鋯鈦酸鉛(Pb(ZrxTi1-x)O3，PZT)陶瓷材料，因其具有良好之壓電特性，近年來已被廣泛應用在微機電元件的設計上，這些元件包括：微致動器、微感測器、微幫浦。本論文研究目的是將PZT壓電薄膜沉積在Si基材的結構上，利用PZT良好的壓電特性來當作感測器，來製作微型加速計。
在本實驗中以Sol-Gel法來佈植壓電薄膜，製作出約0.35μm的壓電薄膜，同時測試其正壓電效應及逆壓電效應，並且與市售之壓電薄膜相比較。因此在微機電壓電薄膜製程上，本論文提供許多重要的參數及條件，以做為未來製程上的參考。並研究改善壓電薄膜製造之技術，微型加速計結構之微小化。

In recent years, the superior piezoelectric performance of lead-zirconate-
titanate, PZT：(Pb(ZrxTi1-x)O3), ceramics materials is applied for micro-
electro-mechanical-systems(MEMS) extensively, including micro-actuators、micro-sensor、micro-pump, etc. The purpose of this study is depositing PZT piezoelectric thin film on the structure of silicon substrate, use the good piezoelectric property of PZT as the sensor, to manufacture the miniature piezoelectric accelerometer.
In this work, sol-gel method was used to fabricate PZT piezoelectric thin film.
A PZT piezoelectric thin film with thickness of 0.35μm is made by sol-gel method. Test the direct piezoelectric effect and converse piezoelectric effect, and compare with the PVDF. As a result, important fabrication conditions and recipes have been obtained and established in this work for future applications in related field. Research the technology of improve the fabrication of piezoelectric thin film, microminiaturization of accelerometer structure.

[1] Chengkuo Lee, Toshihiro Itoh and Tadatomo Suga, 1996, “Micromachined piezoelectric force sensors based on PZT thin films,“ IEEETransaction on Ultrasonics, Ferroelectrics, and Frequency Cintrol,Vol. 43, No.4, pp. 553~559.
[2] Emmanuel Dafay, Martine LeBerre, Bachir Semmache, Michel Troccaz and Daniel Barbier, 1998, “Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb（Zr0.52Ti0.48）O3 thin films by means of the orthogonal array method,” Materials Science and Engineering B55, pp.123-129.
[3] G. Velu, D. Remiens, C. Bergaud and L. Nicu, 1999, “Piezoelectric properties of PZT films for microcantilever,” E. Cattan, T. Haccart, Sensors 112 and Actuators 74, pp. 60-64.
[4] 1992, ”MEMS-Microelectromechanical System,” Mechanical Engineering, pp. 40-47.
[5] M. Madou, 1997, “Fundamentals of Microfabrication,” CRC press, Boca Raton, New York.
[6] R. Maas, M. Koch, N.R. Harris, N.M. White, A.G.R Evans, 1997,
“Thick-film printing of PZT onto silicon,” Materials Letters 31, pp.
109-112.
[7] S P Beeby, J N Ross and N M White, 2000, “Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensor,” J.114 Micromech Microeng. 10, pp. 322-328.
[8] Kun-ichi Miyazawa Kunio Ito Ryutaro Maeda “Structure and electrical properties of multiplayer PZT film prepared by sol gel processing ”Ceramics International 26 2000 pp.501-506
[9] Sung-Gap Lee ,Kyoung-tae kim , Young-Hie Lee “Characterization of lead zirconate titanate heterolayered thin films prepared on Pt / Ti / SiO2 / Si Substrate by the sol-gel” Thin Solid Films 372 2000 pp.45-49
[10] A.Azevedo,S Bharthulwar, W.R.Eppler and Mkryder Deposition of Garnet “Thin Films by Metallo-organic Decomposition（MOD）”IEEE TRANEACTIONA ON MAGENTIC. VOL.30 NO6 NOVERMBER 1994 pp.4416-4418
[11] Xin-Shan Li-Kaoru yamashita,Tsunehisa Tanaka, Yoshihiko Suzuki Masanori Okuyama “Structural and electrical properties of highly oriented Pb（Zr,Ti）O3 thin films deposited by facing target sputtering ”Sensors and Actuator82 2000 pp.265-269
[12] Y. L. TU, S.J MILNE “A study of the effects of process variables on the properties of PZT films produced by a single-layer sol-gel technique ”JOURNAL OF MATERIALS SCIENCE 30 1995 pp. 2507-2516
[13] Eun-Gu Lee Jin Seong Park Jae Gab Lee “ Ferroelectric properties of crystalline oriented Pb（Zr,Ti）O3 thin films prepared by sol-gel technique ”The Solid Films312 1998 pp.228-231
[14] Aiying Wu , Paula M Vilarinho, Isabel M. Miranda Salvado, Joao L. Baptista, C.M. de Jesus and M. F. da Silva “Characterization of Seed Sol-Gel Lead Zirconate Titannate Thin Films”. Journal of the European Ceramic Society 19 1999 pp.1403-1407
[15] Yukimi Takahashi “Synthetic process of the sol-gel derived Pb（Zr0.53Ti0.47）O3 films using poly” Thin Solid Films 370 2000 pp.5-9
[16] Wei Ren ,Hui-jing Zhou ,Xiao-qing Wu ,Liang-ying Zhang ,Xi yao “Measurement of piezoelectric coefficients of lead zirconate titanate thin films by the normal load method using a composite tip ”Materials Letters31 1997 pp.185-188
[17] D. A. Barrow T.E.Petroff R. P. Tandon M.Sayer “Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process ”J.Appl.Phys.81（2）,15 january 1997 pp.876-881
[18] Ph. Luginbuhl G.-A Racine , Ph Lerch , B. Romanowicz, K.G. Brooks, N.F. de Rooij Ph. Renaud , N Setter. “Piezoelectric cantilever beams actuated by PZT sol-gel thin film”Sensor and Actuator A54 1996 pp.530-535
[19] K.G. Brooks, D.Damjanovic, N Setter, Ph..Luginbuhl G.-A Racine and N.F. de Rooij “Piezoelectric Response of PZT Thin Film Actuated Micromachined Silicon Cantilever Beams”Sensor and Actuator A54 1996 pp.520-522
[20] Hendrickson, M.; Tao Su; Trolier-McKinstry, S.; Rod, B. J. Zeto, R.J. “Processing of PZT piezoelectric thin films for microelectromechanical systems ”Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on Applications of , Volume: 2 , 1996 pp. 683 -686
[21] Mescher, M.; Abe, T.; Brunett, B.; Metla, H.; Schlesinger, T.E.; Reed, M. “Piezoelectric lead-zirconate-titanate actuatorfilms for microelectromechanical systems applications ”Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE , 1995 pp. 261-266
[22] D.F. Bahr , J.S. Robach , J.S Wright , L.F. Francis , W.W. Gerberich “Mechanical deformation of PZT thin films for MEMS applications ”Material Science and Engineering A Volume: 259, Issue: 1, January 15, 1999, pp. 126-131
[23] A. Schroth, C. Lee, S. Matsumoto, M. Tanaka, R. Maeda, “Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners Micro Electro Mechanical Systems,”1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on , 1998 pp. 402 –407
[24] 汪建民主編， ”陶瓷技術手冊（上）” ，經濟部技術處發行 ，1994
[25] 吳朗編著，”電子陶瓷-壓電”，全欣科技，1944
[26] 莊達人，”VLSI 製造技術”，高立出版，1995
[27] 陳銘森，”鎳酸鑭電極對鋯鈦酸鉛溶凝膠薄膜製作與特性影響之研究”，國立清華大學博士論文，民國85年3月
[28] 吳俊憲，”前驅溶液製備條件對溶膠-凝膠法製備之鋯鈦酸鉛性影響之探討”，長庚大學碩士論文，民國85年6月
[29] 林淑惠，”PZT壓電薄膜之懸臂樑微致動元件製程研究”， 國立交通大學碩士論文，民國88年6月
[30] 李俊翰，”PZT壓電致動器之製程與鐵電特性研究”， 國立交通大學碩士論文，民國90年6月
[31] 鍾曜光，”壓電式微超音波感測器”， 國立台灣大學碩士論文，民國90年6月
[34] 江志順，” 壓電薄膜致動微機電元件之製程及性能分析”， 私立逢甲大學碩士論文，民國91年6月