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研究生: 趙育毅
Chao, Yu-Yi
論文名稱: 聚焦式超聲波換能器應用於材料檢測
Focusing Acoustic Transducer for Material Evaluation
指導教授: 李永春
Lee, Yung-Chun
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2002
畢業學年度: 90
語文別: 中文
論文頁數: 83
中文關鍵詞: 波速頻散曲線非破壞性檢測超聲波換能器
外文關鍵詞: wave dispersion curves, acoustic transducer, non-destructive evaluation
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  • 摘要
    本論文將建立兩套非破壞性超音波檢測系統,一套是自動化的波速量測系統,另一套是超音波影像掃描系統,二套系統都是利用實驗室自製的PVDF超聲波探頭為基礎。其中,量測系統是應用於量測薄板試片的藍姆波波速與頻散曲線,而掃描系統是應用於檢測材料的缺陷、內部結構或IC封裝。
    本論文中,使用的PVDF壓電薄膜超聲波換能器分為三種:線聚焦式、點聚焦式和差動式聚焦超聲波換能器。線聚焦換能器和點聚焦換能器將應用於波速量測系統量測試片,以測試系統的性能、實驗準確性及最高可量測的頻率範圍;點聚焦換能器和差動式聚焦換能器則應用於超音波影像掃描系統,以檢測金屬裂縫與IC封裝的內部結構。
    由實驗量測結果證明,本論文所建立之波速量測系統具有良好的準確度與較高的頻率量測範圍,且其量測速度較先前實驗室的量測系統提升約十倍,因此可以正確而快速地量測薄板的藍姆波頻散曲線;在掃描系統方面,本論文驗證了自製之PVDF點聚焦換能器可應用於超聲波C-Scan的材料缺陷檢測與IC掃描;另外,本論文嘗試發展一種新型式的PVDF超聲波探頭-差動式探頭,初步的實驗結果證明其概念是可行的,但仍有待進一步提升其性能。

    Abstract

    This thesis reports two different ultrasonic systems for non-destructive evaluation. One is an acoustic wave velocity measurement system for measuring Lamb wave velocities and dispersion curves; the other is an ultrasonic image scanning system for detecting defects and for scanning IC packages. Both systems are based on laboratory-made PVDF focusing acoustic transducers.
    In the work, three kinds of PVDF acoustic transducers are prepared, namely, line-focused, point-focused, and differential-focused acoustic transducers. The line-focused transducer and point-focused transducer are used in the measurement system, which will be experimentally tested to characterize its measurement precision and highest measurement frequency range. The point-focused transducer and differential-focused transducer are used in ultrasonic image scanning system for acoustic imaging of detects inside materials and IC packages.
    Experimental results show that the wave velocity measurement system can obtain accurate Lamb wave dispersion curves with a much wider working frequency range and a much faster measurement speed. The available frequency range for this new measurement system is double now and the measurement speed is ten times faster than previous measurement setup. In scanning system, the experimental results prove that the laboratory-made PVDF point-focused transducer can be used for ultrasonic C-Scan and for detecting flaw in materials or IC package. Finally, a new kind of ultrasonic transducer, differential PVDF ultrasonic transducer, is developed and tested. Preliminary results show the feasibility of using this new transducer for ultrasonic inspection. However, some effort is needed to improve its performance.

    目錄 摘要………………………………………………………………………Ⅰ 英文摘要…………………………………………………………………Ⅱ 致謝………………………………………………………………………Ⅳ 目錄………………………………………………………………………Ⅴ 圖目錄……………………………………………………………………Ⅸ 表目錄……………………………………………………………………XIV 符號說明…………………………………………………………………XV 第一章 導論…………………………………………………………1 1-1 研究背景與目的………………………………………………1 1-2 本文架構…………………………………………………………2 第二章 系統架構……………………………………………………4 2-1 系統簡介…………………………………………………………4 2-1-1 超音波影像掃描系統簡介………………………………4 2-1-2 波速量測系統簡介………………………………………5 2-2 硬體設備………………………………………………………6 2-2-1 STR*8100D訊號擷取卡…………………………………6 2-2-2 STR*81G訊號擷取卡……………………………………7 2-2-3 MC8041A運動控制卡……………………………………9 2-2-4 C-842.40運動控制卡……………………………………10 2-2-5 脈衝產生接收器…………………………………………10 2-2-6 線性平台…………………………………………………12 2-2-7 系統實驗設備完整架設圖………………………………13 2-3 視窗介面程式…………………………………………………14 2-3-1 視窗介面程式架構………………………………………14 2-3-2 掃描介面程式功能………………………………………16 2-3-3 波速量測介面程式功能…………………………………21 第三章 線聚焦式超聲波換能器應用於波速量測系統……………24 3-1 線聚焦式超聲波換能器的特性……………………………24 3-2 線聚焦式超聲波換能器的製作與測試……………………25 3-2-1 線聚焦式超聲波換能器的製作過程…………………25 3-2-2 線聚焦式超聲波換能器的測試結果…………………27 3-3 波速量測系統設備…………………………………………33 3-4 實驗量測方面…………………………………………………34 3-4-1 實驗量測方法……………………………………………34 3-4-2 實驗量測結果……………………………………………35 第四章 點聚焦式超聲波換能器之製作與應用……………………41 4-1 點聚焦式超聲波換能器的特性……………………………41 4-2 點聚焦式超聲波換能器的製作過程與測試結果……………42 4-2-1 點聚焦式超聲波換能器的製作過程……………………42 4-2-2 點聚焦式超聲波換能器的測試結果……………………44 4-3 超音波檢測方式與影像掃描原理……………………………49 4-3-1 超音波檢測方式…………………………………………49 4-3-2 超音波影像掃描原理……………………………………51 4-3-3 超音波掃描系統的性能…………………………………54 4-4 點聚焦式超聲波換能器的應用………………………………58 4-4-1 小型試件與金屬材料裂縫的檢測………………………58 4-4-2 IC封裝的檢測…………………………………………60 4-4-3 應用於藍姆波波速量測…………………………………65 第五章 差動式聚焦超聲波換能器之製作、測試與應用……………67 5-1 差動式聚焦超聲波換能器的設計原理…………………………67 5-2 差動式聚焦超聲波換能器系統架構……………………………69 5-3 差動式聚焦超聲波換能器的製作過程…………………………73 5-4 差動式超聲波聚焦換能器的實驗結果…………………………76 第六章 結論與未來展望………………………………………………79 6-1 結論………………………………………………………………79 6-2 未來展望…………………………………………………………80 參考文獻…………………………………………………………………82

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