本篇論文使用有限元素分析軟體 ANSYS-Workbench 2022 R2軟體來分析純度99.6%的氧化鋁陶瓷末端執行器於正壓腔室傳遞晶圓時，進行結構的擺幅分析。在模擬過程中，先經由CAD軟體SpaceClaim2022R2來建立陶瓷末端執行器之模型，並於Workbench 中建立網格、機械材料特性、並且優化網格品質以及網格尺寸，接著在使用模態求解器，來得到末端執行器於不同厚度下的自然頻率與最大擺幅。在取得末端執行器的自然頻率後，進而延伸實驗至末端執行器在極限環境下，因應力集中、彈性應變等力學行為所產生的不可回復性破壞來進行分析與改善，並透過極限測試的實驗設計，來得知作業環境的參數優化方式，以避免生產過程中造成的機構破壞。最後，將氧化鋁末端執行器的工作環境條件導入隨機震動求解器中的邊界條件參數列表中，以及將機械手臂進行晶圓傳遞的各項運動條件作為振動源，接著在此條件下，利用隨機震動求解器來得到不同厚度的端執行器在相同震動源下，所產生的擺幅，並與實驗結果比較後，估算其誤差值。最後，在以實驗數據來驗證模擬結果是否為真，並以匹配結果來決定末端執行器的最佳作業厚度。

This thesis uses the finite element NSYS-Workbench 2022 R2 software to analyze the amplitude of vibration pendulum analysis of the alumina oxide end effector with a purity of 99.6% when transferring wafers in a positive pressure chamber. In the simulation process, the CAD software SpaceClaim2022R2 is used to create the alumina oxide end effector model. Furthermore, the modal solver is used to obtain the natural frequencies of the end effector at different thicknesses. After obtaining the natural frequency of the end effector, the experiment is extended to analyze and improve the irreversible damage of the end effector under the extreme environment due to mechanical behaviors such as stress concentration and elastic strain. Through the limit test experimental design, the parameter optimization method of the working environment is known, and the mechanism damage caused in the production process is avoided. Finally, importing the working environment conditions of the alumina oxide end effector into the boundary condition parameter list in the random vibration solver, and using the movement conditions of the wafer transfer by the robotic arm as the vibration source, the random vibration solver is used to obtain the swing amplitudes of end effectors with different thicknesses under the same vibration source. After comparing with the experimental results, the error values are determined. Finally, the experimental data is used to verify whether the simulation results are true, and the matching results are used to determine the optimal working thickness of the end effector.

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