本文分別使用嵌入式氣靜壓軸承之氣壓缸及圓形平面氣靜壓軸承建構出雙軸氣壓伺服平台，其應用為氣體軸承氣浮原理，期望藉由低摩擦來克服黏滯滑動現象並改善定位精度的穩定性。首先設計一摩擦力量測平台，並進行氣壓平台及氣壓缸量測，繪製摩擦力與速度之關係圖。本文使用雙模自調式模糊控制器配合閥軸無感區補償及緩衝補償，由實驗結果可知，在不同的定位情況下，定位精度均可達0.08μm以內，且穩定性相當高，並設計解耦合補償器，能有效克服系統在雙軸運動時所發生的耦合現象;最後，根據定位控制結果設計一速度迴授補償器，能使系統快速進入穩度誤差減少系統振盪且提高定位精度。

This paper is to built a biaxial pneumatic servo table by combining the air cylinder embedded with aerostatic bearing and a aerostatic bearing, which is used non-contact characteristic of aerostatic bearing in its application, expect to overcome the stick-slip phenomenon and improve the stability of the precision positioning. The friction forces of the biaxial pneumatic servo table are measured, and plot the relation figure of frictional force and speed. The hybrid self-tuning fuzzy controller with the compensators of buffer and servo-valve dead-zone are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach within the 0.08μm, and system has highly stability. Design a decoupling compensator, which can overcome the system coupling phenomena taken place while moving in double axes of the system effectively. Eventually, according to positioning control result design a velocity feedback of compensators, which can make system reduce oscillation and rise the positioning accuracy.

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