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研究生: 靳元良
Chin, Yuan-Liang
論文名稱: 以MOCVD配合流體床技術製備碳化鉻/氧化鋁奈米複合陶瓷之研究
Investigation of Chromium Carbide/Alumina Nanocomposites Prepared by MOCVD in Fluidized Bed
指導教授: 黃肇瑞
Huang, Jow-Lay
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 109
中文關鍵詞: 高能量振動式球磨流體床殘留應力奈米複合陶瓷熱壓燒結有機金屬化學氣相沈積法
外文關鍵詞: MOCVD, ceramic nanocomposite, fluidized bed, hot-press sintering, residual stress., high energy vibration ball milling
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  •   本研究利用有機金屬化學氣相沈積法(MOCVD)配合流體床(Fluidized Bed)技術,製備Cr2O3/Al2O3奈米複合粉體,配合高能量振動式球磨混合分散,在真空環境中以1500℃進行碳化與熱壓燒結,成功製備出高緻密性之碳化鉻/氧化鋁奈米複合陶瓷。並探討奈米複合陶瓷的相,微結構以及機械性質。

      實驗結果發現,在流體化溫度為400℃下製備之奈米複合粉體,除了氧化鋁外,其主相為一非晶質的氧化鉻,另外,粉體中有自由基碳及介穩態之CrC1-x的存在,對日後燒結時與氧化鉻結合,相轉換為碳化鉻(Cr3C2)有很大的影響。而經由高能量振動式球磨後,複合粉體的分散性及均勻性獲得大幅的改善。

      於真空熱壓燒結合成之Cr3C2/Al2O3奈米複合陶瓷的強度、硬度、韌性均較單質氧化鋁提升許多。微結構顯示大部分微量之奈米碳化鉻分佈在氧化鋁晶界上以及晶粒內,因而產生了強、韌化的效果。在奈米複合陶瓷的強化方面,由於奈米級第二相的引入以及鉻離子固溶到氧化鋁基地的現象產生細晶強化與固溶強化,且使得氧化鋁破壞由沿晶轉為沿晶穿晶混和的模式,其強度約可提升至475MPa;韌化方面則觀察出裂縫轉折、裂縫架橋、裂縫分支等韌化機制,其韌性約可提升至5.6MPa‧m1/2。

      以X光測量碳化鉻/氧化鋁奈米複合陶瓷中之殘留應力,發現在添加2.2vol.%第二相之複合陶瓷中,其殘留壓應力值為-104MPa;而添加5vol.%第二相之複合陶瓷中,其殘留壓應力值為-125MPa。由於殘留壓應力的存在,藉以強化奈米複合陶瓷。

     This study using metal-organic chemical vapor deposition (MOCVD) conducted in the fluidized bed was employed for the preparation of nano-meter as-deposited powder. After high energy vibration ball milling, the composite powder was sintered by hot-press sintering at 1500℃ in vacuum and obtained the fully-densed Cr3C2/Al2O3 ceramic nanocomposites. the phases, microstructures and mechanical properties of nanocomposites were also discussed in this study.

     During the as-deposited powder preparation, The amorphous Cr2O3 deposited on the Al2O3 ceramic powder by pyrolysis of Chromium Carbonyl (Cr(CO)6) at 400℃ was used. Besides, there were also free carbon and metastable CrC1-x inside the Al2O3 and those species were helpful during the phase transformation from Cr2O3 to Cr3C2. After the high energy vibration ball milling process, we can obtain the dispersive and uniform composite powder.

     The hot-pressed Cr3C2/Al2O3 nanocomposites have better mechanical performances such as bending strength, fracture toughness and hardness than the monolithic Al2O3. The nano-sized Cr3C2 particles were mainly located within the Al2O3 grains as well as on the Al2O3 grain boundaries. The drastic change of the fracture mode from intergranular fracture of monolithic Al2O3 to transgranular fracture of nanocomposites, solid solution strengthening and grain size reduction improved the strength of Al2O3. The toughening mechanisms of the nanocomposites were crack deflection, bridging and branching.

     Moreover, we measured the residual stresses in the Cr3C2/Al2O3 nanocomposites by X-ray. The results indicated that the highly localized residual stresses in the matrix grains were generated by the mismatch of thermal expansion coefficients between the matrix and the dispersed particles. These residual compressive stresses also improved the strength and toughness in the nanocomposites.

    論文摘要 I 英文摘要 III 誌謝 V 總目錄 Ⅶ 圖目錄 Ⅹ 表目錄 ⅩⅣ 第一章 緒論 1 1.1 前言 1 1.2 研究目的 2 第二章 理論基礎 4 2.1 陶瓷基複合材料 4 2.1.1 陶瓷基複合材料韌化機制 4 2.1.2 第二相對複合材料強度之影響 6 2.1.3 奈米複合陶瓷(Ceramic Nanocomposites) 10 2.2 X光繞射法量測殘留應力 15 2.3 化學氣相沈積法及流體床技術 19 2.3.1 MOCVD製程 20 2.3.2 MOCVD製程中六羰鉻使用之探討 23 2.3.3流體床技術 24 2.4 鉻之碳化物或氧化物與氧化鋁複合材料 25 第三章 實驗步驟 29 3.1 實驗設計 29 3.2 實驗設備及合成奈米複合粉體之製程 31 3.2.1 MOCVD與流體床之實驗設計 31 3.2.2 實驗材料 32 3.2.3奈米複合粉體之合成 32 3.2.4 高能球磨法 35 3.3 複合材料之熱壓燒結製程 36 3.4 複合粉體之性質分析 36 3.4.1 複合粉體之相分析 36 3.4.2 複合粉體之ESCA成分分析 39 3.4.3 複合粉體之表面型態之觀察 39 3.5 燒結體的物理性質測定 40 3.5.1密度的測定 40 3.5.2 X光繞射分析 40 3.6 機械性質之量測 41 3.6.1 楊氏係數之測定 41 3.6.2彎曲強度的測定 41 3.6.3表面維氏硬度測試 42 3.6.4破壞韌性 43 3.6.5 X光表面殘留應力的量測 44 3.7 燒結體之微結構觀察 44 3.7.1 場發射掃瞄式電子顯微鏡(FE-SEM)試樣之製作及觀察 44 3.7.2 電子微探儀(EPMA)試樣之製作及觀察 44 3.7.3穿透式電子顯微鏡(TEM)試樣之製作及觀察 46 第四章 結果與討論 47 4.1 奈米複合粉體之特性 47 4.1.1 相分析 47 4.1.2 表面型態及微結構觀察 50 4.1.3 高能球磨對複合粉體之影響 56 4.2 碳化鉻/氧化鋁奈米複合陶瓷之特性 58 4.2.1 相分析 58 4.2.2 奈米複合陶瓷之密度及孔隙率 62 4.2.3 微結構觀察 64 4.3 碳化鉻/氧化鋁奈米複合陶瓷之機械性質 73 4.3.1 破壞強度 75 4.3.2 破壞韌性 80 4.3.3 硬度量測 90 4.3.4 殘留應力量測 93 第五章 結論 99 參考文獻 101 作者簡歷 109

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