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研究生：	蔣闊丞 Chiang, Kuo-Cheng
論文名稱：	以化學氣相沉積法(CVD)側向生長氧化鋅奈米線於氣體感測之研究 The Research of Lateral Growth of ZnO Nanowires with CVD for Gas Sensing
指導教授：	丁志明 Ting, Jyh-Ming
學位類別：	碩士 Master
系所名稱：	工學院 - 奈米科技暨微系統工程研究所 Institute of Nanotechnology and Microsystems Engineering
論文出版年：	2009
畢業學年度：	97
語文別：	中文
論文頁數：	116
中文關鍵詞：	氧化鋅奈米線、化學氣相沉積、側向生長、氣體感測器
外文關鍵詞：	laterally growth, ZnO nanowires, gas sensor, chemical vapor deposition
相關次數：	點閱：68 下載：5
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　　本研究是先利用平面式基板作為生長氧化鋅奈米線之基板，經由化學氣相沉積法(CVD)改變其中不同的製程參數，如氧氬氣體流量比、生長溫度、基板距離等以生長氧化鋅奈米線，並利用SEM、TEM、XRD及CL等分析，探討不同生長參數對生長氧化鋅奈米線之影響，藉以找出生長氧化鋅奈米線的最佳生長參數；接著，在利用黃光微影製程製作出微指叉式電極作為生長氧化鋅奈米線之基板，經由上述實驗所得到的最佳生長參數再做進一步實驗以改變不同的製程參數，如不同放置距離、位置及角度以達到側向生長大量的氧化鋅奈米線而構成架橋，並經由SEM觀察其微指叉式電極上之氧化鋅奈米線之架橋情形，進而完成感測元件。最後，在不同的操作溫度及乙醇氣體濃度的感測條件下，探討氧化鋅奈米線氣體感測器其感測特性和可靠度。
　　在本研究結果顯示，在爐管中生長氧化鋅奈米線具有一最佳位置，其位置具有足夠的鋅、氧成份鍵結形成氧化鋅以協助增加氧化鋅奈米線的長度及量，並成功的利用化學氣相沉積法在兩電極間側向生長氧化鋅奈米線構成架橋以形成氣體感測器，而其在操作溫度300℃、乙醇氣體濃度1500ppm時，感測度可達97%，且具有良好的靈敏度、穏定性及可靠度特性。

　　This research uses plane substrates as the one to grow ZnO nanowires and changes different process parameter -such as ratio of O2:Ar、growth temperature、substrate distance etc.- with CVD process to grow ZnO nanowires . Also, the analyses of SEM、TEM、XRD and CL are used to discuss how different growth parameter affect the growth of ZnO nanowires, and by that we can find the best growth parameter to grow ZnO nanowires. Subsequently, with photolithography，we make the folk electrode to be the substrate to grow ZnO nanowires, using the best growth parameter gained from above experiment to do further experiments to change different process parameter( such as distance, position and and angle ) to laterally grow a great number of ZnO nanowires and form a bridge. With SEM, how ZnO nanobridge on the folk electrode can be observed, then sensing device can be done. At last, under different conditions of work temperature and the concentration of ethanol gas, we will discuss the sensitivity and reproduction of the ZnO nanowires gas sensors.
The result of this research indicates that there is one best position for growing ZnO nanowires in furnace, where there are enough Zn and O2 forming ZnO to increase the volume and length of ZnO nanowires. And ZnO nanowires are successfully grown laterally between two electrodes to form a bridge and make a gas sensor. At work temperature of 300℃ and ethanol gas concentration of 1500ppm, the sensibility can reach 97%, and the gas sensor excels in sensitivity、stability and reproduction.

摘要 ................................................................................................................................................................ I
Abstract ......................................................................................................................................................... II
誌 謝 .......................................................................................................................................................... III
總目錄 .......................................................................................................................................................... IV
圖目錄 ....................................................................................................................................................... VIII
表目錄 ....................................................................................................................................................... XIII
第一章 緒論 ....................................................................................................................... 1
1-1. 前言 ................................................................................................................... 1
1-2. 研究動機與目的 ............................................................................................... 2
第二章 文獻回顧 ................................................................................................................ 3
2-1. 氣體感測器之種類 ........................................................................................... 3
2-1-1. 半導體型氣體感測器 ........................................................................... 3
2-1-2. 觸媒燃燒型氣體感測器 ....................................................................... 3
2-1-3. 電化學型氣體感測器 ........................................................................... 4
2-1-4. 場效電晶體型氣體感測器 ................................................................... 5
2-1-5. 石英振盪型氣體感測器 ....................................................................... 6
2-2. 半導體氣體感測器之工作原理 ....................................................................... 7
2-2-1. 蕭特基接觸 ........................................................................................... 7
2-2-2. 氧氣的吸附及待測氣體之作用 ........................................................... 9
2-2-3. 氧空位 ................................................................................................. 10
2-3. 半導體氣體感測材料之種類 ......................................................................... 12
2-4. 氣化鋅之特性及應用 ..................................................................................... 14
2-4-1. 光學性質 ............................................................................................. 16
2-4-2. 壓電性質 ............................................................................................. 16
2-4-3. 氣體感測性質 ..................................................................................... 17
2-5. 氧化鋅奈米線之成長方法 ............................................................................. 17
2-5-1. 化學氣相沉積法 ................................................................................. 18
2-5-2. 水熱法 ................................................................................................. 19
2-5-3. 模板法 ................................................................................................. 20
2-6. 氧化鋅奈米線之成長機制 ............................................................................. 21
2-6-1. 氣-液-固成長機制 .............................................................................. 21
2-6-2. 氣-固成長機制 .................................................................................... 22
2-6-3. 自結晶氣-液-固成長機制 .................................................................. 23
2-6-4. 氧化物輔助成長機制 ......................................................................... 24
2-7. 氧化鋅奈米線選區生長之方法 ..................................................................... 26
2-8. 氧化鋅奈米線側向生長之方法 ..................................................................... 28
第三章 實驗方法 .............................................................................................................. 31
3-1. 實驗設計與流程 ............................................................................................. 31
3-2. 實驗儀器設備 ................................................................................................. 33
3-3. 實驗材料及藥品 ............................................................................................. 33
3-4. 實驗基板之製備 ............................................................................................. 33
3-4-1. 平面式基板 ......................................................................................... 38
3-4-2. 微指叉式基板 ..................................................................................... 39
3-5. 化學氣相沉積法(CVD)生長氧化鋅奈米線 .................................................. 41
3-6. 試片表面形貌、元素與微結構分析 ............................................................. 45
3-6-1. 高解析掃描式電子顯微鏡(UR-SEM) ............................................... 45
3-6-2. X射線繞射分析(XRD) ....................................................................... 48
3-6-3. 穿透式電子顯微鏡(TEM) .................................................................. 51
3-6-4. 陰極射線激發放光光譜分析(CL) ..................................................... 52
3-7. 電性量測及氣體感測 ..................................................................................... 54
第四章 結果與討論 .......................................................................................................... 55
4-1. 於平面式基板生長氧化鋅奈米線 ................................................................. 55
4-1-1. 平面式基板上不同介質層對於生長氧化鋅奈米線之影響 ............. 55
4-1-2. 不同氧氬氣體流量比對於生長氧化鋅奈米線之影響 ..................... 59
4-1-3. 不同生長溫度對於生長氧化鋅奈米線之影響 ................................. 66
4-1-4. 不同基板距離對於生長氧化鋅奈米線之影響 ................................. 72
4-1-5. 生長氧化鋅奈米線之生長機制 ......................................................... 76
4-2. 於微指叉式電極基板生長氧化鋅奈米線 ..................................................... 78
4-2-1. 不同晶種層形貌對於生長氧化鋅奈米線之影響 ............................. 78
4-2-2. 不同的放置距離對於側向生長氧化鋅奈米線之影響 ..................... 81
4-2-3. 不同放置位置與角度對於側向生長氧化鋅奈米線之影響 ............. 84
4-3. 氧化鋅奈米線氣體感測器對乙醇氣體感測之特性分析 ............................. 91
4-3-1. 不同操作溫度對感測度之影響 ......................................................... 92
4-3-2. 不同氣體濃度對感測度之影響 ......................................................... 98
4-3-3. 氣體感測器之可靠度測試 ............................................................... 103
第五章 結論 .................................................................................................................... 105
第六章 未來展望 ............................................................................................................ 106
第七章 參考文獻 ............................................................................................................ 107
                                    

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校外：2019-08-21公開

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