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研究生: 李京桓
Li, Ching-Huan
論文名稱: 添加金屬硝酸鹽於奈米氮化矽粉末製備氧氮化矽基陶瓷之製程及微結構研究
Investigation of process and microstructure of silicon oxynitride based ceramics prepared by nano-sized silicon nitride powders and metal nitrate salts
指導教授: 黃肇瑞
Hwang, Jow-Lay
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 96
中文關鍵詞: 燒結奈米氮化矽金屬硝酸鹽
外文關鍵詞: nitrate salt, nano, O’-SiAlON, silicon nitride, sintering
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  •   O’-SiAlON具有優異的抗氧化及耐熱震性質,一般以氮化矽粉末及相關化學組成之添加劑為起始原料,經由無壓或熱壓燒結而形成。本研究使用奈米氮化矽粉末作為基材,以硝酸鋁及硝酸釔作為助燒結劑的起始原料,在液相燒結機制下,應用奈米粉末的高反應特性,製備單一相陶瓷。

      硝酸鋁及硝酸釔等無機鹽類與奈米氮化矽混合後,將會物理性或化學性吸附在粉末顆粒上,形成一層鍍層。經過煆燒處理後,此無機鹽類會分解,形成氧化物的化合物,且均勻地分佈於奈米氮化矽粉末上,有助於燒結體的緻密化。

      在本研究中,分別以無壓與熱壓燒結法探討燒結體的反應路徑與緻密化過程。無壓燒結的結果顯示,於1400℃氮化矽、氧化矽及氧化鋁反應生成單一相Al0.04Si1.96N1.96O1.04 (O’-SiAlON),開始反應溫度較一般以微米尺寸氮化矽為起始原料的製程降低約100℃,且由於助燒結劑分佈均勻,使得反應相當完全,在高溫下沒有第二相的生成。

      應用熱壓燒結法製備的燒結體,與無壓燒結法的試片有不同的反應路徑。於1500℃,熱壓燒結的試片會有中間相Si6AlO6N5的產生,其主要原因是熱壓過程中所施加單軸的機械壓力,使得奈米氮化矽粉體更易溶解於Y-Si-Al-O共晶液相中,造成共晶液相成分改變,析出Si6AlO6N5結晶相,且共晶液相量減少,降低緻密化速率。在更高溫度下(約1700℃),Y-Si-Al-O-N共晶液相生成,使得燒結體的緻密程度增加,並且生成Al0.04Si1.96N1.96O1.04。

      Dense O’-SiAlON ceramic, with excellent resistance to oxidation and thermal shock, are produced by pressureless sintering or hot-pressing of nano-sized silicon nitride powders with additives. The silicon nitride nano powders with aluminum and yttrium nitrate salts, exhibit special properties, such as high reactivity during liquid phase sintering and form monolithic ceramics O’-SiAlON.

      The nitrate salts, Al(NO3)3․9H2O and Y(NO3)3․6H2O, were used as the precursor for sintering aids and would physically or chemically absorbed onto the surface of silicon nitride nano-powders, forming a coated layer. Further by calcination at high temperature, the nitrate salts would decompose, transform to oxide compound and result in homogeneous distribution.

      In this study, pressureless and hot-pressing technique was used for preparation of O’-SiAlON. The results of pressure-less sintering showed that silicon nitride react with silicon oxide and aluminum and form monolithic Al0.04Si1.96N1.96O1.04 (O’-SiAlON) at 1400℃. Further, as the sintering aids is distributed homogeneously, there is no second phase in the matrix.

      The reaction pathway of hot-pressing is different from pressureless sintering. At 1500℃, the intermediate phase of Si6AlO6N5 was formed which is like spherical. The main reason is that due to the mechanical pressure the nano-sized silicon nitride powders easily dissolved into Y-Si-Al-O liquid. The composition of liquid phase changed and the Si6AlO6N5 is precipitated. The Y-Si-Al-O liquid was drastically reduced in amount. The rate of densification was reduced, too. At higher temperature (about 1700℃), the glass of Y-Si-Al-O-N system was formed which help for the formation of dense bulk of Al0.04Si1.96N1.96O1.04. It was column-like in shape.

    中文摘要 I 英文摘要 III 致謝 V 總目錄 VI 圖目錄 VIII 表目錄 XII 第一章 前言 1 第二章 理論基礎與文獻回顧 6 2-1 O’-SiAlON簡介 6 2-2 奈米非晶氮化矽 9 2-2-1奈米非晶氮化矽的製備 9 2-2-2奈米非晶氮化矽的結構 9 2-2-3 奈米非晶氮化矽的熱學性質 11 2-3 助燒結劑的選擇 16 2-3-1 氮化矽常用的助燒結劑 16 2-3-2 金屬硝酸鹽前驅物 16 2-4 氮化矽的燒結機制 19 2-4-1 液相燒結驅動力 19 2-4-2 液相燒結機構 23 第三章 實驗步驟與方法 41 3-1 起始原料及其物性 41 3-1-1 氮化矽奈米粉末 41 3-1-2 助燒結劑 41 3-2 混合粉末的製備與燒結 44 3-2-1起始粉末的製備 44 3-2-2 生胚的製備 44 3-2-3 試樣的燒結 44 3-2-4 燒結體密度量測 45 3-3 微結構的觀察及分析 46 3-3-1 熱重熱流分析 46 3-3-2 晶相分析 46 3-3-3 FTIR分析 46 3-3-4 TEM觀察 47 3-3-5 SEM觀察 47 第四章 結果與討論 48 4-1 粉體的製備與分析 48 4-1-1 奈米氮化矽粉末 48 4-1-2 助燒結劑 53 4-1-3 混合粉末 60 4-2 燒結體的分析與性質 69 4-2-1 無壓燒結體 69 4-2-2 熱壓燒結體 77 第五章 結論 87 第六章 參考文獻 89 作者簡歷 96

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