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研究生： 曾雨平
Tseng, Yu-Ping
論文名稱： 利用長度調變法量測氧化鋅微米柱的光學增益頻譜
Measuring optical gain spectra of ZnO microrod by Variable Stripe Length method
指導教授： 徐旭政
Hsu, Hsu-Cheng
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年： 2019
畢業學年度： 107
語文別： 中文
論文頁數： 62
中文關鍵詞： 氧化鋅微米柱 、變激發長度法 、增益係數 、變溫增益係數
外文關鍵詞： ZnO microrod, Variable stripe length method, gain coefficient, gain coefficient of different temperature
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    • 氧化鋅其天生的寬能隙(3.37 eV)和在室溫下擁有較大的激子束縛能(60 meV)，且六角柱體的結構更是一個完美的耳語迴廊共振腔，使得光能夠在共振腔內來回反射並放大，因此氧化鋅成為近期作為近紫外光元件的新寵兒。而不論作為發光二極體、雷射半導體或是光偵測器，都與氧化鋅的增益係數有密切關係，但以往氧化鋅增益係數的量測大多都是以薄膜作為樣品，與常用來做元件的奈米線或是微米柱可能有所差異，因此我們選擇使用氧化鋅微米柱來進行增益係數的量測。
    量測使用的是廣泛使用在增益係數測量的變激發長度法，但採用的分析方式和過去不同，利用新的分析方法能夠看到波長範圍更大的增益係數，同時也能夠分析在不同激發長度下的增益係數。另外我們也嘗試改變溫度來觀察增益係數的變化情形，溫度由低溫上升到高溫的過程中，增益頻譜會往低能量的方向移動，同時增益係數的數值也會下降。

    As a direct wide bandgap (3.37 eV) semiconductor with a large exciton binding energy (60 meV) at room temperature, and the hexagonal shape can act as the great optical whispering gallery mode (WGM), which relies on total internal reflection, zinc oxide (ZnO) has a high potential for ultraviolet optoelectronic device, especially stimulated emission devices. Recently, ZnO micro-/nanostructures have been employed as not only natural WGM but Fabry–Pérot (FP) microcavity lasers. Here, the optical gain spectra were measured by a modified Variable Stripe Length (VSL) method. We found that the peak position of maximum gain changes with the excitation stripe length. The behind mechanism was discussed. Furthermore, the temperature dependent gain coefficient spectra measurements were performed. With increasing the temperature, the gain spectrum shifts to low energy side and the maximum of gain coefficient decreases.

    Contents 摘要 I Abstract II 致謝 III Contents V List of Tables VII List of Figures VIII 1 Introduction 1 1-1 Preface 1 1-2 Motivation 10 2 Background theories 11 2-1 Characteristics of ZnO 11 2-2 The spontaneous emission of ZnO 13 2-2-1 Ultraviolet emission 13 2-2-2 Green emission 15 2-3 The stimulated emission of ZnO 16 2-3-1 Exciton-exciton scattering 17 2-3-2 Electron-hole plasma 18 3 Experiment process 19 3-1 Production of zinc oxide microrod 19 3-1-1 Chemical Vapor Deposition method 19 3-1-2 Substrate cleaning 20 3-1-3 The growth of ZnO microrods 21 3.2 Sample analysis 23 3-2-1 Field emission scanning electron microscopy 23 3-2-2 Micro photoluminescence measurement 24 3-3 Gain coefficient measurement 26 3-3-1 Variable stripe length (VSL) method 26 3-3-2 Temperature controlled VSL method 28 4 Results and Discussion 30 4-1 Characteristics of Zinc Oxide Microrods 30 4-1-1 Structure of the ZnO MR 30 4-1-2 Optical properties of ZnO MRs 30 4-2 Analysis of the Optical Gain 34 4-2-1 Edge emission PL spectra of ZnO MR 34 4-2-2 Optical gain of ZnO MRs 39 4-2-3 Thermal effects to the gain coefficients of ZnO MRs 48 5 Conclusion 57 6 Future work 58 7 References 59

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