本論文利用工業電腦、介面卡、光學尺、壓力感測器、伺服流量閥、衝壓型氣壓缸與無桿型氣壓缸等元件建立一個三軸氣壓運動平台。本論文研究目地是嘗試找到一個適用於三軸伺服氣壓系統的控制法則，控制法則包括氣壓缸受到垂直負荷下定位控制之研究與軌跡追蹤之法則。
　　在定位控制上，由於性能要求在穩態，本論文以最簡單的PD位置控制法則加上最大靜摩擦力補償。在直線運動控制上，以PD位置控制法則加上速度前饋式補償器，使用前饋-回授迴路控制系統，使系統產生直線等速運動。在圓弧運動控制上，此論文根據氣體之可壓縮、系統摩擦力、閥軸死區與氣體流經閥口下的非線性模型嘗試以補償或使用感測器回授方式，使對系統的掌握性增加，以及根據弦波軌跡的頻率與振幅大小與系統的摩擦力及死區等的特性，使用摩擦力補償、閥軸死區補償與虛擬彈簧效應補償，其目的使系統仿效一個質量彈簧系統使氣壓缸可以追蹤弦波軌跡追蹤，此方法應用在兩軸向的氣壓缸系統上，可以系統作循圓軌跡控制。

　　The purpose of this paper is finding a control rule, which can be application to 3-Axes servo pneumatic motion system.The control rule is include the method of pneumatic cylinder under loading position control and pneumatic cylinder trajectory tracking motion control.The 3-Axes servo pneumatic motion system is composed of a industry computer,computer interface card,linear scaler, pressure sensor, flow servo valve, press-type cylinder acturator and rodless cylinder acturator.
　　For the position control,the performance due to static state position error,the paper use PD position controller with the static friction compsator.For the linear motion control, according to PD position controller with the velocity feedforward compsator,use the feedforword-feedback control loop to result the linear motion.For the arc motion control, the paper use the friction compensate,valve dead zone compsate and virtual spring effect compsate aim to pneumatic system simulate a mass-spring system to trajectory sinusoidal.The control rule apply in two-axed pneumatic system can be trajectory circle control.

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