表面增顯拉曼（SERS）是一種深受奈米加工技術影響的工藝。目前SERS增顯效果被發現它是是一種等離子體共振形成具有新的幾何結構以增強拉曼信號。在本研究中，聚焦離子束（FIB）方法被用來製造金/銀多層納米棒（NR）陣列，嵌入式Au和Ag層各種厚度的。 NR陣列的重複層的數量會影響拉曼活性物質的檢測。優化NR陣列施用於區分在非常低的濃度的A型流感病毒株。
利用FIB來製造光學性質的基板非常適合用來偵測具有拉曼活性的物種，不過FIB確有其缺點。例如，在FIB製備基板過程中會有鎵(Ga)的殘留，這會造成金/銀NR陣列的晶格損壞，所以為了解決此問題，我們提出瞭一個假設讓FIB光束傾斜一個角度，並對鎵濃度的多寡對基板表面SERS活性影響進行了研究。以低Ga含量對SERS活性表面導致電子振盪的離散多極等離子體模式沿長軸並降低光損耗和晶格破壞。並且利用各種分子探針，即結晶紫（CV），孔雀綠異硫氰酸酯（MG）和玫瑰紅，與被採用作為目標物種來偵測。
另外，利用熱處理的方式來處理金/銀奈米的幾何形狀基板。此處理後，一些鎵可以擴散到金屬基體或停留在奈米的最外表面。在金/銀NR陣列，漫射結構和由於增加的應力，這是主要因氧化和熱膨脹的影響嵌入nanovoids（NV）的結構中產生。在金的情況下，Ga的離子與在Au表面結構交互，修改所述表面化學。為了減少Ga的污染和對Au NR陣列低密度AuGa2形成經受低或高溫處理。並且研究使用CV作為分子探針測試熱處理後的SERS基板。將優化的Au NR陣列用來檢測具有低濃度氰尿酸三聚氰胺的牛奶溶液。
值得注意的是，SERS的增顯效果的強弱是隨著雷射激發光與目標物種相互作用而來。因此，換句話說具有高增顯的SERS基板才有實際應用。在這裡，利用FIB塑造一個局部凹表面金NR陣列NR之間的控制環的直徑。銀奈米顆粒（奈米顆粒）耦合之間的間隙，試圖改進SERS增顯效果，然後應用於檢測分子提供一個粗糙表面，特別是在低濃度的CV。利用凹NR來耦合用Ag奈米顆粒，如納米顆粒的Ag / Au的NR提高SERS增顯，如用在檢測非常低的濃度靶物質蜜胺。人們普遍認為，獲得高EF可以提高檢測的目標分子的靈敏度。在這種情況下，
利用FIB和電子束沉積液合併為銀奈米簇（NCS）上的ZnO nanodome（ND）陣列是以FIB來製備，它具有高單分子選擇性的SERS活性檢測奈米系統。對ZnO ND陣列與銀納米晶的在NDS上的側/頂面的各種尺寸的混合銀納米晶的SERS EF並且以CV作為探針分子進行了實驗。在一個優化的Ag奈米晶對ZnO ND陣列SERS的效果，並以極低濃度的MG驗證。將其結果與那些現有SERS增顯效果的基板相互比較。

The surface-enhanced Raman scattering (SERS) method is a technology that significantly benefits from progress in nanotechnology and nanofabrication. The optical and enhancement properties of SERS substrates have been found to be a plasmon resonant formation with novel geometries to enhance Raman signals. In the present study, the focused ion beam (FIB) method is employed to fabricate well ordered Au/Ag multilayered nanorod (NR) arrays with an embedded Au and Ag layer of various thicknesses. The number of repeated layers of NR arrays affects the detection of Raman-active species. Optimized NR arrays were applied to distinguish influenza A virus strains at very low concentrations.
The optical properties of FIB-fabricated nanostructures (NSs) may be suitable for Raman-active substrates. There still occur some drawbacks to NSs for use as photonic components. For example, FIB-fabricated NSs are strongly influenced by the residual gallium (Ga) concentration and have a limited aspect ratio. To decrease Ga concentration and lattice damage of Au/Ag NR arrays, the FIB beam was tilted at an angle. The influence of Ga concentration on the outermost surface of FIB-fabricated SERS-active NSs was studied. It is hypothesized that lower Ga content on the SERS-active surface leads to discrete multipole plasmon modes of electron oscillation along the long axis and reduces optical losses and lattice damage in the original structure. Various molecular probes, namely crystal violet (CV), malachite green isothiocyanate (MG), and rose bengal, with concentrations at a single molecule level were employed as the target species.
In addition, an annealing treatment is applied to recover the Au/Ag NSs after lattice damage and hold the formed geometry. After this treatment, some Ga remains and may diffuse into the metal matrix or remain on the outermost surface of NSs. In the Au/Ag NR arrays, diffused structures and embedded nanovoids (NV) structure were generated owing to an increase in stress, which was mostly caused by the effects of oxidation and heat expansion. In the case of Au, Ga ions interact with the Au surface structure, modifying the surface chemistry. In order to reduce Ga contamination and the formation of low-density AuGa2 on Au NR arrays were subjected to low or high-temperature treatment. The effect of temperature treatment on the SERS substrate was investigated using CV as a molecular test probe. Optimized Au NR arrays were applied to the detection of melamine cyanurate in milk solution at low concentrations.
Notably, the SERS effect highly varies with the size of the target species due to laser interaction strength. Therefore, a substrate with a high SERS effect is required for practical applications. Herein, FIB method was applied to shape a localized Au surface as Au NR arrays with a controlled ring diameter among NR. Ag nanoparticles (NPs) were coupled to bridge the gaps among NRs, tried to improve the available effect of SERS, and then paved to provide a roughened surface for detecting molecular species, especially at low concentrations of CV. Au NR was furthermore coupled with Ag NPs, as Ag NPs/Au NR to improve the effect of SERS for detecting target species such as melamine at very low concentrations. It is generally believed that obtaining high average EF can improve the sensitivity of detecting target molecules. In this case, FIB and e-beam deposition were combined for the fabrication of Ag nanoclusters (NCs) on a FIB-made ZnO nanodome (ND) arrays as a SERS-active nanosystem for high-selectivity single-molecule detection. The SERS EF of hybrid Ag NCs on ZnO ND arrays with various dimensions of Ag NCs on the side/top surface of NDs was examined with CV as the probe molecule. The effect of SERS on an optimized Ag NCs on ZnO ND arrays was then verified by sensing MG at extremely low concentrations. The results are compared with those for existing SERS-active substrates.

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