本研究成功地利用微機電製程技術，設計並製作出一個整合氣壓式微流體元件及利用介電泳力操控細胞之細胞分離晶片，本晶片中具有微流體傳輸、細胞分類及篩選之功能。透過微流體元件將可使分離流程自動化，介電泳力可用於操控不同之細胞對象、並同時具有操作電壓低之優點，操控之細胞本身不需帶電且不會對細胞造成任何不可逆之傷害而產生胞解(Cell Lysis)。
　　在晶片製作部分，本研究利用微細加工方式，符合批次製造並免除耗時之製程，非常適合細胞晶片封裝。在玻璃基材上製作產生介電泳力之微電極陣列，並以彈性聚合物聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)製作微管道及薄膜結構，藉由施加壓縮氣體致使薄膜致動。本研究中微氣動閥門（Micro-pneumatic Valve）可阻絕微流體之流動，提高細胞分離效率避免交互污染問題，而藉由控制電路造成S型蠕動式微幫浦(S-shape Pneumatic Micropump)作動，驅使微流體樣本之傳輸。最後，本研究導入人類肺癌細胞株(Human Lung Carcinoma Cells)做為測試，藉由本研究之細胞分離晶片成功地將活、死細胞分離，並經由測試得到活細胞之分離效能為84%、死細胞之分離效能為81%。

　This study reports a new biochip for cell separation and collection utilizing dielectrophoresis forces on micro-fluidic systems composing micro pneumatic pumps and valves. By using MEMS technology, micro devices could be integrated into the biochip to achieve the functions of cell transportation and sorting. With the advantages of low operation voltage, dielectrophoresis forces operated under a specific voltage and frequency could be used to manipulate cells without damaging cell samples.
　A fabrication process based on MEMS technology was developed in this study. Firstly, the dielectrophoresis electrode array was fabricated on glass substrates. Then micro flow channels, micropumps and microvalves made of PDMS (Polydimethylsiloxane) were bonded on the glass. Dielectrophoresis forces were applied on the cell samples by the electrode structures to achieve cell separation. By integrating the micro pneumatic pumps and valves, the samples with different kinds of cells could be transported in the micro channel, and moved to specific chambers after sorting by the dielectrophoresis electrode array. Experimental results showed that viable and non-viable cells (human lung cancer cell, A549) could be successfully separated and collected using the developed chip. The efficiencies of separation for the viable and non-viable cells are 84% and 81%, respectively.

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