奈米壓印與轉印技術的發明開啟了新的奈米圖形佈植技術，不同於傳統光學微影技術之處在於奈米壓印與轉印技術具備了低成本、高效率的奈米圖形轉移能力。基於此因，本論文研究如何利用紅外光源的加熱方式將模仁表面上的金屬圖案直接轉印至基板上，以完成奈米圖形的轉移與佈植，並建立一套連續、大面積且穩定的轉印製程。為達到前述目的，本文開發了數種不同的轉印製程；由最初的紅外光雷射輔助直接接觸轉印技術，至紅外光燈源輔助的接觸滾印技術；經由觀察製程的實驗結果進而改進製程技術；例如：加熱源的改變，由紅外光燈源取代了紅外光雷射；施力方式的改變，由平面施壓轉變為滾輪施壓；基板材料的改變，由硬式的矽基板轉變為具可撓性的PET基板；使得所開發的奈米轉印製程達到低成本、高效率及大面積的奈米圖形轉印能力。
除此之外，本文另外發展一種雙步驟接觸轉印技術，除了可以提昇模仁的再利用率外，也可以一次轉印出兩個具備高互補性的微奈米圖案，同時也減少了金屬薄膜殘餘在模仁上的清潔問題。
最後，本論文以紅外光雷射輔助直接接觸轉印技術與紅外光燈源輔助接觸滾印技術為基礎，製作出可撓式的偏光片以及具有規則排列的微奈米金屬粒子，並將此規則排列的金屬粒子應用於表面電漿子共振效應的研究上。本論文開發並驗證紅外光輔助接觸轉印技術為微奈米圖形轉移與製作微奈米結構元件的有效工具。

The inventions of nano-imprinting and nano-printing lithography create a new landmark for nano-patterning technology. The differences between conventional photolithography and nano-imprinting and nano-printing lithography are that nano-imprinting and nano-printing lithography have the advantages of low cost and high efficient in nano-patterns transfer process. For this reason, this dissertation investigates the nano-patterning technology which utilizes an infrared laser or an infrared lamp to heat up the metallic patterns and transfer the metallic patterns from the surface of a mold to a substrate. Furthermore, another objective of this study is to build up a stable and reliable process for continuous pattern transfer over large area.
To achieve the aforementioned objectives, we developed several techniques fort pattern transfer ranging from infrared laser assisted direct contact printing lithography (IR-LCP) to infrared lamp assisted roller contact printing lithography (IR-RCP). By observing their experimental results, we modify and improve these processes such as replacing an infrared pulse laser by an infrared lamp, a plane pressure by a line-shape loading force by a roller and a rigid Si substrate by a flexible polyethylene terephthalate (PET) substrate. These changes can achieve our objectives in nano-patterns transfer with low cost, high efficient, and large area.
In addition, a dual-step contact printing lithography is developed which can enhance the efficiency in the recycling of the used mold and reduce the residual metal films on the used mold. This technique utilizes a UV resin with both the properties of adhesion and UV curing to adhere the bottom metal layer. It can allow one single mold to transfer two highly complementary patterns to two different substrates separately and reduce the residual metal films on the used mold.
Finally, two applications on the fabrications of a flexible polarizer and the highly ordered metallic micro/nano-particles have been proposed in this dissertation based on IR-LCP and IR-RCP. The highly ordered metallic micro/nano-particles are applied to the research of surface plasmon resonance (SPR). Experimental results successfully demonstrate that the infrared assisted direct contact printing technologies are an effective tools for micro/nano-patterning and micro/nano-structure fabrication as well as related innovative devices.

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