本研究成功地在微放電加工機上分離標準件上的誤差源，以和方根法快速評估製程誤差之分佈與變動，接著建構創新的機台空間誤差模型，並已經實驗證實其可行性。
首先從辨識電極直徑的尺寸誤差與製程誤差變異研究結果得知，和方根法可分離兩者的尺寸與放電間隙變異，取得批次電極放電加工下的製程誤差。接著用於分離標準件之誤差，結果顯示製程誤差與機台位置誤差也可有效被分離及判認。而對於不同機台構型，本文提出一通用於三軸工具機之機台空間誤差模型，輸入標準件分離後的機台位置誤差結果，經由最小平方法運算機台誤差源，可求得空間誤差地圖。最後，本研究藉此研究步驟建立之空間位置誤差在加工機X-Y平面進行誤差補償。
由實際補償後結果得知，以標準件法分離誤差源後，以和方根法判認製程誤差與變異，再依機台空間誤差模型施行補償，加工誤差可由+/-20μm降低到+/-4μm。故本文所提出的研究方法為一有效且適用於精微製造系統之空間誤差補償技術。

This thesis in an attempt to estimate the spread of errors of the artifact, process errors and machine spatial errors is identified and compensated by using Root Sum Square (RSS) method and spatial error compensation model in micro-EDM process, respectively.
Given a batch of electrodes, a new RSS method is proposed in EDM to identify two sources of the errors: the dimensional variation of the electrodes and the process over-cut error and its variation.It is further shown that the machine position error can also be identified form the artifact. In addition, for different machine configurations, a general spatial error compensation model for three-axis machines is proposed to estimate machine spatial error .
The results of compensation were showed that the total error can be greatly reduced from +/-20μm to around +/-4μm. Therefore, this investigation provides an effective spatial error compensation technology suitable for Micro/Meso Manufacturing System.

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