近年來半導體晶圓廠房火災發生事件頻傳，造成了嚴重的金錢損失及人員傷亡。而無塵室中溼式清洗台所使用的易燃性有機溶劑，為火災發生常見之原因。由於廠房利用頭頂般運系統(Overhead Transport)來代替人力搬運物料，因此無法設置防煙垂壁，故常使用替代方案來取代防煙垂壁之功能，以滿足淨空天花空間之需求。本研究之目的為探討晶圓廠常見之替代方案：FFU(Fan Filter Unit)降載與一般防煙垂壁方案於煙控上之差異，以驗證其替代方案之可行性。
本研究係利用溼式清洗台常用之有機溶劑異丙醇(IPA)為燃料，以火災模擬軟體FDS來模擬火災發生時煙霧的流動情形，藉此比較FFU降載方案與防煙垂壁方案之功效，並使用性能式煙控設計，探討不同降載幅度及不同火源參數設定對於FFU降載方案之影響。
模擬結果顯示：FFU降載方案雖在限制煙霧擴散之功效上略遜於設置防煙垂壁，但在減緩煙塵下降速度上效果相當顯著，說明此替代方案有助於達到減少人員傷亡之目標，仍為有效之煙控方案。而在影響FFU降載方案功效之因素上，以FFU降載幅度、火源大小及火源位置對模擬結果較有影響性，而火源高度則影響不大。

In recent years, fire happen in semiconductor fabs frequently and cause serious financial losses and casualties. The common reason of fire is that the wet benches use flammable organic solvent. Because fabs use Overhead Transport to replace the manual handling of materials, so cannot set the smoke prevention wall. Fabs often use alternatives to replace the ability of smoke prevention wall. This study aims to investigate the differences in smoke control between the alternatives：FFU (Fan Filter Unit) derating program and smoke prevention wall and to verify the feasibility of alternatives.
In this study, we use the Isopropanol (IPA), the common organic solvent often using in wet bench, as fuel and the fire simulation software FDS to simulate the flow of smoke when the fire broke. And then we use efficacy assessment of smoke control to explore the impact of different derating magnitude and different parameter settings on derating program.
Simulation results show that: In limiting the spread of smoke, the effect of derating program is slightly lower than smoke prevention wall. But derating program can retard soot falling speed effectively and contribute to achieve the goal of reducing casualties. And in the influence factors to derating program, derating range, fire size and location have big influence on the results, while the fire height have little impact.

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