光觸媒因具有強烈氧化分解反應與超親水現象，素為人所重視，若將光觸媒大面積塗佈在窗材玻璃上，則反應面積將大幅提高，污染物或有害氣體能更有效率的被分解，且藉超親水現象也使玻璃能永保潔淨。但若要應用於室內窗材，則必需開發可見光適用型光觸媒。為得到均勻且摻雜離子以降低能帶間隙的光催化薄膜，本研究以真空射頻磁控式電漿鍍膜法輔以金屬鎢線共濺鍍，製備比例不等之氧化鎢摻雜於二氧化鈦薄膜，探討鍍膜層數的改變、熱處理改變結晶相及摻入氧化鎢對薄膜的光學與光觸媒特性之影響。在操作條件方面，本研究將最高真空壓力、操作壓力、氬氣氧氣流量比及基板偏軸旋轉速率固定參數值，以鍍膜功率與鍍膜時間及薄膜膜厚為實驗變數。
實驗結果顯示以150W的功率，與1 vol.%鎢共濺鍍120分鐘，濺鍍速率為1.25nm/min之二氧化鈦複合膜具有光觸媒分解甲基藍之特性及超親水性，尤其經350~400度的熱處理後，部分結晶成銳鈦礦型TiO2，光催化活性增強。為改善二氧化鈦薄膜一段時間不照光，表面會呈疏水性，實驗出鎢的摻雜可讓初始和最終的接觸角降低，且親水狀態也能保持更長的時間。預鍍SiO2可阻隔光觸媒與基材間的使複合膜的結構不因加熱的反應而被破壞，也不影響薄膜的透明度。

Photocatalyst has received much attention for strongly redox reaction and superhydrophile. The window glass coated with photocatalyst can increase the action area and reduce the pollutant to maintain a clean surface. For applying to indoor enviroment, it must be develop the visible radiation absorption efficiency. The preparation of nano-sized TiO2-WO3 composite thin film coated by radio-frequency magnetron sputtering has been studied. The control factors of this research include time and voltage of sputtering, the ratio between TiO2 and WO3 target material
. Later on an annealing treatment will be applied on TiO2/WO3 composite film to convert the armorphous phase of TiO2 to crystalline. Finally this film will be examined by spectrum analysis and scanning electron microscope. Hydrophilic property and decomposition ability will be examined too.
The results given above clearly demonstrate that the preparation of nano-sized TiO2 films doped WO3 can be formed via condition of 150W 120minutes, 1.25nm/min of sputer rate, and 1 vol.% tungsten co-sputtering, then a significant photocatalytic rate enhancement and photo-generated superhydrophilic phenomenon is observed. After annealing at 350℃, anatase phase identified in TiO2 thin film; the grain size of TiO2-WO3 grew up a little. The pre-sputtering layer of SiO2 can disconnect the surface reaction between glass substrate and TiO2-WO3 photocatalyst and avoide decrease of component transmittances.

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