本篇論文主要的研究主要目的為開發日後一嶄新的近場掃描光學顯微儀，應用無孔徑探針方式將近場訊號解析出來，期望可達到側向解析度低於10nm以下。
　　系統主要是建構在使用音叉感測器的原子力學顯微鏡上，並結合了外差干涉技術來擷取光學訊號。光偵測器則是使用快速雪崩二極體，在遠場偵測干涉後的高頻光學訊號。偵測的散射光線，主要有兩個部分，一為屬於針尖與表面奈米結構交互作用後的近場光學訊號；另一為非此部分的遠場背景雜訊。使用解調探針高諧振頻率可用來擷取近場訊號，獲得奈米結構的近場光學資訊。利用掃描的方式同時獲得光學與物理結構資訊。
　　此無孔徑近場掃描光學顯微儀系統的發展是使用音叉感測器的原子力學顯微鏡，較一般光纖式探針的優點是能有更好的空間解析度，不會受到光纖截止效應、熱傷害…等問題而受到解析度上的限制。另外有別於使用一般懸臂式光感測式探針作為探針定位的原子力學顯微鏡為架構的無孔徑近場掃描光學顯微鏡而言，本系統中的探針定位控制感應器採用音叉感測器，避免了熱雜訊效應與高諧振動效應這些會影響擷取近場訊號的擾動因素。
　　本論文的研究對於擷取近場訊號的調變控制特別利用了音叉感測器，來避免熱效應與高諧振動效應的影響，已獲取真確的近場訊號。

　　In this thesis, a new near-field scanning optical microscope based on an apertureless scattering technique is introduced for resolving optical properties of surfaces with lateral resolution reaching 10 nm and greater.
　　The construction of the instrument is supported by a dynamic mode, quartz tuning-fork-based atomic force microscope (AFM), which is coupled with a heterodyne interferometry optical detection system. We mounted the AFM tip perpendicular to the tuning-fork tine whose apex is metallic or dielectric. The backscattered light is collected and interfered with a reference beam whose frequency is slightly shifted with respect to the scattered beam. The interfered signals are detected by a far-field and high-speed avalanche photodiode(APD). The scattered light consists of two parts of differing in spatial origin. One of them is the near field which contains optical information that belongs to the apex and interacts with nanostructures. The second part is the far field part which comes from scattering along the illuminated tip body and the substrate surface. By demodulating the signal of the tip’s vibrations at high harmonics, the far field part can be suppressed effectively, leaving only the near field information of the nanostructures. By raster scanning the sample under the AFM tip, the information about the surface amplitude and phase is obtained simultaneously with its topography.
　　This new apertureless, near-field scanning optical microscope (aNSOM) with a quartz tuning-fork AFM, features several advantages over the well-known aperture NSOM: high resolution limited only by the tip apex dimension, and effective background suppression. In general, an aNSOM system based on an AFM which is used the cantilever beam and an optical feedback method introduces thermal noise and an anharmonic phenomenon.
　　This research, specific operation settings of the quartz tuning fork will be employed as a distance modulation unit which avoid thermal noise and anharmonic phenomenon, and will solely produce optical information without artifacts in the detected signal.

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