本論文首先提出一種創新的準分子雷射(Excimer Laser)精密微細加工技術，可以快速加工出任意曲面形貌之3D微結構，且其加工精確度可以達到次微米的等級；其次，將此一技術應用於球面與非球面折射式微透鏡與微透鏡陣列的精密加工；並結合微電鑄與微熱壓印成形技術，形成完整的準分子雷射LIGA-Like製程，可以大量複製球面與非球面的光學微透鏡。最後，論文將對於所製作之微透鏡進行完整的光學分析與檢測。
　　在準分子雷射加工方面，本論文提出一種創新的光罩設計與工件旋轉加工方式，稱之為「準分子雷射行星式加工法」；主要係利用特殊的光罩設計及工件的自轉與公轉，使雷射投射在工件上的加工機率呈現三維的連續分佈，以精確且快速地加工出各式三維任意曲面的微結構；並經由數值模擬與實驗量測，證明此一「準分子雷射行星式加工法」的可行性與精確度。此技術可以廣泛應用於3D微結構的精密加工與大量製作，包括微透鏡、微鏡片、光纖耦合與連接器、雷射二極體之耦合鏡、與其它相關之微光學元件之製作與大量生產。
　　此外，為了對所製作完成之微透鏡有更充分的了解，除量測微透鏡的表面形貌與表面粗糙度之外，本文亦對所製作之微透鏡進行光學分析與檢測，包含微透鏡光學原理之理論推導、ZEMAX光學軟體分析模擬與光學檢測實驗，並對分析模擬結果與光學實驗量測結果相比較，証明所製作之球面與非球面微透鏡具有良好的光學特性與精確的加工形貌。

　　This study investigates the laser-LIGA micro-fabrication processes for fabricating spherical and aspheric microlenses and microlens array. Particular emphasis is placed on the machined surface profile accuracy for axially symmetrical microstructures with a pre-described surface profile. It is then followed by electro-deposition of metal nickel and hot embossing molding of polymer materials to complete a full cycle of LIGA-like manufacturing process. The process can be applied for mass-production of 3D microstructures with precise dimensions and surface profiles.
　　In this thesis, a novel excimer laser micro-machining method called “planetary contour scanning method” is developed. The basic idea is based on a specific mask design method and a sample rotation method which includes both self-spinning and circular revolving to provide a probability function of laser machining. The probability function created by the planetary scanning assures a continuous, smooth, and precise surface profile to the machined microstructures. Which is very important to refractive microlenses and micro-mirrors, and other optical-fiber related micro-optic device.
　　The surface profiles of machined microlenses are measured and compared with their theoretical or pre-designed counterparts. Excellent agreements in profiles shapes and dimensions are achieved. Optical analysis software, ZEMAX, has been used for analyzing the performance of the fabricated microlenses. An optical system is set up to characterize the optical performance of the machined microlenses, and then compared with their theoretical data.

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