本文採用z切鈮酸鋰鈦擴散製程，以馬氏干涉儀架構作為強度調制器，並在其上直接製作一平面天線，免除往後在封裝時才加入感應天線，其體積過大以及可能會發生元件間接合強度不夠之情形；再透過良好的研磨拋光以及光纖直接耦合之封裝，來使插入損耗、驅動電壓、消光比達到實用化。使以鈮酸鋰製作光電電磁場感測器更具應用價值。

　In this thesis, the Ti diffusion process on Z-cut LiNbO3 was made and the Mach-Zehnder interferometer was applied to be the intensity modulator. The plane antenna was directly fabricated with the electrodes to suppress the volume and strengthen the connection between each part of the device. After being ground and polished well, the device was coupled with fiber directly to make the insertion loss, driven voltage, extinction ratio practical. Therefore the optical electric field sensor made by LiNbO3 can become more valuable in application.

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