本論文主要是射頻金氧半場效電晶體之參數萃取與模型的建立，以及對元件特性在射頻應用上之分析。並將該模型實際應用於電路設計上，以驗該模型之可行性。所有射頻金氧半場效電晶體均採用0.18umCMOS 製程技術。De-embedded 技術首先必須被使用以得到正確的量測結果。為了讓電晶體元件更容易應用在射頻電路設計上，我們需要一個既準確又有權威的射頻金氧半場效電晶體模型。BSIM3 模型被證明能符合此要求，因為它能正確地描述射頻金氧半場效電晶體元件並予以數量化。此外，BSIM4 模型改良了BSIM3 模型的缺點與不足亦能達到此要求。
在論文中，BSIM3 模型和BSIM4 模型分別被驗證於直流與射頻特性，並且兩個模型對量測與模擬的結果均有很不錯的吻合程度。此外，對BSIM3模型和BSIM4 模型的雜訊特性也做了分析與檢驗，其模擬結果也與量測結果大致吻合。最後，設計一個符合IEEE802.11a 規格的5.2GHz 低雜訊放大器以證明所建立的模型之可行性與實用性。並且，對模擬結果做分析與討論。

This thesis focuses on the extraction of MOS transistor modeling for RF integrated circuit design and reveals critical characteristics for RF application. Circuit verification had also done. The devices fabricated by 0.18um CMOS technology must be measured precisely using advanced de-embedding techniques first. To facilitate the device applications in the RFIC design, an accurate and powerful MOSFET model is required. The BSIM3 model is a good candidate, having demonstrated accuracy and scalability in the devices characteristics. Besides, BSIM4, as the extension of BSIM3 model, has some major improvements and additions over BSIM3. Comparison between the
BSIM3 model and BIM4 model have been analyzed and discussed. During the procedure of extracting model parameters, the BSIM3 model and BSIM4 model were adopted respectively. The simulation results from DC / RF model show the great agreement with the measured results. Moreover, the noise characteristics of the BSIM3 model and BSIM4 model have been checked and analyzed. Final, a 5.2G low noise amplifier (LNA) conformed IEEE802.11a specification will be designed and the simulation results prove the application of this model for REIC designs. Also, simulated results of LNA is analyzed and discussed.

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