本研究使用雙電極對稱型壓電元件(Dual electric symmetric piezoelectric element, DESPE)藉由不同的振動模態與整合微型機構，設計出體積小、結構簡單的微型光纖耦合平台，此X、Y、Z軸微型光纖耦合平台的結構包含三組單軸度微型致動器與滑動彈簧片。針對單軸度微型致動器所需的運動模態，本文利用有限元素分析軟體，設計出對稱型壓電元件適合應用於單軸度微型致動器的幾何尺寸及所需之運動模態與共振頻率，並由量測系統微系統分析儀(MSA-400)進行量測分析。由實驗結果顯示，對於單軸度微型致動器，在無負載的情況下，驅動電壓15Vpp，驅動頻率為229.5kHz，可產生最大速度103.4mm/s，隨著負載增加，相對應的速度也隨之降低。而針對微型光纖耦合平台而言，在相同驅動電壓下，X、Y、Z軸之驅動頻率分別為229.5kHz、229.3 kHz、229kHz，相對應的速度可達到66.5mm/s、73.4mm/s、83.4mm/s，且解析度可達0.5~1μm。因此，本文所發展之微型光纖耦合平台藉由整合高亮度LED光源及CPC(Compound parabolic concentrator)光路準直模組設計之光纖導光耦合元件建構完成光纖耦合系統，並將光源導入光纖，並配合旋轉以及移動光纖的方式，以提升其耦合效率，最後對於光纖於水下照明應用進行評估。

This paper presents a novel micro optical fiber coupling system which composed of three dual electric symmetric piezoelectric elements (DESPEs) and slip plate and optical element. The motion mode of DESPE is designed by finite element analysis software to as ANSYS determine its optimal size and resonant frequency which is measured using micro system analyzer (MSA-400). The experimental results demonstrate that the single degree of freedom microactuator can generate maximum speed 103.4mm/s at driving voltage 15Vpp and driving frequency 229.5kHz under no load condition. With the same driving voltage, the driving frequency of proposed micro optical fiber coupling platform at X, Y and Z direction is 229.5kHz, 229.3kHz and 229kHz, which corresponds to 66.5mm/s, 73.4mm/s and 83.4mm/s, respectively. In addition, the resolution of micro optical coupling platform can achieve 0.5 to 1μm. Hence, the optical fiber coupling system consisted by LED and CPC collimator can be used to enhance the coupling efficiency by its high freedom and accuracy construction. We also evaluate the feasibility of the optical fiber when it has been using under the water.

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