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研究生: 林益生
Lin, Yi-Sheng
論文名稱: 以烷基駢苯衍生物作為主動層之有機薄膜電晶體
N-Alkyl Perylene Diimides based Organic Thin Film Transistors
指導教授: 周維揚
Chou, Wei-Yang
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程研究所
Institute of Electro-Optical Science and Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 111
中文關鍵詞: 有機薄膜電晶體場效載子遷移率底部接觸烷基駢苯衍生物
外文關鍵詞: Perylene derivatives, organic thin-film transistors, bottom contact, field-effect mobility
相關次數: 點閱:85下載:1
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  • 本論文研究的主題是由本實驗室自行合成烷基的碳數二至十三之不同烷基駢苯衍生物N,N'-dialkyl-3,4,9,10-perylene tetracarboxylic diimide (PTCDI-CnH2n+1)作為有機薄膜電晶體主動層材料,並使用核磁共振儀及吸收光譜分析材料結構與特性。

    本實驗分為兩部份,第一部份我們將不同烷基駢苯衍生物成膜於底部接觸型(Bottom contact)結構元件中,元件的電極採用梳狀氧化銦鍚(Indium Tin Oxide)電極作為源極與汲極,並於成膜前對基板表面作氧電漿(O2 Plasma)清潔,將不同烷基駢苯衍生物分別成膜於基板溫度為常溫及100 ℃之基板,分析元件比較電性差異。第二部份我們將不同烷基駢本衍生物的薄膜成膜於矽基板上分析,分別使用X-Ray繞射光譜及吸收光譜研究不同烷基碳數薄膜結構的差異。

    在第一部份中我們發現不論是主動層成膜於基板溫度為常溫或100 ℃之條件,元件電性均有隨著烷基碳數增加而提升的趨勢。而主動層成膜於基板溫度為100 ℃之元件電性也較主動層成膜於基板溫度為常溫時佳。第二部份由X-Ray繞射光譜分析我們發現薄膜結構隨著烷基碳數增加其分子的主軸會漸漸躺向基板,而分析高碳數烷基的烷基駢苯衍生物薄膜發現,隨著烷基碳數增加其結晶無序度(The degree of crystalline disorder)並不會有所差別,再者,由吸收光譜分析上的結果亦排除烷基碳數改變造成PTCDI能階變化而使電性產生差異。

    We demonstrated organic thin-film transistors (OTFTs) using N,N'-dialkyl-3,4,9,10-perylene tetracarboxylic diimide (PTCDI-CnH2n+1, n = 2~13) with bottom contact comb-like indium tin oxide (ITO) electrodes. The perylene derivatives were synthesized in our laboratory and analyzed the material properties by nuclear magnetic resonance 1-D hydrogen spectroscopy (1H-NMR) and absorption spectrum. In part 1, we compared the electronic properties with different conditions, in which perylene derivatives were deposited on substrate under room temperature and 100 ℃. We observed that the field-effect mobilities of OTFTs increase with increasing the number of carbon within alkyl group of perylene derivatives. The performances of OTFTs, in which the perylene derivatives were deposited under 100 ℃, were better than that of those grown at room temperature. In part 2, we analyzed the properties of these thin films by the X-Ray diffraction (XRD) and absorption spectrum. From the XRD analyses, the molecules of perylene lie toward substrate with increasing the number of carbon within alkyl group without screw. From the absorption spectrum analyses, we can exclude the electronic properties of OTFTs from the factor of energy band gap of PTCDI with various perylene derivatives.

    中文摘要 I ABSTRACT III 目次 IV 表目錄 VII 圖目錄 VIII 致謝 XII 第1章 簡介 1 1.1 有機半導體簡介 1 1.2 N型有機薄膜電晶體發展概況 4 1.3 研究動機 6 第2章 原理 10 2.1 有機薄膜電晶體概論 10 2.2 有機薄膜電晶體傳輸機制 12 2.2.1 有機半導體載子傳輸機制 12 2.2.2 有機薄膜電晶體基本公式及特性 13 2.3 N型有機薄膜電晶體操作原理 15 第3章 不同碳數烷基駢苯衍生物材料合成與分析 21 3.1 實驗原理 21 3.2 實驗方法 22 3.2.1 實驗儀器及藥品 22 3.2.2 具不同碳數烷基駢苯衍生物配製流程 24 3.3 藥品檢測分析 25 3.3.1 核磁共振儀 25 3.3.2 自行合成之不同碳數烷基駢苯衍生物核磁共振分析 26 3.3.3 吸收光譜 27 第4章 不同碳數烷基駢苯衍生物有機薄膜電晶體製程與分析方法 42 4.1 元件基板製程 42 4.1.1 基板清洗步驟 43 4.1.2 物理氣象沉積蒸鍍系統及製程 44 4.2 電性分析 45 4.3 薄膜特性分析 46 4.3.1 X-Ray繞射量測系統 46 4.3.2 原子力顯微鏡量測系統 47 第5章 元件電性與薄膜分析 56 5.1 元件電性 56 5.1.1 不同碳數烷基駢苯衍生物之薄膜電晶體電性分析 56 5.1.2 基板加熱成長不同烷基駢苯衍生物電性比較 58 5.1.3 電性比較 60 5.2 薄膜分析 61 5.2.1 X-Ray 繞射分析 61 5.2.2 吸收光譜 64 第6章 結論與未來展望 92 6.1 結論 92 6.2 未來展望 94 參考文獻 96 附錄 100

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