本論文之目的為利用準分子雷射微細加工製作三維任意微結構。主要分為二個主軸，一是利用準分子雷射孔洞面積法，以雷射加工系統投射鏡產生的繞射現象為橋樑，結合半色調網點光罩的概念，達到加工任意曲面三維微結構之目的；二是利用準分子雙軸拖拉法，將所設計出的光罩，搭配馬達控制，加工雙面微透鏡陣列，並強調在形貌加工誤差量的精準度控制。
在孔洞面積加工法方面，首先進行光柵結構以及六角洞狀結構的光罩設計，並藉由光學成像理論中光學繞射現象的概念，進行相對光罩設計的光學模擬，得到在成像面上的光強分布，進而去探討其光罩圖形對雷射加工圖形定義能力的影響。接著利用孔洞面積階光罩法，使用一般的石英鍍鉻二元光罩，藉由光罩設計開孔變化分布的特性，使雷射投射在加工材料表面上的能量分布呈現三維連續變化，快速地製作出複雜的曲面三維微結構。
而雙面微透鏡陣列的製作上，先以Zemax光學軟體設計一聚光焦點具有接近其光學繞射極限性質的微透鏡曲面，且為了使得經準分子雙軸拖拉加工後，依然能達到軸對稱的效果，在此將Zemax模擬所得到的微透鏡曲面以數值演算法進行形貌上的優化，再以此優化的結果進行光罩的設計。接著對於雙面加工上的對準機制，我們以CCD影像整合操作系統，搭配移動平台的操作，藉此準確地控制雷射拖拉加工的位置與路徑。

This study applies excimer laser micromachining technology for manufacturing 3D microstructures. There are two subjects in this study, one is to investigate the optical diffraction phenomenon when using excimer laser with hole-area modulation method, and then using this method to achieve the purposes of manufacturing three-dimensional microstructures. The other one is to fabricate bi-convex microlens arrays using the counter mask design and laser dragging method. Excellent machined surface profile accuracy is achieved and the optical performance of these bi-convex microlens arrays is obtained.
First of all, two types of optical diffraction, namely linear grating structures and hexagonal hole-arrayed structures, in excimer laser micromachining are investigated both theoretically and experimentally. The Fourier optical diffraction theory is applied here to explain the experimentally machined microstructure profiles. The results are used for followed-up application is the hole-area modulation method for machining 3D microstructures.
Second, this thesis proposes and demonstrates a method for producing aspherical bi-convex microlens arrays with a focal spot size approaching the optical diffraction limit. This method uses a biaxial excimer laser dragging method. In the proposed method, ZEMAX simulations are performed to identify the optimal lens profiles. Simplex method is then performed to generate the contour mask required to ensure the axial symmetry of the lens profile following the laser dragging method. A CCD-operator monitoring system is applied to align and monitor the laser dragging processes ensure high machining accuracy. The machined profile accuracy as well as the optical performance of these bi-convex microlens arrays are experimentally verified.

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