線性位移平台在目前精密設備產業中扮演相當重要之角色，伴隨著對高精度設備需求不斷地增長，與對加工精度要求不斷地提昇，線性位移平台的檢測技術已經被視為量測設備開發的重要課題。
線性位移平台之多自由度誤差大多來自於組裝過程與元件品質。因此本研究以檢測多自由度誤差與平台組裝元件品質之技術為目標，開發具有高精度、高效率與低成本特性之檢測系統。
在多自由度誤差檢測方面，本研究主要針對線性位移平台運動時所產生之多自由度誤差，成功建構三套高精度之多自由度檢測系統，包括三自由度雷射光學尺系統、三自由度線性位移平台檢測系統與DVD讀頭雷射四自由度線性位移平台檢測系統。本研究提出之系統可應用於線性滑軌、三次元量床、工具機、高精密度X-Y平台等單軸運動的誤差檢測與分析。
在品質檢測方面，本研究主要針對線性位移平台關鍵元件之一的導螺桿，成功建構一套非接觸式導螺桿與螺帽之牙型檢測系統。此系統可導入生產流程中，並取代目前傳統接觸式檢測方式，具有立即、快速且準確測量的特性。
本研究所開發之檢測系統主要整合光學設計，電子訊號處理與數學模擬分析三方面技術，可應用於精密機械、光電產業及半導體產業等線性運動相關設備檢測，藉由本文之研究成果可提昇我國精密檢測之技術與設備研發之能力。

In recent years, the linear moving stage is a main part of the high precise equipment. Because of the increasing requirement of precise equipment and the improvement of the manufacturing precision, the research of measurement systems for linear moving stages has become a main task.
The errors of multi-degree-of-freedom for linear moving stages are always caused by the assembling process and component qualities. Thus, the researches based on the errors of multi-degree-of-freedom and on the measurement of component quality are developed at the objectives of high accuracy, high efficiency and low cost.
In the multi-degree-of-freedom measurement, the researches focus on measuring the multi-degree-of-freedom errors of the linear moving stage. The three measuring systems based on multi-degree-of-freedom errors measurement for the linear moving component have been proposed, such as (a) a three-degree-of-freedom laser linear encoder for error measurement of a high precision stage, (b) a high resolution three-degree-of-freedom motion error measuring system for a single-axis linear moving stage and (c) a DVD pickup-based four-degree-of-freedom motion error measuring system for a single-axis linear moving stage. The proposed systems can be applied for measuring linear motion errors of linear guideways, CMM, machine tools, high precision X-Y stage and etc. in the future.
In the quality measurement, the research is developed for measuring the quality of ballscrews which is one of the key components of linear moving stages, and a novel laser-based measuring system for the thread profile of ballscrews has been proposed. The proposed system can be applied for manufacturing process and for matching up the traditional contact method. The proposed system also exhibits some advantages, such as real-time, high-speed and high precision.
The proposed method based on optical design, signal process and mathematical analysis can be used not only for measuring the linear motion equipment of precision machines, electro-optical and semiconductor industry but also for improving the development ability for both the technology and the equipment of high precision measurement.

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