本研究主要的目的在建立大水平量測範圍之白光干涉技術，以利大面積微結構表面形貌量測，特別針對微機電元件的表面形貌作非破壞性且高解析度的量測。

白光干涉技術根據白光具有連續波長之頻譜，使得干涉條紋具同調長度較短的特性。因此本研究利用Mirau物鏡搭配光學顯微鏡來架設白光干涉儀，搭配相移演算法，找出干涉條紋的最大強度位置，來重建待測試件之三維形貌。並將實驗量測之結果與Alpha-Step量測儀所量測之結果驗證比對，及評估量測系統之再現性(3σ)。在影像縫合部分，主要增加水平量測範圍，透過數位影像相關法將不同位置之影像與三維形貌進行縫合。首先將兩個不同位置且具相同特徵之影像進行拉普拉斯濾波，再從兩張影像之重疊區域選取比對之遮罩判別影像縫合之位置，最後將此影像術應用到白光干涉量測三維形貌之縫合，以驗證本研究之可行性。

由實驗結果可知，濾波影像在選用的比對遮罩標準差達7.1以上，會使得縫合精確度達 1 pixel，而在三維形貌縫合處之誤差，其平均誤差可在20nm以內。

This thesis aims to build a large horizontal range of white light interferometry techniques applied in the mirco-structure surface profile measurement. It particularly focuses on the surface profile of micro-eletro-mechanical to perform the non-destructiveness and high resolution profile measurement.

Based on its frequency spectrum characteristics of continuous wavelength, the white light interferometry technique shortens coherence length significantly. In experiment setup, we adopt a Mirau objective which specifically designed for interferometer to build the white light interferometer, and work with phase shifting algorithm to find out the position of the maximum intensity of interference fringes and finally reconstruct the topography of sample. In addition, we compare the result of experiment with the Alpha-Step instruments, and evaluate 3 sigma of measurement system. As for the large horizontal measurement range, we stitch the image and 3D profile of different position by using digital-image-correlation method. Firstly, we capture the two images that have the same feature from different position to transact the Laplacian filter, and select the area to compare each other to find out the stitching position from overlapping area of the two images. Finally, this study applies image stitching position to stitch the 3D profile of the white light interferometry and confirm the research feasibility.

The experiment results show that stitching precision will achieve 1 pixel when standard deviation of comparison area of image exceed 7.1,and the error of 3D profile stitching is under 20 nm.

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