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研究生: 宋健瑋
Song, Jian-Wei
論文名稱: 鎢-鋁鍍膜之耐氧化性及磨潤性能研究
The oxidation resistance and tribological performance of tungsten / aluminum coatings
指導教授: 蘇演良
Su, Yen-Liang
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2013
畢業學年度: 101
語文別: 中文
論文頁數: 127
中文關鍵詞: 鎢鋁鍍膜奈米硬度耐氧化性
外文關鍵詞: tungsten aluminum coatings, nano-hardness, oxidation resistance
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  • 本研究採用非平衡磁控濺鍍法,在高速鋼底材鍍上一層鎢鋁薄膜,並探討鍍層於熱處理前後的抗氧化性、磨潤性質、車削與鑽削性質。實驗主要分為三階段:第一階段以改變鋁含量,分析不同鋁含量對鍍層性質的影響;第二階段探討鍍層在不同溫度(500℃與600℃)中,持溫一小時後,對鍍層性質的影響;第三階段選用較佳的鍍層進行鍍層壽命的測試,最後進行車削與鑽削印刷電路板的實驗,以瞭解實際上鍍膜披覆刀具在工業上的應用。
    實驗結果得知,鍍層鋁含量愈高,鍍層的硬度則愈低,且附著性也會變差。當鋁含量15 at.%時,鍍層硬度最高,奈米硬度達15.1 GPa(荷重為10mN),且磨耗性質最佳。經過500℃和600℃持溫一小時的熱處理後,鍍層鋁含量愈高,則氧化深度愈淺,但仍無法改善磨耗深度。
    由磨耗壽命結果得知H600-W-Al15鍍層與純鎢鍍層相比,能夠提升9倍的壽命,在由切削結果得知,披覆鋁含量(15 at.%)鍍層得刀具與未鍍膜的刀具相比,車刀刀腹磨耗量降低了59 %,微鑽針刀角磨耗量降低了42 %。

    The W-Al thin films were deposited on HSS disc and silicon wafer by unbalanced magnetron sputtering. Before and after heat treatment, the oxidation resistance, tribological properties, turning and drilling performance were investigated. This experiment was divided into three stages. In the first stage, the effect of aluminum content on the mechanical and tribological properties of thin films were analyzed. In the second stage, after one-hour heat treatment with 500℃ and 600℃, the mechanical and tribological properties of these films were investigated. In the third stage, we choose the optimal coating to deposit on disposable inserts and micro-drills to test under practical machining .
    The results show that the nano-hardness decreases with increasing aluminum content. The highest hardness and best wear resistance performed by the film which contains 15 at.% aluminum. After heat treatment, although the results show that the oxidation depth decreases with increasing aluminum content , aluminum doping can not improve the wear resistance.
    The wear life of Pin-On-Disc shows that H600-W-Al15 can enhance nine times comparing with tungsten film. In turning and micro-drilling tests, the film contains 15 at.% aluminum can reduce the wear rate about 59% on disposable inserts and 42% on micro-drills.

    考試合格證明 I 摘 要 II 致 謝 V 總 目 錄 VI 表 目 錄 VIII 圖 目 錄 IX 附 錄 目 錄 XI 第一章 緒論 1 第二章 文獻回顧 3 2-1 薄膜成形分類 3 2-2 磁控濺鍍理論 3 2-2-1濺鍍原理 3 2-2-2非平衡磁控濺鍍目的 6 2-3 鍍膜性質 7 2-3-1 鎢與氧化鎢的性質 7 2-3-2 鋁與氧化鋁的性質 8 第三章 實驗方法與步驟 9 3-1實驗目的 9 3-2實驗流程 9 3-3鍍膜製作與實驗方法 11 3-3-1濺鍍參數與鍍膜安排 11 3-3-2實驗材料 13 3-3-3硬度實驗 14 3-3-4附著性實驗 15 3-3-5磨耗實驗 17 3-3-6氧化實驗 18 3-3-7成分分析 19 3-3-7-1輝光放電分析儀 19 3-3-7-2能量分散光譜儀 20 3-3-8表面、斷面及磨耗型態分析 20 3-3-9微鑽削實驗 20 3-3-10車削實驗 23 3-4實驗設備 25 第四章 鍍層實驗結果與討論 27 4-1鍍膜基本性質 27 4-1-1鍍膜表面粗糙度分析 28 4-1-3鍍膜膜厚及成份分析 31 4-1-4鍍膜硬度 32 4-2鍍膜磨耗試驗 33 4-3鍍膜附著性 36 4-4小結 37 4-5熱處理對鍍膜的影響 38 4-5-1 鍍膜基本性質 38 4-5-1-1 鍍膜微結構 38 4-5-1-2 鍍膜表面粗糙度分析 40 4-5-1-3 鍍膜表面及斷面SEM觀察 41 4-5-1-4 熱處理後鍍層厚度、成分分析及氧化深度 44 4-5-1-5 熱處理後鍍層硬度 46 4-5-2 熱處理後鍍層磨耗實驗 49 4-5-3 鍍膜熱處理後之附著性 53 4-5-4 小結 55 4-6 鍍層磨耗壽命 56 4-7 乾車削實驗 57 4-8 PCB微鑽削實驗 61 第五章 結論與未來展望 65 5-1 結論 65 5-2 未來展望 67 第六章 參考文獻 68

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