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研究生: 呂順清
Liu, Shuen-Chin
論文名稱: 以MOCVD及碳化處理製備碳化鉻/氧化鋁奈米複合陶瓷之研究
Investigation of Chromium Carbide/Alumina Nanocomposites Prepared by MOCVD and Carbonization
指導教授: 黃肇瑞
Huang, Jow-Lay
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 109
中文關鍵詞: 碳化鉻氧化鋁流體床有機金屬化學氣相沉積法奈米複合材料
外文關鍵詞: Fluidized bed, Nanocomposites, MOCVD, Alumina, Chromium carbide
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  • 本研究是利用有機金屬化學氣相沉積法(MOCVD)與流體床技術(Fluidized Bed),製備Cr2O3/Al2O3奈米複合粉體,並配合後續的碳化處理,將奈米複合粉體變成Cr3C2/Al2O3奈米粉體後,以熱壓燒結製備出碳化鉻/氧化鋁奈米複合陶瓷。並研究奈米複合陶瓷的相、微結構以及機械性質。

    實驗結果顯示,在流體化溫度為300℃所製備出的奈米複合粉體,其披覆第二相經由成分分析發現主相為一非晶質的氧化鉻外,粉體中尚有自由基碳和介穩態之CrC1-X的存在。其粉體的表面型態可分為兩類:一為粒徑較小且呈現散霧狀分布的披覆相,另一則是粒徑較大呈現島狀的披覆相。另外,氧化鉻與碳化鉻的轉換反應,深受反應物碳活性和氧分壓的影響,本實驗利用氫氣/甲烷混合氣體於800℃持溫4小時碳化氧化鉻,因低溫800℃下甲烷與氧化鉻即可反應產生碳化鉻,且藉由氫氣還原氣氛有助於碳化反應的發生,並使已反應的碳化鉻不再被氧化。

    於真空熱壓1400℃持溫1小時之Cr3C2/Al2O3奈米複合陶瓷的強度、硬度與韌性均較單質氧化鋁有所提升。微結構顯示第二相粒徑大小約50~300nm不等,當中奈米第二相和團聚的第二相大多分布在氧化鋁的晶界上,和少部分第二相分布於晶粒內。機械性質中,強度因第二相碳化鉻的添加可提升至490MPa,其強化機制有晶粒細化、殘留應力、和沿晶轉沿、穿晶混合模式的破壞等強化機制,韌性方面則是提升至3.6 MPa.m1/2,其韌化機制則是裂縫偏折、裂縫分支與差排效應等韌化機制。

    The metal-organic chemical vapor deposition (MOCVD) conducted in a fluidized bed has been employed for the preparation of chromium oxide/alumina nanocomposite powder. The chromium carbide (Cr3C2) / alumina (Al2O3) nanocomposite powder was successfully obtained after carbonizing the chromium oxide/alumina nanocomposite powder. The carbonized nanocomposite powder was sintered by hot-pressing at 1400℃ in vacuum. The phases, microstructures and mechanical properties of nanocomposite bulk were discussed in this study.

    During the MOCVD process, the amorphous Cr2O3 was deposited on the Al2O3 powder by pyrolysis of Chromium Carbonyl (Cr(CO)6) at 300℃. Besides, there were also little free carbon and metastable CrC1-x on the Al2O3.The form of amorphous Cr2O3 can be divided into fog-like type and island-like type.

    The conversion of chromium oxide to chromium carbide was closely influenced by the activity of carbon and oxygen partial pressure. The chromium oxide was carbonized with mixture gas of CH4-H2 at 800℃ for 4 hours. The hydrogen atmosphere facilitated the rate of carbonization and prevented re-oxidation of chromium carbide.

    The hot-pressed Cr3C2/Al2O3 nanocomposites have better mechanical performances such as bending strength, fracture toughness and hardness than the monolithic Al2O3. The size distribution of Cr3C2 was from 50nm to 300nm. Most of Cr3C2 were mainly located on the Al2O3 grain boundary and some Cr3C2 existed within the Al2O3 grain. The fracture strength of nanocomposites increased from 375MPa to 490MPa with the mechanism of grain size reduction,residual stress and transgranular fracture. The toughness was improved from 3.0 MPa.m1/2 to 3.6 MPa.m1/2 by crack deflection、crack branching and dislocation effect.

    論文摘要……………………………………………………………………Ⅰ 英文摘要……………………………………………………………………Ⅲ 誌謝…………………………………………………………………………Ⅴ 總目錄………………………………………………………………………Ⅶ 圖目錄………………………………………………………………………Ⅹ 表目錄……………………………………………………………………ⅩⅣ 第一章 緒論 ………………………………………………………………1 1.1 前言………………………………………………………………1 1.2 研究目的與重點……………………………………………………2 第二章 理論基礎 …………………………………………………………4 2.1化學氣相沈積法及流體床技術……………………………………4 2.1.1 MOCVD 沉積機制 ………………………………………4 2.1.2 MOCVD製程中六羰鉻使用之探討………………………5 2.2鉻之碳化物…………………………………………………………8 2.3陶瓷基複合材料……………………………………………………9 2.3.1陶瓷基複合材料強化機制…………………………………9 2.3.2複合陶瓷之韌化機制………………………………………12 2.3.3奈米複合陶瓷………………………………………………13 2.4X光繞射法量測殘留應力…………………………………………19 第三章 實驗步驟…………………………………………………………24 3.1 實驗設計…………………………………………………………24 3.2實驗設備及合成複合粉體之製程…………………………………26 3.2.1 MOCVD與流體床之實驗設計……………………………26 3.2.2實驗材料……………………………………………………28 3.2.3流體化粉體之製程…………………………………………28 3.3複合粉體碳化處理之製程…………………………………………30 3.4複合材料之燒結製程………………………………………………30 3.5複合粉體之性質分析………………………………………………32 3.5.1複合粉體之相分析…………………………………………32 3.5.2複合粉體之ESCA成分分析………………………………32 3.5.3複合粉體之ICP-MS成分分析……………………………32 3.5.4複合粉體之表面型態之觀察………………………………34 3.6燒結體的物理性質測定……………………………………………34 3.6.1密度的測定…………………………………………………34 3.6.2 X光繞射分析………………………………………………35 3.7機械性質之量測……………………………………………………35 3.7.1楊氏係數之測定……………………………………………35 3.7.2彎曲強度的測定……………………………………………36 3.7.3表面維氏硬度測試…………………………………………37 3.7.4破壞韌性……………………………………………………37 3.7.5 X光表面殘留應力的量測…………………………………38 3.8燒結體之微結構觀察………………………………………………38 3.8.1場發射掃瞄式電子顯微鏡試樣之製作及觀察……………38 3.8.2穿透式電子顯微鏡試樣之製作及觀察……………………38 第四章 結果與討論………………………………………………………41 4.1流體化複合粉體……………………………………………………41 4.1.1相分析………………………………………………………41 4.1.2沉積物表面型態觀察………………………………………45 4.1.3球磨後之粉體………………………………………………48 4.2複合粉體之熱處理…………………………………………………50 4.2.1流體化複合粉體之碳化……………………………………50 4.2.2碳化複合粉體之氧化………………………………………59 4.3碳化鉻/氧化鋁奈米複合陶瓷之特性……………………………62 4.3.1相分析………………………………………………………62 4.3.2奈米複合陶瓷之密度與孔隙率……………………………65 4.3.3微結構觀察…………………………………………………69 4.4碳化鉻/氧化鋁奈米複合陶瓷之機械性質………………………75 4.4.1彎曲強度……………………………………………………75 4.4.2 硬度………………………………………………………89 4.4.3 破壞韌性…………………………………………………91 第五章 結論……………………………………………………………101 參考文獻…………………………………………………………………103 作者簡歷…………………………………………………………………109

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