本論文提出一種具次微米特徵尺寸之金屬嵌入式光罩的製程技術，並應用於藍寶石基板上製作光阻結構，再經由乾式蝕刻產生可應用於高亮度發光二極體 (LED) 的圖案化藍寶石基板。本論文分別研究二種金屬嵌入式光罩；一是硬式的石英基板光罩，首先以接觸轉印與光罩植入式顯影技術在石英基板上定義出次微米線寬的圖形，配合乾式蝕刻與金屬蒸鍍完成金屬嵌入式石英光罩；二是軟式的聚二甲基矽氧烷 (PDMS) 光罩，以金屬轉印直接移除表面蒸鍍金屬層，完成模仁洞內含有金屬層的PDMS軟性模仁。二種光罩都可用於一般的接觸式黃光微影製程，且都具有小線寬、製程簡單、成本低廉...等等的優點。其中，PDMS 軟模光罩的可撓性佳、且具優良的表面貼附性，因此非常適合應用於LED產業中圖案化藍寶石基板的大面積與量產製成。
目前本文成功地利用硬式石英光罩在藍寶石基板上製作線寬1 µm、週期2 µm 及光阻柱高度為1.3 µm 的六角最密堆積排列的結構；也成功利用PDMS軟模光罩於2吋藍寶石基板上製作線寬1 µm、週期2 µm 及光阻柱高度為1.4 µm 的六角最密堆積排列的結構，配合乾式蝕刻製作圖案化藍寶石基板。

This thesis develops a new type of metal-embedded photo-masks which can be used in standard photolithography and for fabricating patterned sapphire substrates. There are two kinds of metal-embedded photo-masks being investigated. First, a quartz-based metal-embedded photo-mask is prepared by metal contact printing lithography and metal lift-off process. Secondly, a metal-embedded PDMS photo-mask is obtained by directly peeling off the metal film deposited on the top surface of a PDMS mold, while leaving remaining metal patterns in the bottom surface. Both types of metal-embedded photo-masks can be used for conventional contact photolithography with the obvious advantage of small line-width, simple fabricating process, low cost. Furthermore, the soft PDMS photo-mask has excellent flexibility and conformability, which make it particularly suitable for large-area and industry-level manufacturing of patterned sapphire substrates in LED industries.
In this work, the metal-embedded photo-masks are applied to photolithographic patterning of photo-resist (PR) microstructures on top of sapphire substrates. By using the quartz photo-mask, hexagonal arrays of PR micro-pillars with a diameter around 1 m and a height of 1.3 m are achieved. For the soft PDMS photo-mask, hexagonal arrays of PR micro-pillars with a diameter around 1 m and a height of 1.4 m are successfully created on a 2 inch sapphire substrate. Subsequently, the pattern sapphire substrates (PSS) for LEDs can be readily obtained by applying ICP etching on this PR-patterned sapphire substrate.

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