半導體為高技術且高資本密集的產業，以半導體製造來說，在機台設備上裝設大量感測器，擷取機台運作時的各種製程數據，監測機台即時狀況。在機台設備過度損耗前即可得到預警，及時更換，以提高產品品質，也可以隨時掌握機台狀況，預先規劃保養時程，避免非預期當機而影響生產。而且精密自動化系統的規劃將會重大影響生產的成本以及效率，所以在製造過程中提供正確的製程參數、量測產品的缺陷以及追蹤缺陷的原因可有效防止晶圓良率損失的擴大。因此，近年來半導體廠商越來越重視機台狀態資料的收集，透過大量蒐集的即時機台偵測值，使工程人員能夠即時掌握機台狀況。品質的高低是半導體廠營收的關鍵因子，因此利用機台感應器蒐集能夠代表機台狀況的資料，能隨時掌握機台的狀況，進而避免機台異常造成半導體廠的重大損失。
本研究欲建立即時機台狀態監控系統，以某半導體機台SECS/GEM資料蒐集與量測系統擷取機台與產品的即時資料作分析，進而監控機台的即時狀況做為預防保養的依據，避免在機台狀況不佳時生產出品質不良的產品以及停機造成的大量損失。本研究以半導體產業之研磨製程為例，先利用馬氏-田口系統(Mahalanobis-Taguchi System；MTS)找出較能反映機台狀態的重要機台狀態特徵以減少分析時間與成本，再以移動變異數的技術消除機台內不同製程配方(Recipe)對偵測值所造成的影響，然後利用多變量管制圖MaxMEWMA來監控移動變異數，並且依據工程師人力以及異常警訊處理能力來動態調整警示界線，在機台可能有異常時發出警示，提供工程人員一個做預防保養的依據。本研究最後使用歷史之生產資料來驗證此模型，以正常資料作為參照點找出機台狀態之變異，然後定義兩個可調整之參數，再針對不同之廠內情況設計適合的警示界線。

This study proposes a real-time monitoring system for machine’s status based on Mahalanobis-Taguchi system (MTS), moving statistics, MaxMEWMA control charts and dynamic alert limits. First, we collect real-time data from numerous sensors of the SECS/GEM (SEMI Equipment Communication Standard/Generic Equipment Model) system to analyze the machine’s overall status, and then the developed system provides alerts for the engineers as the basis of the predictive maintenance if the machine is in an abnormal status.
We use the grinding process of semiconductor assembly as an example. First, to reduce time and cost for analysis, we utilize MTS to discover significant machine characteristics which can reflect the machine’s status. Secondly, we apply moving variance to remove the discrepancy between multiple recipes running on the same machine; as a result, we are able to use one MaxMEWMA control chart to monitor a machine. Finally, we adjust the alert limits dynamically based on the number of engineers and their availability for solving the abnormal alerts.
Using normal data as the reference to identify the variability of machine status, we provide empirical analysis for our model with historical production data. We then define two adjustable parameters and set the appropriate alert limits according to the availability of engineers to handle the problem machine.

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