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研究生: 詹時碩
Chan, Shih-Shuo
論文名稱: 膜系統優化再生市政污水回用半導體製程研究
Optimizing Reclamation of Municipal Sewage for Reuse in Semiconductor Processes using Membrane System
指導教授: 吳榮華
Wu, Jung-Hua
學位類別: 博士
Doctor
系所名稱: 工學院 - 資源工程學系
Department of Resources Engineering
論文出版年: 2022
畢業學年度: 110
語文別: 英文
論文頁數: 96
中文關鍵詞: 市政污水再生多級/多階逆滲透系統部份分流系統超濾半導體製程
外文關鍵詞: municipal sewage reclamation, boron, multi-stage/multi-pass RO system, split partial second pass, ultrafiltration, semiconductor industry
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  • 廢水再利用為日益增長的淡水資源需求提供了一種有前景的解決方案,通過逆滲透再生市政污水可用於多種用途,緩解水資源匱乏問題。本研究設置一個試驗廠,用以量測以纖維過濾與超濾程序對公共污水二級處理廠放流水進行預處理,並評估使用兩級/兩階逆滲透系統去除放流水中硼的效率和成本。
    採用雙膜工藝再生市政污水,本研究結果符合工業再利用的水質標準和水量需求。預處理產生的給水淤泥密度指數 (SDI15) 低於4.1,超濾程序平均濁度去除率為 99.2 %,後續經逆滲透產出之再生水導電度 (EC) 去除率為97.9 %。薄膜的結垢 (積垢) 通過反洗、化學增強清洗和在原架構清洗達到有效控制。同時測試了估計硼的替代方法並驗證部份分流(SPSP)系統。結果表明,本研究提出的迴歸方程式適用於特定濃度範圍使用導電度測量值作為預估硼濃度的替代,建議的迴歸方程式代表了污水處理操作維護的經驗法則。提議的 SPSP 系統通過操作條件進行了處理程序優化,具有成本效益和靈活的方式實現了64 % 的總水回收率及最大的硼去除率(超過85 %)。
    本研究顯示,所提出的雙膜系統提高污水再生工藝優化效能,並作為安全水回用三級處理的可行性、可靠性和經濟性,確認薄膜處理程序技術成熟,可全面實施永續的水回用。具體來說,兩級/兩階部份分流逆滲透處理結合高pH值,對去除硼提供了具成本效益的永續供水。通過“適合用途”處理回收的廢水為半導體行業製程用水的應用提供了機會。在假定淡水資源不變前提下,水資源回收設施放流水再利用潛力變得越來越具有競爭力。

    Wastewater reuse presents a promising solution to the growing need for the sustainable use of available water resources. The reclamation of municipal sewage through reverse osmosis can be applied for diverse uses to alleviate chronic water scarcity. This study constructed a pilot plant to measure the efficiency and costs associated with pretreatment by fiber filtration and ultrafiltration of secondary effluent and evaluated the efficiency of boron removal from effluent at a water resource recovery facility (WRRF) using a two-stage/two-pass RO membrane system.
    The results of this dual-membrane process meet the quantity and quality standards for industrial reuse. Pretreatment produced feed water with Silt Density Index (SDI15) lower than 4.1 and average turbidity removal rates of 42.7 % (fiber filtration) and 99.2 % (ultrafiltration). Following reverse osmosis, 97.9 % rejection of electrical conductivity (EC) was achieved in the reclaimed water. Fouling of the membranes was controlled through the application of intensive backwash, chemically enhanced backflushing, and cleaning in place. Simultaneously, we tested our approach to boron estimation and the proposed split partial second pass (SPSP) system. Results showed at a specific area, the proposed regression equation enables to use measurements of EC as a proxy for boron concentration. The proposed regression equation represents a rule of thumb for wastewater plant operators. The proposed SPSP system was optimized through manipulation of operating conditions, achieving a promising total water recovery of 64 % at maximum boron rejection (over 85 % removal) in a manner that was both cost-effective and flexible.
    This study demonstrates that the proposed system improves the feasibility, reliability, and economy of the dual-membrane process as a tertiary treatment for safe water reuse, thereby demonstrating that this technology has reached maturity for the full-scale implementation of sustainable water reuse. Specifically, we demonstrate that two-stage/ two-pass split-partial permeate treatment combined with a high pH for boron removal offers a cost-effective sustainable water supply. Wastewater reclaimed through ‘fit-for-purpose’ treatment offers opportunities for application in the semiconductor industry. Since freshwater resources are assumed to be invariant, the reuse potential of WRRF effluents is likely to become increasingly competitive.

    Abstract I Acknowledgement III Table of Contents IV List of Tables VII List of Figures VIII Symbols and Abbreviations X Chapter 1 Introduction 1 1.1 Background 1 1.2 Problem statement 3 1.3 Research objectives 4 1.4 Dissertation organization and overview 5 1.5 Limitations 5 Chapter 2 Literature Review 6 2.1 Motivation to reclaim water 6 2.2 International approaches to municipal wastewater reclamation and reuse 8 2.3 Membrane treatment technology for municipal wastewater reclamation and reuse 10 2.4 RO membrane separation for removal of pollutants 12 2.5 Boron removal by RO membranes 14 2.6 Multi-stage and multi-pass RO system with split partial second pass 16 Chapter 3 Materials and Methods 19 3.1 Materials 19 3.1.1 Selected WRRF and water source 19 3.1.2 Layout and configuration of pilot plant 20 3.1.3 Membrane module and selection 24 3.1.4 Membrane cleaning, reagents, and chemicals 27 3.2 Experiment protocols and analytical methods 28 3.2.1 Experimental procedure 28 3.2.2 Sampling and laboratory analyses 31 3.2.3 Analytical methods 32 3.2.4 Regression analysis 33 Chapter 4 Results and Discussions 35 4.1 Characterization of WRRF effluent 35 4.2 Performance of the FF, UF, and RO units 38 4.2.1 Filter efficiency of selected FF unit 38 4.2.2 Filter efficiency of UF unit 41 4.2.3 Water quality performance of the RO unit 43 4.2.4 Optimization of operating conditions 47 4.3 Correlation between boron and conductivity in WRRF effluent 49 4.4 Optimization of multi-stage / multi-pass RO system (effect of pH on boron removal) 55 4.4.1 Boron removal at pH 10.0 56 4.4.2 Boron removal at pH 10.5 57 4.4.3 Removal of other pollutions 59 4.5 Performance of the Full Second-Pass RO and Partial Second-Pass RO 63 4.6 Cost issues 66 Chapter 5 Conclusions and Recommendations 69 5.1 Conclusions 69 5.1.1 Theoretical implications 70 5.1.2 Practical implications 70 5.2 Recommendations 72 References 73 Appendix A 91 Appendix B 96

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