結構及電磁性質之影響。
    結果發現NiCuZn鐵氧磁體在N_2氣氛下進行低壓輔助束縛燒結時，當燒結溫度在800°C以上時，會產生氧空缺，使〖Cu〗^(2+)還原成〖Cu〗^+，進而導致銅離子自NiCuZn鐵氧磁體的晶格中脫溶，與銀內電極反應，進一步生成液相，並在胚體尚未緻密，仍存在許多連通孔隙時，在單軸向壓力施加下，液相銅、銀合金便沿著連續的孔洞遷移至元件的表面處偏析。因此必須把燒結溫度控制在800˚C以下，以避免銀的遷移發生。
    此外本實驗也發現、束縛燒結時透過熱壓輔助燒結施一單軸向應力於燒結體，可以降低束縛燒結所產生的內應力減少翹曲發生外，也能使NiCuZn鐵氧磁體應力施加方向平行收縮率大幅上升，解決燒結體緻密性不佳之問題。
    最後也針對元件磁性值進行分析，發現熱壓燒結時由於元件內部之FeSiCr合金堆積密度上升，使得磁導率增高，因此擁有較高的感值，同時也擁有較高的飽和磁化量。但由於微結構較緻密，造成磁區更容易轉向，因而具有較小的矯頑磁場，因此也較易達到磁飽和，故直流疊加特性較差。

    In this study, multilayer ceramic technology was used to prepare FeSiCr alloy/NiCuZn ferrite/FeSiCr alloy composite power inductors. The effects of different co-firing temperatures and uniaxial pressure on the densification and microstructures of FeSiCr alloy and NiCuZn ferrite and silver diffusion during pressure-assisted constrained sintering for the multilayer composite power inductors were investigated. It was observed that as the composite inductors were pressure-assisted sintered at 1 MPa and 880°C under an N2 atmosphere, a serious Ag migration was observed. Lowering the pressure-assisted sintering temperature to below 800°C can effectively prevent silver diffusion. This can be explained by the fact that Cu2+ was reduced to Cu+ as the sintering temperature was raised above 800°C, which promoted the exsolution of Cu+ and segregation at the grain boundary. The segregated copper will be further reduced to metal copper in N2 and reacts with silver to form a eutectic liquid, which accelerated the silver diffusion.

    摘要 I 誌謝 VII 目錄 VIII 表目錄 XI 圖目錄 XII 第一章 緒論 1 1-1 前言 1 1-2 研究目的 3 第二章 前人研究與基礎理論 5 2-1 金屬功率電感器 5 2-1-1金屬功率電感器簡介 5 2-1-2 電感器之特性 8 2-2 NiCuZn鐵氧磁體材料 10 2-2-1 尖晶石鐵氧磁體結構 10 2-2-2 NiCuZn鐵氧磁體 12 2-3軟磁材料之研究進展 13 2-3-1 FeSiCr合金粉末之氧化機制 15 2-4 刮刀成型法 16 2-4-1刮刀成型 16 2-4-2刮刀成型之添加劑 18 2-5共燒 22 2-5-1低溫共燒陶瓷 22 2-5-2多層陶瓷共燒行為與缺陷 23 2-5-3束縛燒結 25 2-6銀的揮發行為 26 2-6-1 銀的揮發行為 26 第三章 實驗步驟與方法 28 3-1熱壓輔助燒結對束縛燒結之影響 28 3-1-1 實驗藥品 29 3-1-2 其他藥品 29 3-1-3 樣品製備及燒結 29 3-2 模具輔助燒結對元件結構之影響 31 3-2-1 元件製程 32 3-2-2 元件燒結 32 3-3不同燒結參數下對內電極銀的擴散之研究 33 3-4 不同熱壓燒結壓力下對元件電磁性質之影響 34 3-5實驗分析使用儀器 35 3-5-1 SEM顯微結構分析 35 3-5-2 XRD相鑑定 35 3-5-3 直流疊加特性分析 35 3-5-4 熱差/熱重分析儀 36 3-5-5遲滯曲線(M-H curve) 36 第四章 結果與討論 37 4-1施加單軸向應力對束縛燒結之影響 37 4-1-1 顯微結構分析 37 4-1-2 燒結體緻密度討論 38 4-2模具輔助對元件成型之改善 40 4-2-1熱壓輔助燒結對元件製程之影響 40 4-2-2 模具輔助熱壓燒結 41 4-2-3埋沙熱壓燒結 43 4-3元件內部銀電極遷移之討論 46 4-3-1 電極銀擴散情況討論 46 4-3-2銀電極遷移之可能原因討論 49 4-3-3NiCuZn鐵氧磁體之銅脫溶機制 54 4-3-4 抑制NiCuZn鐵氧磁體中銅之脫溶進而改善電極之遷移狀況 55 4-4 最終元件產品 59 4-5元件電氣特性量測 60 4-5-1 磁滯曲線分析 60 4-5-2 電感元件感值暨品質因子分析 63 4-5-3直流疊加特性暨矯頑磁力分析 65 第五章 結論 66 參考文獻 67

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