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研究生: 侯君諺
HOU, CHUN-YEN
論文名稱: 面板級封裝之自動化參考溫度校正模擬流程開發與應用
Development and Application of an Automated Reference Temperature Calibration Simulation Workflow for Panel-Level Packaging
指導教授: 梁育瑞
Liang, Yu-Jui
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 89
中文關鍵詞: 面板級封裝翹曲量有限元素法Python
外文關鍵詞: Panel-Level Packaging (PLP), Warpage, Finite Element Method (FEM), Python
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  • 傳統半導體製程中,電晶體微縮已逐漸逼近物理極限,使得繼續縮小電晶體變得越來越困難且昂貴。現代封裝的重點已從過去單純的「更小、更快」,轉變為追求多功能性、高附加價值與異質整合(Heterogeneous Integration),於是先進封裝的需求因應而生,這促使先進封裝技術的興起,這些技術旨在透過異質整合而非單片縮放來維持效能成長。在這些創新中,面板級封裝(PLP)脫穎而出,成為一種極具變革性的架構,它透過從傳統的 300 毫米圓形晶圓轉向大型矩形面板,實現了更高的生產效率和顯著的成本優勢,在相同邊長特徵尺寸的情況下,矩形面板顯然能夠更好利用空間塞入比圓形晶圓更多的晶片,產生更大的經濟效益。
    然而 PNL結構在大面積與多材料(如RDL、PI、CPD等)的堆疊下,在經過溫度變化後,各材料熱膨脹係數(Coefficient of Thermal Expansion, CTE)不一致,導致結構產生翹曲(Warpage),影響後續製程,可能導致功能失效或可靠度下降。為了能夠控制翹曲的影響,本研究主要透過有限元素分析軟體Ansys來進行翹曲分析,並驗證模擬結果是否能與實際量測的結果有相同趨勢,並紀錄各製程站點的參考溫度,以用於未來能夠以此參考溫度,來預測最佳化結構或是替換其他材料的可能行為趨勢。
    本研究透過將Python 與 Ansys 做結合,開發了介面化參數化自動建模、自動化前處理,以及後續的自動化分析,結果顯示,開發之自動化系統能有效提升模擬效率與精度。在技術性能上,透過共享節點技術使前處理時間縮短 90%,記憶體用量從 15GB 降至 1GB,並達成 83.8% 的運算加速。在模擬驗證方面,除了獨立校正能面板級封裝在前四個站點(Station A~D)中,模擬與實驗的誤差均精準控制在 10% 以內,其中最低誤差僅 0.84%,後續採用的延續校正策略能精準捕捉製程中的翹曲反轉,使最終站點誤差收斂至 8.25%。此外,該流程亦成功應用於 HFCBGA 封裝,證明其具備從宏觀面板到微觀封裝的泛用性與取代人工調校的潛力。

    In traditional semiconductor manufacturing processes, transistor scaling is gradually approaching its physical limits, making further miniaturization increasingly difficult and expensive. The focus of modern packaging has shifted from simply being "smaller and faster" to pursuing multi-functionality, high added value, and Heterogeneous Integration. Consequently, the demand for advanced packaging has emerged, driving the rise of technologies designed to sustain performance growth through heterogeneous integration rather than monolithic scaling. Among these innovations, Panel-Level Packaging (PLP) stands out as a highly transformative architecture. By transitioning from traditional 300 mm round wafers to large rectangular panels, it achieves higher production efficiency and significant cost advantages. Under the same characteristic edge length, rectangular panels can obviously utilize space more effectively to accommodate more chips than round wafers, generating greater economic benefits.
    However, in the PNL structure, the large-area stacking of multiple materials (such as RDL, PI, CPD, etc.) leads to mismatched Coefficients of Thermal Expansion (CTE) during temperature variations. This CTE mismatch induces structural warpage, which affects subsequent manufacturing processes and may result in functional failure or degraded reliability. To control the impact of warpage, this study primarily employs the finite iv element analysis software Ansys to conduct warpage simulations and verifies hether the simulation results align with the trends of actual empirical easurements. Furthermore, the reference temperatures at various process stations are recordedso that they can be utilized in the future to predict the potential ehavioral trends for structural optimization or material substitution.
    By integrating Python with Ansys, this study developed GUI-based parametric automated modeling, automated pre-processing, and subsequent automated analysis. The results indicate that the developed automated system effectively enhances simulation fficiency and precision. In terms of technical performance, the implementation of hared Topology technology reduced pre-processing time by 90%, decreased memory usage from 15GB to 1GB, and achieved an 83.8% acceleration in computational speed. Regarding simulation verification, under the independent calibration strategy for panel-level packaging, the simulation errors for the first four stations (Stations A to D) were precisely controlled within 10%, with the lowest error being merely 0.84%. The subsequently employed sequential calibration strategy accurately captured the warpage reversal during the process, successfully converging the error at the final station to 8.25%. Furthermore, this workflow was successfully applied to the HFCBGA package, demonstrating its versatility spanning from macroscopic panels to microscopic packages, as well as its robust potential to replace manual fine-tuning.

    摘要 i Abstract ii 致謝 x 目錄 xi 表目錄 xiii 圖目錄 xiv 符號說明 xvii 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機及目的 3 1.3 文獻回顧 4 1.3.1 扇出型晶圓封裝 4 1.3.2 封裝翹曲行為模擬 5 1.3.3 線性迴歸演算法 7 第二章 研究方法 9 2.1 有限元素模型 9 2.2 自動化建模及GUI 13 2.3 自動化前處理及模擬流程 17 第三章 封裝結構設定及前處理流程 19 3.1 面板級封裝模型 19 3.2 封裝結構之材料性質 21 3.2.1 等向性材料 21 3.2.2 等效材料性質 24 3.2.3 面板級封裝材料設定 26 3.3 自動化前處理設定 30 3.3.1 幾何群組化與材料自動分派 30 3.3.2 疊層網格自動劃分設定(Stacker Mesh Flow) 31 3.3.3 自動材料設定及參數化機制 36 3.3.4 邊界條件與求解設置 40 第四章 研究結果 44 4.1 PNL封裝模型結果 44 4.1.1 PNL獨立校正結果 48 4.1.2 PNL延續校正結果 53 4.1.3 PNL替換材料校正結果 55 4.2 Package封裝模型 59 4.2.1 HFCBGA封裝實例結果 60 第五章 結論 64 5.1 結論 64 5.2 未來展望 65 第六章 參考文獻 67

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