| 研究生: |
宋健瑋 Song, Jian-Wei |
|---|---|
| 論文名稱: |
鎢-鋁鍍膜之耐氧化性及磨潤性能研究 The oxidation resistance and tribological performance of tungsten / aluminum coatings |
| 指導教授: |
蘇演良
Su, Yen-Liang |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2013 |
| 畢業學年度: | 101 |
| 語文別: | 中文 |
| 論文頁數: | 127 |
| 中文關鍵詞: | 鎢鋁鍍膜 、奈米硬度 、耐氧化性 |
| 外文關鍵詞: | tungsten aluminum coatings, nano-hardness, oxidation resistance |
| 相關次數: | 點閱:86 下載:5 |
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本研究採用非平衡磁控濺鍍法,在高速鋼底材鍍上一層鎢鋁薄膜,並探討鍍層於熱處理前後的抗氧化性、磨潤性質、車削與鑽削性質。實驗主要分為三階段:第一階段以改變鋁含量,分析不同鋁含量對鍍層性質的影響;第二階段探討鍍層在不同溫度(500℃與600℃)中,持溫一小時後,對鍍層性質的影響;第三階段選用較佳的鍍層進行鍍層壽命的測試,最後進行車削與鑽削印刷電路板的實驗,以瞭解實際上鍍膜披覆刀具在工業上的應用。
實驗結果得知,鍍層鋁含量愈高,鍍層的硬度則愈低,且附著性也會變差。當鋁含量15 at.%時,鍍層硬度最高,奈米硬度達15.1 GPa(荷重為10mN),且磨耗性質最佳。經過500℃和600℃持溫一小時的熱處理後,鍍層鋁含量愈高,則氧化深度愈淺,但仍無法改善磨耗深度。
由磨耗壽命結果得知H600-W-Al15鍍層與純鎢鍍層相比,能夠提升9倍的壽命,在由切削結果得知,披覆鋁含量(15 at.%)鍍層得刀具與未鍍膜的刀具相比,車刀刀腹磨耗量降低了59 %,微鑽針刀角磨耗量降低了42 %。
The W-Al thin films were deposited on HSS disc and silicon wafer by unbalanced magnetron sputtering. Before and after heat treatment, the oxidation resistance, tribological properties, turning and drilling performance were investigated. This experiment was divided into three stages. In the first stage, the effect of aluminum content on the mechanical and tribological properties of thin films were analyzed. In the second stage, after one-hour heat treatment with 500℃ and 600℃, the mechanical and tribological properties of these films were investigated. In the third stage, we choose the optimal coating to deposit on disposable inserts and micro-drills to test under practical machining .
The results show that the nano-hardness decreases with increasing aluminum content. The highest hardness and best wear resistance performed by the film which contains 15 at.% aluminum. After heat treatment, although the results show that the oxidation depth decreases with increasing aluminum content , aluminum doping can not improve the wear resistance.
The wear life of Pin-On-Disc shows that H600-W-Al15 can enhance nine times comparing with tungsten film. In turning and micro-drilling tests, the film contains 15 at.% aluminum can reduce the wear rate about 59% on disposable inserts and 42% on micro-drills.
1.T. Fu, Z.F. Zhou, K.Y. Li, Y.G. Shen, " Structure, stress and hardness of sputter deposited nanocomposite W-Si-N coatings ", Surface & Coatings Technology, Vol. 200(2005) p.2525-2530
2.D.J. Cheng, W.P. Sun, M.H. Hon, "The morphology and structure of chemically vapour-deposited Ti(C,N) coatings", Thin Solid Films, Vol.146(1987) p.45-53
3.B.E. Jacobson, C.V.Deshandey, H.J. Doerr, A.A. Karim, R.F. Bunshah,"Microstructure and hardness of Ti(C,N) coatings on steel prepared by the activated reactive evaporation technique" ,Thin Solid Films, Vol.118(1984) p.285-292
4.S. Veprek and S. Reiprich, "A concept for the design of novel superhard coatings", Thin Solid Films, Vol. 268(1995) p.64-71
5.N.R. Moody, T.E. Buchheit, B.L. Boyce, T.M. Mayer, S.M. George, "Mechanical Properties Derived From Nanostructuring Materials", Materials Research Society Symposium Proceedings, Vol.778(2003) p.4
6.B. Trindade, M.T. Vieira, E. Bauer-Grosse, "Amorphous phase forming ability in (W-C)-based sputtered films", Acta Materialia , Vol.46(1998) p.1731-1739
7.T. Polcar, N.M.G. Parreira, A. Cavaleiro, "Tungsten oxide with different oxygen contents: Sliding properties", Vacuum, Vol.81(2007) p.1426-1429
8.Y. Liu, M. Gubisch, T. Haensel, L. Spiess, J.A. Schaefer, "Evaluation of the friction of WC/DLC solid lubricating films in vacuum", Tribology International, Vol.39(2006) p.1584-1590
9.J. Esteve, G. Zambrano, C. Rincon, E. Martinez, H. Galindo, P. Prieto, "Mechancial and tribological properties of tungsten carbide sputtered coatings ", Thin Solid Films, Vol.373(2000) p.282-286
10.J. Veverkova, S.V. Hainsworth, "Effect of temperature and counterface on the tribological performance of W-DLC on a steel substrate", Wear, Vol.264(2008) p.518-525
11.A. Nossa, A. Cavaleiro, N.J.M. Carvalho, B.J. Kooi, J.Th.M. De Hosson, "On the microstructure of tungsten disulfide films alloyed with carbon and nitrogen", Thin Solid Films,Vol.484(2005) p.389-395
12.T. Polcar, M. Evariso, A.Cavaleiro, "The tribological behavior of W-S-C films in pin-on-disk testing at elevated temperature",Vacuum, Vol.81(2007) p.1439-1442
13.B. Trindade and M.T. Vieira, "Crystallisation kinetics of amorphous W-Co-C sputtered films",Thin Solid Films, Vol.322(1998) p.68-73
14.P.N. Silva, J.P. Dias, A. Cavaleiro, "Tribological behavior of W-Ti-N sputtered thin films", Surface & Coatings Technology, Vol.200(2005) p.186-191
15.Q. Wang, J.P. Tu, S.C. Zhang, D.M. Lai, S.M. Peng, B. Gu, "Effect of content on microstructure and tribological performance of WS2-Ag composite films", Surface & Coatings Technology, Vol.201(2006) p.1666-1670
16.Z. Tek, M.A. Gügör, E. Çal, M. Sonugelen, C. Artunç, A. Oztarhan, " A study of the mechanical properties of TiN coating of Cr–Ni alloy", Surface & Coatings Technology, Vol. 196(2005) p. 317–320
17.W.R. Feng, D.R. Yan, J.I. He, G.L. Zhang, G.L. Chen, W.C. Gu, S. Yang, " Microhardness and toughness of the TiN coating prepared by reactive plasma spraying", Applied Surface Science, Vol.243(2005) p.204-213
18.E. Harry, A. Rouzaud, P. Juliet, Y. Pauleau, M. Ignat, "Failure and adhesion characterization of tungsten –carbon single layers, multilayered and graded coatings", Surface & Coatings Technology, Vol.116-119 (1999) p.172-175
19.C.J. Zha, X.F. Ma, W. Zhao, H.G. Tang, J.M. Yan, S.G. Cai, "Synthesis and thermal stability of Al75W25 alloy obtained by mechanically alloying", Journal of Alloys and Compounds , Vol.393(2005) p.248-251
20.M. Rafiei, S. Khademzadeh, N. Parvin, "Characterization and formation mechanism of nanocrystalline W-Al alloy prepared by mechanical alloying", Journal of Alloys and Compounds, Vol.489(2010) p.224-227
21.Y.C. Feng, L. Geng, A.B. Li, Z.Z. Zheng, "Fabrication and characteristics of in situ Al12W particles reinforced aluminim matrix composites by reaction sintering", Materials and Design, Vol.31(2010) p.965-967
22.謝易達,"氧化鎢添加鉻複合鍍膜之機械性質和膜潤性能研究", (2011) p.47
23.B. Window, "Recent advances in sputter deposition", Surface & Coatings Technology, Vol.71(1995) p.93-97
24.D.P. Monaghan, D.G. Teer, K.C. Laing, I. Efeoglu, R.D. Arnell, "Deposition of graded alloy nitride films by closed field unbalanced magnetron sputtering", Surface & Coatings Technology, Vol.59 (1993) p.21–25
25.P.J. Kelly, R.D. Arnell, "Magnetron sputtering: a review of recent developments and applications", Vacuum, Vol.56(2000) p.159–172
26.N.M.G. Parreira, N.J.M. Carvalho, F. Vaz, A. Cavaleiro, "Mechanical evaluation of unbiased W-O-N coatings deposited by d.c. reactive magnetron sputtering", Surface & Coatings Technology, Vol.200 (2006) p.6511-6516
27.R.E. Smallwood, "ASTM Committee B-10 on Reactive and Refractory Metals and Alloys", Philadephia, PA, (1982) p.82-104
28.A.G. Souza Filho, J. M. Filho, V.N. Freire, A.P. Ayala, J.M. Sasaki, P.T.C. Freire, F.E.A. Melo, J.F. Juliao, U.U. Gomes, "Phase transition in WO3 microcrystals obtained by sintering process", J. Raman Spectrosc., Vol.32(2001) p.695
29.E. Cazzanelli, C. Vinegoni, G. Mariotto, A. Kuzmin, J. Purans, "Low-Temperature Polymorphism in Tungsten Trioxide Powders and Its Dependence on Mechanical Treatments", Journal of Solid State Chemistry, Vol.143(1999) p.24-32
30.D. Greenwooda, S.C. Moulzolfa, P.J. Blaub, R.J. Lada, "The influence of microstructure on tribological properties of WO3 thin films", Wear, Vol.232(1999) p.84-90
31.N.M.G. Parreira, N.J.M. Carvalho, A. Cavaleiro, Synthesis, "Structural and mechanical characterization of sputtered tungsten oxide coatings", Thin Solid Films, Vol.510 (2006) p.191-196
32.P. Harlin, P. Carlsson, U. Bexell, M. Olsson, "Influence of surface roughness of PVD coatings on tribological performance in sliding contacts", Surface & Coatings Technology,Vol.201(2006) p.4253-4259
33.V. Edlmayr , M. Moser, C. Walter, C. Mitterer, "Thermal stability of sputtered Al2O3 coatings", Surface & Coatings Technology,Vol.204 (2010) p.1576–1581
34.C.J. Zhu, X.F. Ma, W. Zhao, H.G. Tang, J.M. Yan, "Synthesis and thermal stability of Al75W25 alloy obtained by mechanically alloying", Journal of Alloys and Compounds , Vol.393(2005) p.248–251
35.W. Lauwerens , A. De Boeckb, M. Thijsc, S. Claessensb, M. Van Stappena, P. Steenackersc , "PVD Al–Ti and Al–Mn coatings for high temperature corrosion protection of sheet steel", Surface & Coatings Technology , Vol.146 –147(2001) p.27–32
36.S.G. Cai, L. Liu, R.Z. Xu, G. Song, "Corrosion behaviour of Mg-rich Al coatings in the protection of Al alloys",Surface & Coatings Technology, Vol.205(2010) p.332–337
37.M. Stubicar, A. Tonejc, N. RadicH, "Microhardness characterization of Al-W thin films", Vacuum , Vol.61 (2001) p.309–316
38.T. Kohara, H. Tamagaki, Y. Ikari, H. Fujii, "Deposition of a-Al2O3 hard coatings by reactive magnetron sputtering",Surface & Coatings Technology ,Vol.185(2004) p.166– 171
39.Z.J. Yin, S.Y. Tao, X.M. Zhou, C.X. Ding, "Tribological properties of plasma sprayed Al/Al2O3 composite coatings",Wear, Vol.263(2007) p.1430–1437
40.T.C. Chou, T.G. Nieh, S.D. McAdams, G.M. Pharr, "Mircostructure and mechanical properties of thin films of aluminum oxide", Scripta Metallurgica et Materialia, Vol.25(1991) p.2203-208
41.T. Arai, H. fujita, M. Watanabe, "Evaluation of adhesion strength of thin hard coating ",Thin Solid Film, Vol. 154(1987) p.387-401
42.張文銓,"鎢碳鍍膜之機械性質和磨潤性能研究",(2012) p.13,p.15
43.S.Y. Lee, G.S. Kim, J.H. Hahn, "Effect of the Cr content on the mechanical properties of nanostructured TiN/CrN coatings", Surface & Coatings Technology, Vol.177-178 (2004) p.426-433
44.T.Y. Tsui, G.M. Pharr, W.C. Oliver, C.S. Bhatia, R.L. White, S. Anders, A. Anders, I.G. Brown, "Nanoindentation and nanoscratching of hard carbon coatings for magnetic disks", Materials Research Society Symposium Proceedings, Vol.383(1995) p.447-452
45.H. Zhang and D.Y. Li, "Effects of sputtering condition on tribological properties of tungsten coatings", Wear, Vol.255 (2003) p.924-932
46.B. P. Dhonge, T. Mathews, S.T. Sundari, M. Kamruddin, S. Dash, A.K. Tyagi,"Combustion chemical vapour deposition of Al2O3 films:Effect of temperature on structure , morphology and adhesion",Surface & Coatings Techology, Vol.205(2010) p.1838-1842