本研究以物理氣相沉積法蒸鍍銅酞花青 (CuPc) 薄膜，藉由改變製備溫度及熱處理時間，來探討製備條件對薄膜的表面形態及結構的影響，再利用以吸脫附的模式探討其對二氧化氮氣體感測特性的影響。
　　實驗結果顯示，製備溫度為25℃的薄膜，表面形態為顆粒狀且晶粒的堆疊軸垂直於基板面；製備溫度在100℃以上時，薄膜的晶形呈彎曲線狀且堆疊軸平行於基板表面，當製備溫度提高，晶粒的尺寸會變大。XRD分析結果發現，在這些溫度範圍所製備的CuPc膜，其在2 = 6.86° 附近有一強的繞射峰出現，製備溫度愈高，結晶度會愈高，薄膜內部排列會更有規則性。
　　銅酞花青薄膜的氣體感測特性方面，製備溫度為100℃的穩定電流變化量為最大，顯示其有較大的靈敏度，利用吸脫附模式所得的吸脫附平衡常數也最大，此乃因為此膜具有較小的晶粒及有利於電子傳導位向的表面型態。製備溫度為100℃以上的薄膜因為晶粒變大，表面積變小導致吸附位置變少，感測靈敏度變小，吸脫附平衡常數也變小。製備溫度在25℃的薄膜，雖然晶粒小，薄膜表面積大，吸附位置多，但晶粒的位向不利於電子傳導，所以平衡常數比100℃所製備的薄膜小。
　　銅酞花青薄膜經過熱處理後，不論製備溫度為25℃或200℃，其結晶度皆會變大，但熱處理時間加長，結晶度並沒有變大。經過熱處理後的薄膜表面型態會變的較為平整，所以進行氣體感測的電流變化量 (I) 皆會變小。

　　Copper phthalocyanine was vacuum deposition onto gold electrode. The effects of substrate temperature and post-deposition annealing on the film morphology and crystalline structure were studied. The film characteristics were related to their sensing propertied to NO2.
　　The results show that the CuPc films which deposition at low substrate temperature (Td = 25℃) have fine-grain morphology and the stacking axis (b axis) of CuPc molecules is normal to the substrate. When Td is elevated to 100-200℃, fiber-like morphology was observed, with orientation mainly parallel to the substrate. XRD results shows that CuPc thin film have a diffraction peak at 2 = 6.86∘and the peak intensity increases with increasing substrate temperature.
　　The gas sensing properties shows that the fiber-like structure prepared at Td = 100℃ have the largest current change (sensitivity) value and highest adsorption-desorption equilibrium constant due to its higher highest electrical conductivity and large surface area.
　　After annealing time 2 hr of heat annealing at 200℃, the XRD peak intensity increases but a longer gives no effect to increase the peak intensity further. CuPc films have smoother morphology after heat annealing which lead to a smaller sensitivity.

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