本研究探討以氣液相溶膠凝膠法(gas-liquid phase sol-gel process)提升polydimethyl siloxane(PDMS)的機械強度，使之能成為高分子微米加工之模具。首先，將PDMS母模浸泡 tetraethylortho silicate(TEOS)溶液中10分鐘，經丙酮沖洗後再與去離子水和aminomethyl propanol-95(AMP-95)反應三天。實驗結果顯示，此方法不但成功地提升了PDMS的機械強度，使用硬化後的PDMS模具也可以熱壓成型法準確地複製出大面積，具有微結構的PMMA成品，而PMMA成品的微結構，其深寬比甚至可以達到8以上。PDMS的機械強度隨著強制反應時間的增加而持續快速增大；而自然反應時間的增加，PDMS的機械強度先是逐漸增大而後趨於緩慢增大。透過粒徑量測亦發現粒徑的大小與PDMS的機械強度有正向的關係。本研究所提出PDMS硬化的方法，不僅為一簡單、有效的模具製作方法，同時具備保有silicon母模的優點。

　　In this study, we proposed and demonstrated a gas-liquid phase, sol-gel process to enhance the mechanical strength of polydimethyl siloxane (PDMS), which can be utilized for polymer microfabrication. The PDMS mold was first soaked in tetraethylortho silicate (TEOS) for 10 minutes, followed by reacting with DI water and aminomethyl propanol-95 (AMP-95) for 3 days. The results showed that the mechanical strength of the PDMS mold was substantially increased and the PMMA replica with great replication accuracy was obtained through hot embossing process. Moreover, PMMA microstructures with aspect ratio larger than 8 was fabricated using the hardened PDMS mold. For forced reaction, the mechanical strength of PDMS mold increases as the reaction time increases; for the unforced reaction, the mechanical strength increases initially as the reaction time increases but seemingly levels off afterwards. It is also observed that there is a positive relationship between the mechanical strength and particle size. The developed technique not only provides a simple, cost-effective, reliable and relatively fast approach for mold making but also allows preservation of the SU8/silicon mother mold.

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