簡易檢索 / 詳目顯示

研究生: 張晉維
Chang, Chin-Wei
論文名稱: 微型多波長超穎波前感測器
Multi-Wavelength Metalens for Compact Wavefront Sensor
指導教授: 吳品頡
Wu, Pin-Chieh
學位類別: 碩士
Master
系所名稱: 智慧半導體及永續製造學院 - 關鍵材料學位學程
Program on Key Materials
論文出版年: 2024
畢業學年度: 112
語文別: 中文
論文頁數: 70
中文關鍵詞: 幾何相位可見光超穎透鏡多波長介電質超穎介面波前感測氮化鎵結構
外文關鍵詞: Multi-wavelength dielectric metasurface, Wavefront sensing, GaN nanopillars, Geometric phase
相關次數: 點閱:141下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 隨著科技發展,許多產品都往輕薄短小的方向發展,超穎介面也乘著這波潮流應運而生,其對於光波展現極強的調製能力,加上體積小,與各類光學元件的適配度高,更是衍伸出各種應用,足以取代,甚至是超越傳統的光學元件。
    在光學系統中,無可避免的會有像差的問題出現,導致波前扭曲變形,波前感測器能夠有效量測出波前變化,協助使用者判斷如何在後處理時對光學系統中形成的像差進行補正。傳統的Shack Hartmann波前感測器由研磨透鏡陣列組成,當入射光的波前發生改變時,穿過透鏡陣列時形成的一系列的焦點也會隨之位移,透過分析這些光點的位移情形達成波前感測的效果,但研磨透鏡因為其塊材的性質所產生色差現象,讓波前感測器並沒有辦法同時作用於不同波長下,同時也限制了感測器的體積大小。
    本篇研究透過幾何相位在設計上的優勢—穿透率的穩地性及節省模擬次數,設計出能夠在可見光波段,多波長同時入射情況下,完成分光、聚焦的超穎透鏡。將其組成超穎透鏡陣列取代傳統的研磨透鏡陣列,提升波前感測器的多工處理能力以及進一步的縮小體積。本研究論文選用氮化鎵奈米柱作為單元組成結構,實現在可見光波段的高穿透率,透過數值模擬完成樣品設計後,以電子束微影製程技術完成樣品的製備,接著使用設計好的光學系統,以不同形貌的波前入射樣品進行檢測,將檢測的結果與預期結果進行比對,驗證此設計的可行性。可以看到量測結果與預期結果的高度吻合,展示其在波前感測上的可行性,以及超穎透鏡在平面光學上的延伸應用。

    Traditional wavefront sensors can reconstruct the wavefront through different focusing behaviors, but the chromatic aberration and large size of polished lenses pose certain limitations in use. Compared to traditional polished lenses, metalens offer smaller size and achromatic properties, which gives us an ides of replacing polished lenses with metalens in order to effectively solve limitations mentioned above.
    In this study, we design a metalens made of GaN nanopillars, which is capable of splitting and focusing four different wavelengths simultaneously. Through these metalens array, we can easily detect different wavefront of four wavelength. With different focusing behaviors, the wavefront is then reconstructed using methods such as Zernike polynomials.

    口試合格證明 I 論文題目異動單 II 中文摘要 III 英文摘要 IV 誌謝 X 目錄 XII 表目錄 XIV 圖目錄 XV 第一章 緒論 1 1.1 前言 1 1.2 超穎介面 2 1.2.1 超穎介面 2 1.2.2 金屬超穎介面 2 1.2.3 介電質超穎介面 3 1.2.4 超穎透鏡 4 1.2.4.1 超穎透鏡聚焦 4 1.2.4.2 相位調製方式 5 1.3 Shack Hartmann波前感測器 8 1.4 研究目的 10 第二章 數值模擬與樣品製程 12 2.1 前言 12 2.2 超穎透鏡設計理念 12 2.3 數值模擬簡介 13 2.4 半導體製程方法與儀器介紹 18 2.4.1 共濺鍍機(Co-Sputter) 18 2.4.2 旋轉塗佈儀(Spin Coater) 19 2.4.3 電子束微影系統 19 2.4.4 電子束蒸鍍機(Electron Beam Evaporator) 24 2.4.5 感應耦合電漿離子蝕刻機 24 2.4.6 樣品製備流程 25 第三章 光學量測 30 3.1 前言 30 3.2 光路元件介紹 30 3.3 光路設計架構 37 3.3.1 不同入射角下聚焦光點量測 37 3.3.2 透鏡干擾下聚焦光點量測 38 3.3.3 聚焦效率量測 38 3.3.4 焦點半高全寬(Full Width at Half Maximum, FWHM)量測 39 第四章 結果分析與討論 41 4.1 前言 41 4.2 單元結構模態分析 41 4.3 製程結果 42 4.4 波前感測 42 4.4.1 超穎透鏡光學性質 42 4.4.2 不同入射角下波前感測結果 44 4.4.3 不同聚焦強度下波前感測結果 47 第五章 結論與未來展望 49 參考文獻 50

    [1] X. Fu, and T. J. Cui, "Recent Progress on Metamaterials: From Effective Medium Model to Real-time Information Processing System," Progress in Quantum Electronics 67, 100223 (2019).
    [2] V. G. Veselago, "Electrodynamics of Materials with Negative Index of Refraction," in Electromagnetic Materials(World Scientific) , pp. 115-122. (2003)
    [3] D. R. Smith, J. B. Pendry, and M. C. Wiltshire, "Metamaterials and Negative Refractive Index," science 305, 788-792 (2004).
    [4] J. B. Pendry, "Negative Refraction Makes a Perfect Lens," Physical review letters 85, 3966 (2000).
    [5] A. V. Zayats, I. I. Smolyaninov, and A. A. Maradudin, "Nano-optics of Surface Plasmon Polaritons," Physics reports 408, 131-314 (2005).
    [6] K. M. Mayer, and J. H. Hafner, "Localized Surface Plasmon Resonance Sensors," Chemical reviews 111, 3828-3857 (2011).
    [7] Y. Cao, J. Zhang, Y. Yang, Z. Huang, N. V. Long, and C. Fu, "Engineering of SERS Substrates Based on Noble Metal Nanomaterials for Chemical and Biomedical Applications," Applied Spectroscopy Reviews 50, 499-525 (2015).
    [8] W. T. Chen, and F. Capasso, "Will Flat Optics Appear in Everyday Life Anytime Soon?," Applied Physics Letters 118 (2021).
    [9] Z. L. Wang, "On Maxwell's Displacement Current for Energy and Sensors: The Origin of Nanogenerators," Materials today 20, 74-82 (2017).
    [10] Y. Hu, X. Wang, X. Luo, X. Ou, L. Li, Y. Chen, P. Yang, S. Wang, and H. Duan, "All-dielectric Metasurfaces for Polarization Manipulation: Principles and Emerging Applications," Nanophotonics 9, 3755-3780 (2020).
    [11] V. Il’in, and V. Farafonov, "Rayleigh Approximation for Axisymmetric Scatterers," Optics letters 36, 4080-4082 (2011).
    [12] A. B. Evlyukhin, C. Reinhardt, A. Seidel, B. S. Luk’yanchuk, and B. N. Chichkov, "Optical Response Features of Si-nanoparticle Arrays," Physical Review B—Condensed Matter and Materials Physics 82, 045404 (2010).
    [13] G.-Y. Lee, J. Sung, and B. Lee, "Metasurface Optics for Imaging Applications," MRS Bulletin 45, 202-209 (2020).
    [14] W. Liu, Z. Li, H. Cheng, and S. Chen, "Dielectric Resonance-based Optical Metasurfaces: From Fundamentals to Applications," Iscience 23 (2020).
    [15] P. Genevet, F. Capasso, F. Aieta, M. Khorasaninejad, and R. Devlin, "Recent Advances in Planar Optics: From Plasmonic to Dielectric Metasurfaces," Optica 4, 139-152 (2017).
    [16] F. Aieta, P. Genevet, M. Kats, and F. Capasso, "Aberrations of Flat Lenses and Aplanatic Metasurfaces," Optics express 21, 31530-31539 (2013).
    [17] M. Pan, Y. Fu, M. Zheng, H. Chen, Y. Zang, H. Duan, Q. Li, M. Qiu, and Y. Hu, "Dielectric Metalens for Miniaturized Imaging Systems: Progress and Challenges," Light: Science & Applications 11, 195 (2022).
    [18] J. Yu, B. Ma, A. Ouyang, P. Ghosh, H. Luo, A. Pattanayak, S. Kaur, M. Qiu, P. Belov, and Q. Li, "Dielectric Super-absorbing Metasurfaces via PT Symmetry Breaking," Optica 8, 1290-1295 (2021).
    [19] R. Alaee, R. Filter, D. Lehr, F. Lederer, and C. Rockstuhl, "A Generalized Kerker Condition for Highly Directive Nanoantennas," Optics letters 40, 2645-2648 (2015).
    [20] M. Decker, I. Staude, M. Falkner, J. Dominguez, D. N. Neshev, I. Brener, T. Pertsch, and Y. S. Kivshar, "High‐efficiency Dielectric Huygens’ surfaces," Advanced Optical Materials 3, 813-820 (2015).
    [21] M. Khorasaninejad, and F. Capasso, "Broadband Multifunctional Efficient Meta-gratings Based on Dielectric Waveguide Phase Shifters," Nano letters 15, 6709-6715 (2015).
    [22] Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, "Silicon Nitride Metalenses for Close-to-one Numerical Aperture and Wide-angle Visible Imaging," Physical Review Applied 10, 014005 (2018).
    [23] Y. Wang, H. Jiang, H. Dong, and W. Zhao, "Dual-channel Dynamic Modulation for Polarization-dependent Absorption by Gating Ultrathin TiN Films in the Near-infrared Region," Optical Materials Express 13, 3242-3251 (2023).
    [24] B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, and C.-H. Kuan, "GaN Metalens for Pixel-level Full-color Routing at Visible Light," Nano letters 17, 6345-6352 (2017).
    [25] J. C. Wyant, and K. Creath, "Basic Wavefront Aberration Theory for Optical Metrology," Applied optics and optical engineering 11, 28-39 (1992).
    [26] V. Lakshminarayanan, and A. Fleck, "Zernike Polynomials: A Guide," Journal of Modern Optics 58, 545-561 (2011).
    [27] K. Niu, and C. Tian, "Zernike Polynomials and Their Applications," Journal of Optics 24, 123001 (2022).
    [28] Y. Hsieh, Y. Yu, Y. Lai, M. Hsieh, and Y.-F. Chen, "Integral-based Parallel Algorithm for the Fast Generation of the Zernike Polynomials," Optics Express 28, 936-947 (2020).
    [29] X. Zou, G. Zheng, Q. Yuan, W. Zang, R. Chen, T. Li, L. Li, S. Wang, Z. Wang, and S. Zhu, "Imaging Based on Metalenses," PhotoniX 1, 1-24 (2020).
    [30] "NKT Photonics," https://en.lusterinc.com/fiber/solutions/superk.html.
    [31] "SuperK Extreme," https://en.lusterinc.com/fiber/solutions/superk.html.
    [32] "SuperK Select," https://www.photonicsolutions.co.uk/product-detail.php?prod=6800.
    [33] "Changchun New Industries Optoelectronics," https://www.cnilaser.com/blue_laser450.htm.
    [34] "Blue Diode Laser," https://www.cnilaser.com/SM-Fiber-Output-Laser.htm.
    [35] "Thorlabs," https://www.thorlabs.com/.
    [36] "Rotation Mounts," https://www.onset-eo.com/product/rotation-mounts/.
    [37] "Manual Linear XYZ Axis Stage," https://www.scientech.com.tw/zh-hant/pages/surugaseiki.aspx.
    [38] "50x Mitutoyo Plan Apochromat Objective," https://www.thorlabs.com/thorproduct.cfm?partnumber=MY50X-805.
    [39] "100x Mitutoyo M Plan Apo NIR Objective," https://www.edmundoptics.com/p/100x-mitutoyo-plan-apo-nir-infinity-corrected-objective/6837/.
    [40] "CMOS camera," https://www.nevis.com.tw/prodDetail.asp?id=443.

    下載圖示
    2026-08-29公開
    QR CODE