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研究生: 楊翔棋
Yang, Hsiang-Chi
論文名稱: 極精細15 μm不鏽鋼導線應用特性: 通電退火冶金機制與打線接合研究
Application of Ultra-Fine 15μm Stainless Steel Wire: Metallurgical Mechanisms of Electrified Annealing and Wire Bonding
指導教授: 洪飛義
Hung, Fei-Yi
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 169
中文關鍵詞: 304L不鏽鋼機械性質通電退火打線接合電子封裝
外文關鍵詞: 304L stainless steel, Mechanical property, Electrified annealing, Wire bonding, Electronic packaging
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  • 近來來電子封裝技術在半導體產業中地位越趨重要,其中打線接合製程是最簡單且技術最成熟方式,原理為利用金屬導線連接晶片與外部接腳,形成通路傳送訊號。本研究考量不鏽鋼線材具有優異機械性質,且被廣泛應用於工程領域,因此製備出線徑為15 μm及30 μm之304L不鏽鋼細線,探討導入打線接合電子封裝技術可行性。本研究會聚焦在探討304L不鏽鋼導線顯微組織特性、通電機制及成球性,評估應用在打線接合可行性。結果顯示,直徑15 μm 與30 μm之304L不鏽鋼導線組織為長軸晶,均具優異拉伸強度與硬度。相較於30 μm不鏽鋼導線,15 μm不鏽鋼導線加工硬化效應顯著,使得拉伸強度與電阻都高於30 μm不鏽鋼導線。15 μm不鏽鋼導線具備良好電熱破壞性質,通電同步拉伸結果顯示導線於80 % FC通電下,拉伸強度維持800 MPa,延性則提升至10 %,同時擁有與原材相近拉伸韌性,展示導線於通電情形下之優異機械性質。為改善15 μm不鏽鋼導線加工硬化及延性問題,本研究探討真空退火與通電退火製程差異性,確認原始線材在真空爐中780 °C持溫15分鐘後,硬度顯著降低。再者,應用本研究公式,T = (I"." V)/(2.3085" × " 10^(-3) ) + 25,把780 °C轉換成通電電流並進行通電退火,發現通電退火線材 (條件: 0.08安培通電5分鐘)具有軟韌化效應與高延性。線材加工儲存能與再結晶效應使15μm不鏽鋼導線電疲勞壽命達到300次;經通電退火後,基地組織受到電熱影響而具有均質效應,因此電疲勞壽命約為150次。
    打線接合實驗,線材因軟韌化效應而容易放電結球,且可降低球部組織凝固偏析,放電結球高溫使頸部區域 (0-180 μm)晶粒粗大化形成熱影響區 (HAZ),讓第一銲點動態電阻低於線材電阻,且第一銲點拉拔力低於線材,但有達到應用標準。本研究發現304L不鏽鋼線材與鋁或銅基板間界面並不會產生IMC導致電阻上升而造成接點壽命下降,具有類似同質接合特性。實驗對打線接合系統進行接點長時間通電可靠度測試,確認在長時間高電流通電下,接點電阻些微上升,界面處無因通電產生IMC現象。綜觀整體研究成果,304L不鏽鋼確實具有潛力能作為導線材料應用於電子封裝領域。

    The results show that 304L stainless steel wires exhibit an elongated grain structure, high tensile strength and hardness, and favorable electrothermal failure behavior. During electrically assisted tensile testing at 80% FC, the tensile strength remained at 800 MPa while elongation increased to 10%, indicating improved ductility without sacrificing toughness. To reduce work hardening and limited ductility, the optimal annealing temperature was converted into an equivalent current using the proposed equation, followed by electrified annealing. The annealed wires (0.08 A for 5 min) showed softening, enhanced ductility, and improved microstructural homogenization, facilitating free air ball (FAB) formation and reducing solidification segregation.
    During wire bonding, the high temperature during FAB formation induced grain coarsening in the neck region (0-180 μm), forming a heat-affected zone (HAZ) with lower resistance and reduced pull strength than the wire. No intermetallic compounds (IMCs) formed at the interfaces between 304L stainless steel wire and aluminum or copper substrates, preventing resistance increase and joint degradation while maintaining homogeneous bonding characteristics. Long-term current-stress tests also confirmed the absence of IMC formation under prolonged high-current conditions. Overall, 304L stainless steel shows strong potential as a wire material for electronic packaging applications.

    中文摘要I 英文摘要III 致謝XII 總目錄XIII 表目錄XVIII 圖目錄XIX 第一章 前言1 第二章 文獻回顧6 2-1 電子構裝6 2-1-1 捲帶式自動貼合6 2-1-2 覆晶接合7 2-1-3 打線接合7 2-2 打線接合技術與銲點分類8 2-2-1 熱壓音波接合8 2-2-2 超音波接合9 2-2-3 熱壓接合9 2-2-4 第一銲點 (球型)10 2-2-5 第二銲點 (楔型)10 2-3 影響打線接合品質因素11 2-3-1 EFO參數控制與FAB球部結構11 2-3-2 超音波能量與下壓力12 2-3-3 保護氣氛12 2-3-4 接合界面IMC生成13 2-4 封裝導線材料14 2-4-1 鋁線14 2-4-2 金線14 2-4-3 銀線15 2-4-4 銅線16 2-4-5 304L不鏽鋼線16 2-5 基板材料17 2-5-1 銅基板18 2-5-2 鋁基板18 2-6 封膠材料與環境19 2-7 焦耳熱效應20 2-8 電遷移效應20 2-9 通電退火製程21 2-10 研究目的22 第三章 實驗步驟與方法24 3-1 實驗材料24 3-2 線材顯微組織特徵與微硬度25 3-3 線材軟韌化處理製程25 3-3-1 真空退火處理製程26 3-3-2 線上通電退火製程26 3-4 放電結球測試27 3-5 打線接合27 3-6 拉伸試驗27 3-6-1 線材拉伸試驗28 3-6-2 線材通電同步拉伸試驗28 3-6-3 頸部拉伸試驗29 3-6-4 第一銲點拉伸試驗29 3-7 I-V曲線與動態電阻30 3-7-1 線材I-V曲線與動態電阻30 3-7-2 銲點I-V曲線與動態電阻30 3-8 通電疲勞循環31 3-8-1 線材通電疲勞循環31 3-8-2 銲點通電疲勞循環31 3-9 第一銲點界面元素分析32 3-10 接點長時間通電可靠度測試32 第四章 結果與討論38 4-1 導線長度參數效應38 4-2 原線材顯微組織與微硬度39 4-3 拉伸與通電拉伸性質40 4-3-1 線材拉伸試驗40 4-3-2 線材通電同步拉伸試驗40 4-4 線材I-V曲線與動態電阻45 4-5 線材通電疲勞性質45 4-6 真空退火線材顯微組織與微硬度特徵46 4-7 通電誘發溫度關係探討48 4-8 通電退火49 4-8-1 通電退火線材顯微組織與微硬度49 4-8-2 通電退火時間參數效應50 4-8-3 通電退火線材TEM分析52 4-8-4 通電退火線材之通電疲勞循環壽命55 4-9 放電成球性評估55 4-10 通電退火球部TEM分析57 4-11 打線接合電性綜合分析61 4-11-1 基板電性61 4-11-2 第一銲點接點電性62 4-11-3 第二銲點接點電性63 4-11-4界面電性64 4-12 第一銲點與第二銲點之通電疲勞循環壽命65 4-13 頸部拉伸與第一銲點拉拔力試驗66 4-13-1 頸部拉伸試驗66 4-13-2 第一銲點拉拔力試驗67 4-14 打線接點長時間通電可靠度評估68 第五章 結論134 參考文獻137

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