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研究生: 郭學儒
Guo, Xue-Ru
論文名稱: 覆晶封裝成型底部填充流動行為研究
Study of the flow behaviors for molded underfill in flip chip packaging
指導教授: 楊文彬
Young, Wen-Bin
學位類別: 碩士
Master
系所名稱: 工學院 - 航空太空工程學系
Department of Aeronautics & Astronautics
論文出版年: 2014
畢業學年度: 102
語文別: 中文
論文頁數: 93
中文關鍵詞: 覆晶封裝封包成型底部填充真空度
外文關鍵詞: Flip Chip Package, Void, Molded underfill, vacuum
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  • 近年來電子產品整合諸多功能性於一身,使得電子產品晶片所需的腳接數增加。覆晶封裝是將佈值於晶片上的錫鉛隆點直接連接於基板上,因為晶片與基板熱膨脹係數的不同,隆點會受到熱應力變化造成剝落毀損。為了增加錫鉛隆點的可靠度,需在晶片與基板之間封膠,調和熱膨脹係數的差異。傳統覆晶封裝需使用兩個步驟,第一步驟使用毛細力將底部封膠充填入晶片與基板之間的空隙,第二步驟使用模封材料進行包覆成型封裝。有別於傳統的覆晶封裝,成型底部填充(MUF) 概念是使用單一步驟來達到底部充填與包覆成型的效果,使得封裝過程能更簡單且更快速。但隨著晶片與基板的空隙逐漸縮小,導致晶片上下方前流不平衡容易造成封包效應的不良產品。在本研究中,我們以數值模擬的方式,模擬不同幾何參數對於填充前流的流場變化。接著以實驗的方式,探討模腔內不同環境參數對於封包的影響,最後找出封裝成功的重要參數。

    In recent years, the chip of electronic products asks for more and more I/O ports due to the integration of many functions in one single chip. Flip chip process implants solder bumps on the chip surface and those bumps are directly connected to the substrate. Due to the mismatch of the coefficients of thermal expansion (CTE) between chip and substrate, solder bumps will be subjected to thermal stress in service and that causes damage and delamination. In order to increase the reliability of solder bumps, epoxy molding compound (EMC) is filled into the gap between chip and substrate, to reconcile differences in the thermal expansion coefficients. Traditional flip chip packaging uses a two-step approach. The first step uses the capillary force to fill the gap between chip and substrate, and the second step uses EMC to over mold the package. Unlike traditional flip chip packaging, molded underfill (MUF) concept uses a single step approach to achieve both underfill and over mold at the same time, resulting in a simpler and faster process. In the study, we construct a numerical simulation model to simulate the melt front movement and void formation for different geometric parameters. Then we performed molding experiments to confer the effect on void formation for different environmental parameters in the cavity.

    中文摘要 I SUMMARY II INTRODUCTION II METHODS III RESULTS AND DISCUSSION III CONCLUSION IV 致謝 VI 表目錄 XI 圖目錄 XIII 第一章 緒論 1 1-1前言 1 1-2覆晶封裝介紹 3 1-2-1成型底部填充(MUF) 6 1-3文獻回顧 7 1-4研究動機與方法 9 第二章 理論分析 10 2-1成型底部填充膠流動理論分析 10 2-1-1達西定律 11 2-1-2膠材流動速度及滲透係數 11 2-1-3孔隙率 19 2-2膠材特性 20 2-2-1膠材黏度變化 21 2-2-2膠材硬化反應 22 2-3量測原理 24 2-3-1 表面張力 25 2-3-2 Beta 26 2-3-3波以耳定律 26 第三章 數值疊代模擬 28 3-1模擬流程 29 3-2封包效應 30 3-3基本模擬參數設定 32 3-4模擬假設 33 第四章實驗設備與製程規劃 35 4-1晶片與基板接合 35 4-2模腔設計與製作 36 4-3實驗平台製作 38 4-4真空調壓閥 39 4-5真空幫浦 41 4-6高壓氮氣瓶 42 4-7不同膠材特性測量 43 4-7-1膠材密度測量 43 4-7-2膠材黏度測量 44 4-7-3膠材表面張力測量 46 4-8實驗流程 48 4-9實驗數據影像處理 50 第五章結果與討論 51 5-1成型底部封裝實驗與數值模擬之吻合 51 5-2數值疊代模擬 53 5-2-1初始模擬 53 5-2-2晶片間距變化 55 5-2-3封裝邊到晶片邊的距離變化 58 5-2-4晶片形狀改變 61 5-2-5晶片位置變化 63 5-2-6晶片上下方厚度改變與晶片厚度比較 64 5-2-7晶片兩旁放置EMC固態膠條 67 5-3成型底部填充實驗 71 5-3-1真空度影響 72 5-3-2加壓影響 75 5-3-3膠材特性影響 81 第六章 結論與建議 89 6-1結論 89 6-2建議 90 參考文獻 92

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