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研究生: 許豐巖
Hsu, Feng-Yen
論文名稱: 應用抓式致動器於可旋轉與平移之定位平台設計
Design of an Integrated Rotary and Linear Micropositioner by Scratch Drive Actuator
指導教授: 楊世銘
Yang, Shih-Ming
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2003
畢業學年度: 91
語文別: 英文
論文頁數: 60
中文關鍵詞: 無軸馬達微定位平台抓式致動器
外文關鍵詞: MEMS, positioner, SDA, scratch drive actuator
相關次數: 點閱:93下載:5
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  • 在微機電系統(MEMS)中,除了製造技術的研發以外,在應用上大致可分為兩個主要的研究領域,即微感測器(microsensor)與微致動器(microactuator)之開發運用。早期的研究尤其以微感測器為主,近年來之微致動器研發包括應用靜電式抓式致動器於微馬達作固定式的旋轉動作。本論文設計出一個整合創新無軸旋轉馬達與平移馬達之微型x-θ精密定位平台設計,整個設計中所有的結構層皆以複晶矽組成,以十層光罩仿MUMPs製程來實現。
    設計中定位平台採用三個驅動電壓端分別驅動,故可整合於一IC控制電路,作x-θ自由度之精密定位;根據結構尺寸之設計,可調整定位平台之運動行程至毫米等級;同時利用抓式致動器之良好動態特性,可達到奈米精度之定位。在此設計中最主要的部分即創新的無軸旋轉馬達之設計,由平移滑動軌道,馬達外蓋,及整合抓式致動器之旋轉馬達主體等三個部分所構成。無軸旋轉馬達直徑為400 mm,其轉速為4~5 rpm,組合在無軸旋轉馬達與推動無軸旋轉馬達之線性平台的抓式致動器尺寸皆為長85 mm、寬70 mm。線性平台每邊各以8個抓式致動器組合而成,預估其移動速度為85 mm/sec、輸出力約為80~100 mN,在頻率為1 kHz、操作電壓為100 V之下運作。

    Previous work on micromotor design by using electrostatic scratch drive actuator (SDA) was in fixed axis motion. This thesis presents the design of a micropositioner composed of an innovative axis-free rotary motor and a pair of linear motors by SDA assembly. The micropositioner is capable of precision x-θ motion. The innovative axis-free rotary motor is composed of straight slide track, motor cover and scratch drive actuators. All structure layers are made of polysilicon microstructure fabricated on a silicon wafer by surface micromachining.
    The distance of travel in the micropositioner design is about 1400 mm, and the step size of SDA is calculated at 85 nm for the bushing height 1.5 mm, insulator thickness 0.6 mm, plate length 85 mm, plate width 70 mm and plate thickness 1.5 mm under the applied pulse voltage 100 V. The velocity of SDA is 85 mm/sec under the operation frequency of 1kHz. The linear motor of 8 SDAs can produce the output force in the range of 80~100 mN, and the revolution of the axis-free rotary motor is about 4~5 rpm.

    ABSTRACT …………………………………………………………………………………………i CONTENTS ………………………….……………………………………………………………ii LIST OF TABLES ………………………………………………………………………………iii LIST OF FIGURES ………………………………………………………………………………iv CHAPTER I Introduction …………………………………………………………………1 1.1 Motivation …………………………………………………………………………1 1.2 Literature Review ………………………….…………………….………………2 1.3 Outline …………………………………….……………………….……………….3 II Electrostatic Scratch Drive Actuator …………………………………4 2.1 Introduction …………………………….…………………………………………4 2.2 Scratch Drive Actuator …..………………………………………………………5 III Micropositioner Design ……………………………………………………13 3.1 Introduction ……………………………………………………….………………13 3.2 An Integrated Rotary and Linear Micropositioner …………………………13 3.3 Rotary Motor by Scratch Drive Actuator ……………………………………14 3.4 Linear Motor by Scratch Drive Actuator ……………………………………16 IV Fabrication of Micropositioner ………………………………………23 4.1 Photomask Design …………….…………………………………………………23 4.2 Fabrication Process ……………………………………………………………24 4.3 Stiction Release ………………………………………………………………27 4.4 Experimental Equipment ………………………………………………………28 V Summary and Conclusions ………………………………………………56 REFERENCES ………………………………………………………………………..…57

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