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| 研究生： |
白忠勝 Pai, Chung-Sheng |
|---|---|
| 論文名稱： |
廢棄環氧樹脂固態封裝材料中二氧化矽之資源化研究 Recovery of Silicon Dioxide from Spent Epoxy Molding Compound |
| 指導教授： |
申永輝
Shen, Yun-Hwei |
| 學位類別： |
碩士 Master |
| 系所名稱： |
工學院 - 資源工程學系 Department of Resources Engineering |
| 論文出版年： | 2019 |
| 畢業學年度： | 107 |
| 語文別： | 中文 |
| 論文頁數： | 79 |
| 中文關鍵詞： | 環氧樹脂固態封裝材料 、壓模膠 、二氧化矽 、鹼浸漬 、鹼熔融 |
| 外文關鍵詞： | Spent epoxy molding compound, Silicon dioxide, Alkali leaching, Alkali fusion |
| 相關次數： | 點閱：159 下載：4 |
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IC封裝製程中會產生廢壓模膠，其主要成分為二氧化矽，其餘為環氧樹脂、硬化樹脂等有機物質，故資源化處理有限。本研究針對廢壓模膠中佔70wt%-90wt%之二氧化矽進行回收。透過樣品初步檢測其性質，再經過預處理試驗、鹼浸漬實驗、鹼熔融實驗、產物分析進行研究。
首先將廢壓模膠粉末破碎及球磨至微米級粉末，並進行SEM、XRD、XRF、TG-DTA、FTIR及LS等性質分析，作為後續實驗之參考依據。
預處理試驗中探討廢壓模膠回收之可行性，分別進行NMP浸漬、硫酸浸漬及熱處理等三種試驗，由於NMP及硫酸浸漬實驗其有機物分解率分別僅55.4%、36.7%，並且進行熱處理試驗時，透過SEM、FTIR、TG-DTA及廢棄物中灰分、可燃分測定等證明，若將廢壓模膠粉末以750℃進行熱處理，是能有效去除有機物質以利於後續之純化合成二氧化矽。
鹼浸漬實驗之最佳條件為取5g之經750℃焙燒的樣品加入7N氫氧化鈉溶液150ml即固液比(g/ml)1/30浸漬於90℃的恆溫水槽5小時，其二氧化矽萃取率為95.17%，純度為92.7%，又粉末粒徑之D50為47.55µm。
鹼熔融實驗之最佳條件為取5g之經750℃焙燒的樣品與氫氧化鈉固體以劑量比1/9混合攪拌均勻，置於鎳坩堝加蓋放入高溫爐，以500℃焙燒持續3小時，其萃取率達99.1%，純度為88.5%，又粉末粒徑之D50為41.61µm。
最後將產物進行分析發現，仍為非結晶型二氧化矽，且球形顆粒相互團聚，主要官能基為氫氧基及Si-O-Si。
In the IC packaging process, spent epoxy molding compound is produced. The main composition is silicon dioxide, and the rest are organic materials such as epoxy resin and hardening resin, and the recovery methods for it is limited at present. In this study, 70% to 90% by weight of silicon dioxide in the spent epoxy molding compound was recycled.
First, the spent epoxy molding compound was crushed and ball-milled to a micron-sized powder, and then analyzed by SEM, XRD, XRF, TG-DTA, FTIR and LS, as a reference for subsequent experiments.
In the pretreatment process, the decomposition rate of organic matter in NMP and sulfuric acid leaching experiment was only 55.4% and 36.7%, respectively. If the spent epoxy molding compound is heat-treated at 750°C, the organic substances was effectively removed and facilitate the subsequent purification and synthesis of silicon dioxide process.
Under optimal conditions, the alkali leaching experiment resulted in a silicon dioxide extraction rate of 95.17%, and purity of 92.7%. The alkali fusion experiment obtained a silicon dioxide extraction rate of 99.1%, and a purity of 88.5%.
Finally, the obtained product was analyzed and found to be amorphous silicon dioxide. The spherical particles agglomerated with each other in this product, and the main functional groups on surface were hydroxyl group and Si-O-Si.
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校內：2022-11-21公開校外：2022-11-21公開