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研究生: 王國維
Wang, Guo-Wei
論文名稱: 適用於工具機產業之全自動虛擬量測系統自動建模機制
Automated Model-Creation Scheme of the AVM System for Machine Tool Industries
指導教授: 鄭芳田
Cheng, Fan-Tien
共同指導教授: 楊浩青
Yang, Haw-Ching
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 製造資訊與系統研究所
Institute of Manufacturing Information and Systems
論文出版年: 2016
畢業學年度: 104
語文別: 中文
論文頁數: 44
中文關鍵詞: 全自動虛擬量測自動建模門檻與M碼配置方案
外文關鍵詞: Automatic virtual metrology, Automated Model Creation, TMIS, AMC
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  • 為因應工具機產業對於自動化全檢的需求,導入全自動虛擬量測(Automatic Virtual Metrology, AVM)為一可行的方法。然因AVM系統為利用資料驅導模型進行預測,在設定與建立預測所需模型時,需統計與操作知識,對於工具機業者實具有相當的應用難度。
    為克服此問題,本研究開發適用於工具機產業應用AVM時所需之門檻與M碼配置方案 (Threshold and M code Insertion Scenario, TMIS)與自動建模(Automated Model Creation, AMC) 兩機制。TMIS機制可用以根據加工精度項目,配置M碼於NC碼中,並能進行加工路徑模擬等。而AMC機制可根據TMIS機制的輸出,自動設定包含如訊號來源、特徵門檻、與資料品質門檻、與模型參數等,上傳足夠健康樣本至建模伺服器進行建模,最後模型再下載至AVM系統提供預測功能。
    實驗結果顯示,本研究所提出之自動建模機制,在建模人員僅需為一般加工能力即可的條件下,更可減少AVM人工建模所需時間的87.5 %。因此,本自動建模機制將可大幅降低應用AVM於工具機產業的難度。

    Automatic Virtual Metrology (AVM) is applied to fulfil the automatic total inspection requirements of the machine tool industry. The AVM system adopts various prediction algorithms to predict product quality; therefore, users must possess a considerable knowledge of statistics and operations while setting up and creating prediction models, and this fact makes it hard to apply AVM in the machine tool industry.
    To solve this problem, this study develops an automated model creation scheme for the machine tool industry, which contains two tools: Threshold and M code Insertion Scenario (TMIS) and Automated Model Creation (AMC). TMIS is utilized to insert M codes in NC files according to the machining metrology items, and then conduct NC files path simulation. According to TMIS’s outputs, AMC can then set the rules of data collection, the indicators and the parameters of the models, and the thresholds of metrology items automatically. When the quantity of healthy samples is enough, they are sent to the model creation server for building models, and finally the models are sent to the AVM server to conduct prediction.
    The results show that, by utilizing TMIS and AMC, even for the users who are only capable of general processing, the required model-creation time can be reduced by 87.5% compared to the original AVM model creation. Therefore, it can be inferred that this automated model creation scheme can significantly reduce the difficulty of applying AVM to the machine tool industry.

    摘 要 II 誌 謝 X 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機與目的 4 1.3 論文研究流程與架構 7 第二章 現行建模方法 8 2.1 現行NC碼模擬方法及工具 8 2.2現行工件精度預測方法 8 2.3現行 AVM於精密加工業的建模方法 8 2.3.1決定工序與量測項目以制定資料收集方式 11 2.3.2加工現場手動安插 M碼 12 2.3.3擷取資料、萃取特徵並建立模型 14 第三章 自動建模方法 15 3.1 系統架構 15 3.2 Threshold and M code Insertion Scenario (TMIS) 18 3.3製程特徵資料收集 25 3.4 Automatic Model Creation (AMC)分類加工樣本機制 28 第四章 案例研究 31 4.1 M碼動態設定 31 4.1.1 以A公司K機匣工序1為例 31 4.1.2 以F公司A鋁圈工序2為例 35 4.2模型參數配對 38 4.3 效益分析 41 第五章 結論 42 5.1 結論 42 5.2 未來研究 42 參考文獻 43

    [1] F.-T. Cheng, H.-C. Huang, and C.-A. Kao, “Dual-Phase Virtual Metrology Scheme,” IEEE Transactions on Semiconductor Manufacturing, vol. 20, no. 4, pp. 566-571, November 2007.
    [2] F.-T. Cheng, Y.-T. Chen, Y.-C. Su, and D.-L. Zeng, “Evaluating Reliance Level of a Virtual Metrology System,” IEEE Transactions on Semiconductor Manufacturing, vol. 21, no. 1, pp. 92-103, February 2008.
    [3] Y.-C. Su, T.-H. Lin, F.-T. Cheng, and W.-M. Wu, “Accuracy and Real-Time Considerations for Implementing Various Virtual Metrology Algorithms,” IEEE Transactions on Semiconductor Manufacturing, vol. 21, no. 3, pp. 426-434, August 2008.
    [4] T.-H. Lin, F.-T. Cheng, W.-M. Wu, C.-A. Kao, A.-J. Ye, and F.-C. Chang, “NN-based Key-variable Selecting Method for Enhancing Virtual Metrology Accuracy,” IEEE Transactions on Semiconductor Manufacturing, vol. 22, no. 1, pp. 204-211, February 2009.
    [5] W.-M. Wu, F.-T. Cheng, T.-H. Lin, D.-L. Zeng, and J.-F. Chen, “Selection Schemes of Dual Virtual-Metrology Outputs for Enhancing Prediction Accuracy,” IEEE Transactions on Automation Science and Engineering, vol. 8, no. 2, pp. 311-318, April 2011.
    [6] F.-T. Cheng, J. Y.-C. Chang, H.-C. Huang, C.-A. Kao, Y.-L. Chen, and J.-L. Peng," Benefit Model of Virtual Metrology and Integrating AVM into MES,” IEEE Transactions on Semiconductor Manufacturing, vol. 24, no. 2, pp. 261-272, May 2011.
    [7] Y.-T. Huang and F.-T. Cheng, "Automatic Data Quality Evaluation for the AVM System," IEEE Transactions on Semiconductor Manufacturing, vol. 24, no. 3, pp. 445-454, August 2011.
    [8] F.-T. Cheng, H.-C. Huang, and C.-A. Kao, “Developing an Automatic Virtual Metrology System,” IEEE Transactions on Automation Science and Engineering, vol. 9, no. 1, pp.181-188, January 2012.
    [9] W.-M. Wu, F.-T. Cheng, and F.-W. Kong, “Dynamic-Moving-Window Scheme for Virtual-Metrology Model Refreshing,” IEEE Transactions on Semiconductor Manufacturing, vol. 25, no. 2, pp. 238-246, May 2012.
    [10] M.-H. Hung, C.-F. Chen, H.-C. Huang, H.-C. Yang, and F.-T. Cheng, “Development of an AVM System Implementation Framework,” IEEE Transactions on Semiconductor Manufacturing, vol. 25, no. 4, pp. 598-613, November 2012.
    [11] C.-A. Kao, F.-T. Cheng, W.-M. Wu, F.-W. Kong, and H.-H. Huang, “Run-to-Run Control Utilizing Virtual Metrology with Reliance Index,” IEEE Transactions on Semiconductor Manufacturing, vol. 26, no. 1, pp. 69-81, February 2013.
    [12] Y.-S. Hsieh, F.-T. Cheng, H.-C. Huang, C.-R. Wang, S.-C. Wang, and H.-C. Yang, “VM-based Baseline Predictive Maintenance Scheme,” IEEE Transactions on Semiconductor Manufacturing, vol. 26, no. 1, pp. 132-144, February 2013.
    [13] F.-T. Cheng and Y.-C. Chiu, “Applying the Automatic Virtual Metrology System to Obtain Tube-to-Tube Control in a PECVD Tool,” IIE Transactions, vol. 45, issue 5, pp. 671-682, June 2013.
    [14] H. Tieng, H.-C. Yang, M.-H. Hung, and F.-T. Cheng, “A Novel Virtual Metrology Scheme for Predicting Machining Precision of Machine Tools,” in Proc. of The 2013 IEEE International Conference on Robotics and Automation (ICRA 2013), Karlsruhe, Germany, pp. 264-269, May 6-10, 2013.
    [15] H.-C. Yang, H. Tieng, and F.-T. Cheng, “Total Precision Inspection of Machine Tools with Virtual Metrology,” Journal of the Chinese Institute of Engineers, published online: Oct 2015. DOI: 10.1080/02533839.2015.1091279
    [16] H.-C. Yang, H. Tieng, and F.-T. Cheng, “Automatic Virtual Metrology for Wheel Machining Automation,” International Journal of Production Research, published online: Nov 2015. DOI: 10.1080/00207543.2015.1109724
    [17] F.-T. Cheng, H. Tieng, H.-C. Yang, M.-H. Hung, Y.-C. Lin, C.-F. Wei, and Z.-Y. Shieh, “Industry 4.1 for Wheel Machining Automation,” to appear in IEEE Robotics and Automation Letters.

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