對於非線性摩擦力的研究探討，一直是從事相關精密控制之研究學者所不可獲缺的研究項目，尤其在精密控制上非線性摩擦力之影響更鉅，傳統氣壓定位平台由於摩擦力之黏滯滑動現象，造成難以達到精密定位控制，本文使用所設計的低摩擦橡膠薄膜氣壓平台，期望藉由降低系統摩擦力之大小，克服平台定位時發生黏滯滑動現象，以提高平台之定位精度。首先架設摩擦力量測平台，經實驗量測結果繪製摩擦力與速度之關係圖。並利用本文所提出的可變結構雙模模糊控制器，配合自調式模糊推論死區補償，在無載重及有40N載重下，其重覆定位精度皆可在0.08um以內。利用具負載補償之定位控制器，在有外在40N軸向負荷下，穩態可達到0.08um之控制精度。最後加入速度回授補償模擬系統之阻尼力，使系統在暫態時可抑制震盪且增加定位控制精度。

The nonlinear friction effects the positioning accuracy very much, so the study of nonlinear friction is very important. It is hard to reach the precise position controlling because of the friction of sticking-slipping effect on the usual pneumatic servo table. In order to overcome the sticking-slipping effect of the pneumatic table to enhance positioning accuracy, we design a pneumatic table with diaphragm to decrease the friction of the system . First, we set up a table with friction surveying instruments and then plot the relation curves between friction and velocity by experimental results. The hybrid fuzzy controller with the fuzzy tuning dead-zone compensator are proposed in this paper. From the experimental results, in case of different position, the positioning accuracy can reach within the 0.08μm without load and under 40 newton loading . Using load compensation, the steady state error can reach within 0.08um which is under the 40 newton axial loading. Eventually, according to positioning control result design a velocity feedback compensation, which can make system reduce oscillation and rise the positioning accuracy.

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